DOI: 10.1016/0168-583x(90)90912-e. Characterization of CVD-hydrogenated diamondlike thin films on silicon by EELS, RBS/channeling and nuclear reaction analysis

Characterization of CVD-hydrogenated diamondlike thin films on silicon by EELS, RBS/channeling and nuclear reaction analysis

10.1016/0168-583x(90)90912-e

Crossref journal-article

Elsevier BV

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms (78)

Bibliography

Bruley, J., Madakson, P., & Liu, J. C. (1990). Characterization of CVD-hydrogenated diamondlike thin films on silicon by EELS, RBS/channeling and nuclear reaction analysis. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 45(1â4), 618â621.

Authors 3

J. Bruley (first)
P. Madakson (additional)
J.C. Liu (additional)

References 11 Referenced 15

10.1116/1.574188 / J. Vac. Sci. Technol. by Tsai (1987)
10.1080/09500838808214715 / Philos. Mag. Lett. by Berger (1988)
10.1126/science.241.4868.913 / Science by Angus (1988)
10.1063/1.1139116 / Rev. Sci. Instr. by Batson (1986)
10.1063/1.1139739 / Rev. Sci. Instr. by Batson (1988)
10.1063/1.88826 / Appl. Phys. Lett. by Lanford (1976)
10.1103/PhysRevB.38.7511 / Phys. Rev. by Comelli (1988)
{'key': '10.1016/0168-583X(90)90912-E_BIB7', 'series-title': 'The Stopping and Range of Ions in Solids', 'author': 'Ziegler', 'year': '1985'} / The Stopping and Range of Ions in Solids by Ziegler (1985)
10.1016/0368-2048(77)85029-9 / J. Electr. Spec and Rel. Phen. by Hitchcock (1977)
10.1016/0368-2048(88)80005-7 / J. Electr. Spec and Rel. Phen. by Ishii (1988)
10.1016/0038-1098(83)90936-5 / Solid State Commun. by Dischler (1983)

Dates

Type	When
Created	22 years, 9 months ago (Nov. 11, 2002, 10:07 p.m.)
Deposited	6 years, 5 months ago (April 4, 2019, 10:23 a.m.)
Indexed	3 months ago (June 5, 2025, 5:45 p.m.)
Issued	35 years, 8 months ago (Jan. 1, 1990)
Published	35 years, 8 months ago (Jan. 1, 1990)
Published Print	35 years, 8 months ago (Jan. 1, 1990)

Funders 0

None

BibTeX

@article{Bruley_1990, title={Characterization of CVD-hydrogenated diamondlike thin films on silicon by EELS, RBS/channeling and nuclear reaction analysis}, volume={45}, ISSN={0168-583X}, url={http://dx.doi.org/10.1016/0168-583x(90)90912-e}, DOI={10.1016/0168-583x(90)90912-e}, number={1–4}, journal={Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms}, publisher={Elsevier BV}, author={Bruley, J. and Madakson, P. and Liu, J.C.}, year={1990}, month=jan, pages={618–621} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        6,
        5
      ]
    ],
    "date-time": "2025-06-05T21:45:18Z",
    "timestamp": 1749159918097
  },
  "reference-count": 11,
  "publisher": "Elsevier BV",
  "issue": "1-4",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            1990,
            1,
            1
          ]
        ],
        "date-time": "1990-01-01T00:00:00Z",
        "timestamp": 631152000000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "https://www.elsevier.com/tdm/userlicense/1.0/"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        1990,
        1
      ]
    ]
  },
  "DOI": "10.1016/0168-583x(90)90912-e",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        11,
        12
      ]
    ],
    "date-time": "2002-11-12T03:07:42Z",
    "timestamp": 1037070462000
  },
  "page": "618-621",
  "source": "Crossref",
  "is-referenced-by-count": 15,
  "title": "Characterization of CVD-hydrogenated diamondlike thin films on silicon by EELS, RBS/channeling and nuclear reaction analysis",
  "prefix": "10.1016",
  "volume": "45",
  "author": [
    {
      "given": "J.",
      "family": "Bruley",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "P.",
      "family": "Madakson",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "J.C.",
      "family": "Liu",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "78",
  "reference": [
    {
      "key": "10.1016/0168-583X(90)90912-E_BIB1",
      "doi-asserted-by": "crossref",
      "first-page": "3287",
      "DOI": "10.1116/1.574188",
      "volume": "A5",
      "author": "Tsai",
      "year": "1987",
      "journal-title": "J. Vac. Sci. Technol."
    },
    {
      "key": "10.1016/0168-583X(90)90912-E_BIB2",
      "doi-asserted-by": "crossref",
      "first-page": "285",
      "DOI": "10.1080/09500838808214715",
      "volume": "57",
      "author": "Berger",
      "year": "1988",
      "journal-title": "Philos. Mag. Lett."
    },
    {
      "key": "10.1016/0168-583X(90)90912-E_BIB3",
      "doi-asserted-by": "crossref",
      "first-page": "913",
      "DOI": "10.1126/science.241.4868.913",
      "volume": "241",
      "author": "Angus",
      "year": "1988",
      "journal-title": "Science"
    },
    {
      "key": "10.1016/0168-583X(90)90912-E_BIB4_1",
      "doi-asserted-by": "crossref",
      "first-page": "43",
      "DOI": "10.1063/1.1139116",
      "volume": "57",
      "author": "Batson",
      "year": "1986",
      "journal-title": "Rev. Sci. Instr."
    },
    {
      "key": "10.1016/0168-583X(90)90912-E_BIB4_2",
      "doi-asserted-by": "crossref",
      "first-page": "1132",
      "DOI": "10.1063/1.1139739",
      "volume": "59",
      "author": "Batson",
      "year": "1988",
      "journal-title": "Rev. Sci. Instr."
    },
    {
      "key": "10.1016/0168-583X(90)90912-E_BIB5",
      "doi-asserted-by": "crossref",
      "first-page": "566",
      "DOI": "10.1063/1.88826",
      "volume": "28",
      "author": "Lanford",
      "year": "1976",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/0168-583X(90)90912-E_BIB6",
      "doi-asserted-by": "crossref",
      "first-page": "7511",
      "DOI": "10.1103/PhysRevB.38.7511",
      "volume": "B38",
      "author": "Comelli",
      "year": "1988",
      "journal-title": "Phys. Rev."
    },
    {
      "key": "10.1016/0168-583X(90)90912-E_BIB7",
      "series-title": "The Stopping and Range of Ions in Solids",
      "author": "Ziegler",
      "year": "1985"
    },
    {
      "key": "10.1016/0168-583X(90)90912-E_BIB8",
      "doi-asserted-by": "crossref",
      "first-page": "317",
      "DOI": "10.1016/0368-2048(77)85029-9",
      "volume": "10",
      "author": "Hitchcock",
      "year": "1977",
      "journal-title": "J. Electr. Spec and Rel. Phen."
    },
    {
      "key": "10.1016/0168-583X(90)90912-E_BIB9",
      "doi-asserted-by": "crossref",
      "first-page": "55",
      "DOI": "10.1016/0368-2048(88)80005-7",
      "volume": "46",
      "author": "Ishii",
      "year": "1988",
      "journal-title": "J. Electr. Spec and Rel. Phen."
    },
    {
      "key": "10.1016/0168-583X(90)90912-E_BIB10",
      "doi-asserted-by": "crossref",
      "first-page": "105",
      "DOI": "10.1016/0038-1098(83)90936-5",
      "volume": "48",
      "author": "Dischler",
      "year": "1983",
      "journal-title": "Solid State Commun."
    }
  ],
  "container-title": "Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://api.elsevier.com/content/article/PII:0168583X9090912E?httpAccept=text/xml",
      "content-type": "text/xml",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://api.elsevier.com/content/article/PII:0168583X9090912E?httpAccept=text/plain",
      "content-type": "text/plain",
      "content-version": "vor",
      "intended-application": "text-mining"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2019,
        4,
        4
      ]
    ],
    "date-time": "2019-04-04T14:23:48Z",
    "timestamp": 1554387828000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://linkinghub.elsevier.com/retrieve/pii/0168583X9090912E"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1990,
        1
      ]
    ]
  },
  "references-count": 11,
  "journal-issue": {
    "issue": "1-4",
    "published-print": {
      "date-parts": [
        [
          1990,
          1
        ]
      ]
    }
  },
  "alternative-id": [
    "0168583X9090912E"
  ],
  "URL": "http://dx.doi.org/10.1016/0168-583X(90)90912-E",
  "relation": {},
  "ISSN": [
    "0168-583X"
  ],
  "subject": [],
  "container-title-short": "Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms",
  "published": {
    "date-parts": [
      [
        1990,
        1
      ]
    ]
  }
}