DOI: 10.1016/0168-583x(87)90527-1. Quantitative mass and energy dispersive elastic recoil spectrometry: Resolution and efficiency considerations

Quantitative mass and energy dispersive elastic recoil spectrometry: Resolution and efficiency considerations

10.1016/0168-583x(87)90527-1

Crossref journal-article

Elsevier BV

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms (78)

Bibliography

Whitlow, H. J., Possnert, G., & Petersson, C. S. (1987). Quantitative mass and energy dispersive elastic recoil spectrometry: Resolution and efficiency considerations. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 27(3), 448â457.

Authors 3

Harry J. Whitlow (first)
Göran Possnert (additional)
C.Sture Petersson (additional)

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Dates

Type	When
Created	22 years, 9 months ago (Nov. 11, 2002, 5:07 p.m.)
Deposited	6 years, 4 months ago (April 3, 2019, 10:54 a.m.)
Indexed	1 year, 1 month ago (July 1, 2024, 7:57 a.m.)
Issued	38 years, 1 month ago (July 1, 1987)
Published	38 years, 1 month ago (July 1, 1987)
Published Print	38 years, 1 month ago (July 1, 1987)

Funders 0

None

BibTeX

@article{Whitlow_1987, title={Quantitative mass and energy dispersive elastic recoil spectrometry: Resolution and efficiency considerations}, volume={27}, ISSN={0168-583X}, url={http://dx.doi.org/10.1016/0168-583x(87)90527-1}, DOI={10.1016/0168-583x(87)90527-1}, number={3}, journal={Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms}, publisher={Elsevier BV}, author={Whitlow, Harry J. and Possnert, Göran and Petersson, C.Sture}, year={1987}, month=jul, pages={448–457} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2024,
        7,
        1
      ]
    ],
    "date-time": "2024-07-01T11:57:15Z",
    "timestamp": 1719835035339
  },
  "reference-count": 52,
  "publisher": "Elsevier BV",
  "issue": "3",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            1987,
            7,
            1
          ]
        ],
        "date-time": "1987-07-01T00:00:00Z",
        "timestamp": 552096000000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "https://www.elsevier.com/tdm/userlicense/1.0/"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        1987,
        7
      ]
    ]
  },
  "DOI": "10.1016/0168-583x(87)90527-1",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        11,
        11
      ]
    ],
    "date-time": "2002-11-11T22:07:42Z",
    "timestamp": 1037052462000
  },
  "page": "448-457",
  "source": "Crossref",
  "is-referenced-by-count": 167,
  "title": "Quantitative mass and energy dispersive elastic recoil spectrometry: Resolution and efficiency considerations",
  "prefix": "10.1016",
  "volume": "27",
  "author": [
    {
      "given": "Harry J.",
      "family": "Whitlow",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "G\u00f6ran",
      "family": "Possnert",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "C.Sture",
      "family": "Petersson",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "78",
  "reference": [
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB1",
      "doi-asserted-by": "crossref",
      "first-page": "125",
      "DOI": "10.1016/0167-5087(83)90967-5",
      "volume": "218",
      "author": "Thomas",
      "year": "1983",
      "journal-title": "Nucl. Instr. and Meth."
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB2",
      "series-title": "Proc. Int. Symp. on Three day In-depth Review on Nuclear Accelerator Impact in the interdisciplinary Field",
      "author": "Thomas",
      "year": "1984"
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB3",
      "doi-asserted-by": "crossref",
      "first-page": "443",
      "DOI": "10.1016/0168-583X(86)90341-1",
      "volume": "B15",
      "author": "Thomas",
      "year": "1986",
      "journal-title": "Nucl. Instr. and Meth."
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB4",
      "doi-asserted-by": "crossref",
      "first-page": "11",
      "DOI": "10.1016/0167-5087(83)90946-8",
      "volume": "218",
      "author": "Groleau",
      "year": "1983",
      "journal-title": "Nucl. Instr. and Meth."
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB5",
      "doi-asserted-by": "crossref",
      "first-page": "396",
      "DOI": "10.1016/0168-583X(84)90585-8",
      "volume": "B4",
      "author": "Petrascea",
      "year": "1984",
      "journal-title": "Nucl. Instr. and Meth."
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB6",
      "doi-asserted-by": "crossref",
      "first-page": "481",
      "DOI": "10.1016/0168-583X(86)90347-2",
      "volume": "B15",
      "author": "Gossett",
      "year": "1986",
      "journal-title": "Nucl. Instr. and Meth."
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB7",
      "doi-asserted-by": "crossref",
      "first-page": "1259",
      "DOI": "10.1063/1.327703",
      "volume": "51",
      "author": "Ross",
      "year": "1980",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB8",
      "doi-asserted-by": "crossref",
      "first-page": "730",
      "DOI": "10.1016/0022-3115(84)90446-X",
      "volume": "128/129",
      "author": "Ross",
      "year": "1984",
      "journal-title": "J. Nucl. Mater."
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB9",
      "doi-asserted-by": "crossref",
      "first-page": "430",
      "DOI": "10.1016/0168-583X(85)90669-X",
      "volume": "B6",
      "author": "Ingram",
      "year": "1985",
      "journal-title": "Nucl. Instr. and Meth."
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB10",
      "doi-asserted-by": "crossref",
      "first-page": "464",
      "DOI": "10.1016/0168-583X(86)90344-7",
      "volume": "B15",
      "author": "Klein",
      "year": "1986",
      "journal-title": "Nucl. Instr. and Meth."
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB11",
      "doi-asserted-by": "crossref",
      "first-page": "116",
      "DOI": "10.1016/0167-5087(83)90965-1",
      "volume": "218",
      "author": "N\u00f6lscher",
      "year": "1983",
      "journal-title": "Nucl. Instr. and Meth."
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB12",
      "doi-asserted-by": "crossref",
      "first-page": "161",
      "DOI": "10.1016/0022-3115(78)90515-9",
      "volume": "78",
      "author": "B\u00f8ttiger",
      "year": "1978",
      "journal-title": "J. Nucl. Mater."
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB13",
      "doi-asserted-by": "crossref",
      "first-page": "92",
      "DOI": "10.1016/0168-583X(84)90047-8",
      "volume": "B4",
      "author": "Turos",
      "year": "1984",
      "journal-title": "Nucl. Instr. and Meth."
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB14",
      "doi-asserted-by": "crossref",
      "first-page": "111",
      "DOI": "10.1016/0167-5087(83)90964-X",
      "volume": "218",
      "author": "Moreau",
      "year": "1983",
      "journal-title": "Nucl. Instr. and meth."
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB15",
      "doi-asserted-by": "crossref",
      "first-page": "437",
      "DOI": "10.1002/pssa.2210830203",
      "volume": "A83",
      "author": "Turos",
      "year": "1984",
      "journal-title": "Phys. Status Solidi"
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB16",
      "doi-asserted-by": "crossref",
      "first-page": "120",
      "DOI": "10.1016/0167-5087(83)90966-3",
      "volume": "218",
      "author": "Wielunski",
      "year": "1983",
      "journal-title": "Nucl. Instr. and Meth."
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB17",
      "doi-asserted-by": "crossref",
      "first-page": "409",
      "DOI": "10.1016/0167-5087(83)91013-X",
      "volume": "218",
      "author": "Madiba",
      "year": "1983",
      "journal-title": "Nucl. Instr. and Meth."
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB18",
      "doi-asserted-by": "crossref",
      "first-page": "469",
      "DOI": "10.1016/0168-583X(86)90345-9",
      "volume": "B15",
      "author": "Wielunski",
      "year": "1986",
      "journal-title": "Nucl. Instr. and Meth."
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB19",
      "doi-asserted-by": "crossref",
      "first-page": "492",
      "DOI": "10.1016/0168-583X(86)90349-6",
      "volume": "B15",
      "author": "Willemsen",
      "year": "1986",
      "journal-title": "Nucl. Instr. and Meth."
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB20",
      "doi-asserted-by": "crossref",
      "first-page": "486",
      "DOI": "10.1016/0168-583X(86)90348-4",
      "volume": "B15",
      "author": "P\u00e1szti",
      "year": "1986",
      "journal-title": "Nucl. Instr. and Meth."
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB21",
      "doi-asserted-by": "crossref",
      "first-page": "475",
      "DOI": "10.1016/0168-583X(86)90346-0",
      "volume": "B15",
      "author": "Sawicki",
      "year": "1986",
      "journal-title": "Nucl. Instr. and Meth."
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB22",
      "doi-asserted-by": "crossref",
      "first-page": "311",
      "DOI": "10.1016/0168-583X(85)90756-6",
      "volume": "B9",
      "author": "Conlon",
      "year": "1985",
      "journal-title": "Nucl. Instr. and Meth."
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB23",
      "doi-asserted-by": "crossref",
      "first-page": "317",
      "DOI": "10.1016/0168-583X(85)90757-8",
      "volume": "B9",
      "author": "Earwaker",
      "year": "1985",
      "journal-title": "Nucl. Instr. and Meth."
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB24",
      "doi-asserted-by": "crossref",
      "first-page": "811",
      "DOI": "10.1063/1.90654",
      "volume": "34",
      "author": "Doyle",
      "year": "1979",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB25",
      "doi-asserted-by": "crossref",
      "first-page": "957",
      "DOI": "10.1063/1.95456",
      "volume": "45",
      "author": "Mills",
      "year": "1984",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB26",
      "doi-asserted-by": "crossref",
      "first-page": "601",
      "DOI": "10.1016/0167-5087(83)91051-7",
      "volume": "218",
      "author": "Chang",
      "year": "1983",
      "journal-title": "Nucl. Instr. and Meth."
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB27",
      "doi-asserted-by": "crossref",
      "first-page": "598",
      "DOI": "10.1016/0167-5087(83)91050-5",
      "volume": "218",
      "author": "Yamaguchi",
      "year": "1983",
      "journal-title": "Nucl. Instr. and Meth."
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB28",
      "doi-asserted-by": "crossref",
      "first-page": "429",
      "DOI": "10.1016/0040-6090(84)90265-7",
      "volume": "119",
      "author": "Bardin",
      "year": "1984",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB29",
      "doi-asserted-by": "crossref",
      "first-page": "64",
      "DOI": "10.1016/S0168-583X(86)80013-1",
      "volume": "B18",
      "author": "Green",
      "year": "1986",
      "journal-title": "Nucl. Instr. and Meth."
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB30",
      "doi-asserted-by": "crossref",
      "first-page": "19",
      "DOI": "10.1063/1.1660806",
      "volume": "43",
      "author": "Cohen",
      "year": "1972",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB31",
      "doi-asserted-by": "crossref",
      "first-page": "652",
      "DOI": "10.1109/TNS.1977.4328759",
      "volume": "NS-24",
      "author": "Sundqvist",
      "year": "1977",
      "journal-title": "IEEE Trans. Nucl. Sci."
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB32",
      "unstructured": "K.H. Flodqvist, A spectrometer for low energy light heavy ions, Tandem Accelerator Laboratory Uppsala Report TLU 112/85."
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB33",
      "doi-asserted-by": "crossref",
      "first-page": "506",
      "DOI": "10.1016/0168-9002(86)91041-7",
      "volume": "A248",
      "author": "Weissenberger",
      "year": "1986",
      "journal-title": "Nucl. Instr. and Meth."
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB34",
      "series-title": "Backscattering Spectromery",
      "year": "1978"
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB35",
      "series-title": "The Stopping and Range of Ions in Solids",
      "volume": "vol. 1",
      "author": "Ziegler",
      "year": "1985"
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB36",
      "unstructured": "J. \u00c5str\u00f6m, G. Possnert, The Uppsala cesium sputter ion source, Tandem Accelerator Laboratory Uppsala Report TLU 102/83."
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB37",
      "doi-asserted-by": "crossref",
      "first-page": "183",
      "DOI": "10.1016/0167-5087(83)90977-8",
      "volume": "218",
      "author": "Amsel",
      "year": "1983",
      "journal-title": "Nucl. Instr. and Meth."
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB38",
      "doi-asserted-by": "crossref",
      "first-page": "145",
      "DOI": "10.1016/0168-9002(85)90398-5",
      "volume": "A240",
      "author": "Bohne",
      "year": "1985",
      "journal-title": "Nucl. Instr. and Meth."
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB39",
      "doi-asserted-by": "crossref",
      "first-page": "71",
      "DOI": "10.1016/0029-554X(80)90011-7",
      "volume": "171",
      "author": "Busch",
      "year": "1980",
      "journal-title": "Nucl. Instr. and Meth."
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB40",
      "doi-asserted-by": "crossref",
      "first-page": "543",
      "DOI": "10.1016/0168-9002(85)91064-2",
      "volume": "A237",
      "author": "Kavalov",
      "year": "1985",
      "journal-title": "Nucl. Instr. and Meth."
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB41",
      "doi-asserted-by": "crossref",
      "first-page": "439",
      "DOI": "10.1016/0029-554X(77)90637-1",
      "volume": "141",
      "author": "Zebelman",
      "year": "1977",
      "journal-title": "Nucl. Instr. and Meth."
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB42",
      "doi-asserted-by": "crossref",
      "first-page": "265",
      "DOI": "10.1016/0029-554X(81)90048-3",
      "volume": "179",
      "author": "Oed",
      "year": "1981",
      "journal-title": "Nucl. Instr. and Meth."
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB43",
      "doi-asserted-by": "crossref",
      "first-page": "565",
      "DOI": "10.1016/0167-5087(82)90675-5",
      "volume": "203",
      "author": "Lennard",
      "year": "1982",
      "journal-title": "Nucl. Instr. and Meth."
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB44",
      "unstructured": "S. Eskildsen, private communication (1985) Mac-RBSim version 11.2 RBS simulation program."
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB45",
      "doi-asserted-by": "crossref",
      "first-page": "393",
      "DOI": "10.1016/0040-6090(75)90057-7",
      "volume": "25",
      "author": "Chu",
      "year": "1975",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB46",
      "doi-asserted-by": "crossref",
      "first-page": "729",
      "DOI": "10.1016/0168-583X(86)90400-3",
      "volume": "B15",
      "author": "\u00d6stling",
      "year": "1986",
      "journal-title": "Nucl. Instr. and Meth."
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB47",
      "doi-asserted-by": "crossref",
      "first-page": "157",
      "DOI": "10.1016/0040-6090(73)90032-1",
      "volume": "19",
      "author": "Petersson",
      "year": "1973",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB48",
      "doi-asserted-by": "crossref",
      "first-page": "581",
      "DOI": "10.1080/14786441008635432",
      "volume": "30",
      "author": "Bohr",
      "year": "1915",
      "journal-title": "Philos. Mag."
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB49",
      "first-page": "83",
      "article-title": "Lecture Notes, Penetration of charged particles through matter",
      "author": "Bonderup",
      "year": "1981"
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB50",
      "series-title": "D. Phil. Thesis",
      "author": "Whitlow",
      "year": "1980"
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB51",
      "series-title": "Sputtering by particle bombardment II",
      "first-page": "11",
      "volume": "vol. 52",
      "author": "Betz",
      "year": "1983"
    },
    {
      "key": "10.1016/0168-583X(87)90527-1_BIB52",
      "doi-asserted-by": "crossref",
      "first-page": "2141",
      "DOI": "10.1103/PhysRevB.22.2141",
      "volume": "B22",
      "author": "Schou",
      "year": "1980",
      "journal-title": "Phys. Rev."
    }
  ],
  "container-title": "Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://api.elsevier.com/content/article/PII:0168583X87905271?httpAccept=text/xml",
      "content-type": "text/xml",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://api.elsevier.com/content/article/PII:0168583X87905271?httpAccept=text/plain",
      "content-type": "text/plain",
      "content-version": "vor",
      "intended-application": "text-mining"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2019,
        4,
        3
      ]
    ],
    "date-time": "2019-04-03T14:54:01Z",
    "timestamp": 1554303241000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://linkinghub.elsevier.com/retrieve/pii/0168583X87905271"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1987,
        7
      ]
    ]
  },
  "references-count": 52,
  "journal-issue": {
    "issue": "3",
    "published-print": {
      "date-parts": [
        [
          1987,
          7
        ]
      ]
    }
  },
  "alternative-id": [
    "0168583X87905271"
  ],
  "URL": "http://dx.doi.org/10.1016/0168-583X(87)90527-1",
  "relation": {},
  "ISSN": [
    "0168-583X"
  ],
  "subject": [],
  "container-title-short": "Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms",
  "published": {
    "date-parts": [
      [
        1987,
        7
      ]
    ]
  }
}