DOI: 10.1016/0168-583x(87)90005-x. Computer simulations of sputtering

10.1016/0168-583x(87)90005-x

Crossref journal-article

Elsevier BV

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms (78)

Bibliography

Biersack, J. P. (1987). Computer simulations of sputtering. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 27(1), 21â36.

Authors 1

J.P. Biersack (first)

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Dates

Type	When
Created	22 years, 9 months ago (Nov. 11, 2002, 5:07 p.m.)
Deposited	6 years, 4 months ago (April 3, 2019, 10:53 a.m.)
Indexed	1 week, 6 days ago (Aug. 7, 2025, 5:07 p.m.)
Issued	38 years, 2 months ago (June 1, 1987)
Published	38 years, 2 months ago (June 1, 1987)
Published Print	38 years, 2 months ago (June 1, 1987)

Funders 0

None

BibTeX

@article{Biersack_1987, title={Computer simulations of sputtering}, volume={27}, ISSN={0168-583X}, url={http://dx.doi.org/10.1016/0168-583x(87)90005-x}, DOI={10.1016/0168-583x(87)90005-x}, number={1}, journal={Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms}, publisher={Elsevier BV}, author={Biersack, J.P.}, year={1987}, month=jun, pages={21–36} }

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