DOI: 10.1016/0168-583x(84)90083-1. Laser sputtering. Part II. The mechanism of the sputtering of Al2O3

Laser sputtering. Part II. The mechanism of the sputtering of Al2O3

10.1016/0168-583x(84)90083-1

Crossref journal-article

Elsevier BV

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms (78)

Bibliography

Rothenberg, J. E., & Kelly, R. (1984). Laser sputtering. Part II. The mechanism of the sputtering of Al2O3. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1(2â3), 291â300.

Authors 2

Joshua E. Rothenberg (first)
Roger Kelly (additional)

References 29 Referenced 88

J.J. Cuomo, P.A. Leary, R. Kelly, B.E. Braren and J.E. Rothenberg, to be published.
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10.1109/JQE.1974.1068132 / IEEE J. Quantum Electron by Bloembergen (1974)
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{'key': '10.1016/0168-583X(84)90083-1_BIB10', 'first-page': '6531', 'volume': 'B18', 'author': 'Feibelman', 'year': '1979', 'journal-title': 'Phys. Rev.'} / Phys. Rev. by Feibelman (1979)
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10.1103/PhysRevLett.49.1955 / Phys. Rev. Lett. by van Driel (1982)
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10.1016/0036-9748(83)90082-0 / Scr. Met. by Kirkaldy (1983)
R. Kelly, J.E. Rothenberg, P.A. Leary and J.J. Cuomo, to be published.
10.1143/JPSJ.20.915 / J. Phys. Soc. Japan by Izui (1965)
{'key': '10.1016/0168-583X(84)90083-1_BIB28', 'first-page': '4', 'author': 'Zemansky', 'year': '1972'} by Zemansky (1972)
10.1116/1.571824 / J. Vac. Sci. Technol. by Kelly (1982)

Dates

Type	When
Created	22 years, 9 months ago (Nov. 11, 2002, 5:37 p.m.)
Deposited	6 years, 4 months ago (April 3, 2019, 10:53 a.m.)
Indexed	2 months ago (June 25, 2025, 5:24 p.m.)
Issued	41 years, 6 months ago (Feb. 1, 1984)
Published	41 years, 6 months ago (Feb. 1, 1984)
Published Print	41 years, 6 months ago (Feb. 1, 1984)

Funders 0

None

BibTeX

@article{Rothenberg_1984, title={Laser sputtering. Part II. The mechanism of the sputtering of Al2O3}, volume={1}, ISSN={0168-583X}, url={http://dx.doi.org/10.1016/0168-583x(84)90083-1}, DOI={10.1016/0168-583x(84)90083-1}, number={2–3}, journal={Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms}, publisher={Elsevier BV}, author={Rothenberg, Joshua E. and Kelly, Roger}, year={1984}, month=feb, pages={291–300} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        6,
        25
      ]
    ],
    "date-time": "2025-06-25T21:24:57Z",
    "timestamp": 1750886697676
  },
  "reference-count": 29,
  "publisher": "Elsevier BV",
  "issue": "2-3",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            1984,
            2,
            1
          ]
        ],
        "date-time": "1984-02-01T00:00:00Z",
        "timestamp": 444441600000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "https://www.elsevier.com/tdm/userlicense/1.0/"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        1984,
        2
      ]
    ]
  },
  "DOI": "10.1016/0168-583x(84)90083-1",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        11,
        11
      ]
    ],
    "date-time": "2002-11-11T22:37:41Z",
    "timestamp": 1037054261000
  },
  "page": "291-300",
  "source": "Crossref",
  "is-referenced-by-count": 88,
  "title": "Laser sputtering. Part II. The mechanism of the sputtering of Al2O3",
  "prefix": "10.1016",
  "volume": "1",
  "author": [
    {
      "given": "Joshua E.",
      "family": "Rothenberg",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "Roger",
      "family": "Kelly",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "78",
  "reference": [
    {
      "key": "10.1016/0168-583X(84)90083-1_BIB1",
      "unstructured": "J.J. Cuomo, P.A. Leary, R. Kelly, B.E. Braren and J.E. Rothenberg, to be published."
    },
    {
      "key": "10.1016/0168-583X(84)90083-1_BIB2",
      "first-page": "489",
      "volume": "17",
      "author": "Smith",
      "year": "1978",
      "journal-title": "Opt. Eng."
    },
    {
      "key": "10.1016/0168-583X(84)90083-1_BIB3",
      "doi-asserted-by": "crossref",
      "first-page": "375",
      "DOI": "10.1109/JQE.1974.1068132",
      "volume": "QE-10",
      "author": "Bloembergen",
      "year": "1974",
      "journal-title": "IEEE J. Quantum Electron"
    },
    {
      "key": "10.1016/0168-583X(84)90083-1_BIB4",
      "doi-asserted-by": "crossref",
      "first-page": "188",
      "DOI": "10.1109/JQE.1969.1075758",
      "volume": "QE-5",
      "author": "De Michelis",
      "year": "1969",
      "journal-title": "IEEE J. Quantum Electron"
    },
    {
      "key": "10.1016/0168-583X(84)90083-1_BIB5",
      "doi-asserted-by": "crossref",
      "first-page": "3217",
      "DOI": "10.1103/PhysRevB.19.3217",
      "volume": "B19",
      "author": "Lee",
      "year": "1979",
      "journal-title": "Phys. Rev."
    },
    {
      "key": "10.1016/0168-583X(84)90083-1_BIB6",
      "doi-asserted-by": "crossref",
      "first-page": "1172",
      "DOI": "10.1103/PhysRevB.19.1172",
      "volume": "B19",
      "author": "Draeger",
      "year": "1979",
      "journal-title": "Phys. Rev."
    },
    {
      "key": "10.1016/0168-583X(84)90083-1_BIB7",
      "doi-asserted-by": "crossref",
      "first-page": "471",
      "DOI": "10.1016/0375-9601(82)90387-5",
      "volume": "92A",
      "author": "Itoh",
      "year": "1982",
      "journal-title": "Phys. Lett."
    },
    {
      "key": "10.1016/0168-583X(84)90083-1_BIB8",
      "doi-asserted-by": "crossref",
      "first-page": "280",
      "DOI": "10.1016/0039-6028(79)90345-5",
      "volume": "90",
      "author": "Kelly",
      "year": "1979",
      "journal-title": "Surface Sci."
    },
    {
      "key": "10.1016/0168-583X(84)90083-1_BIB9",
      "unstructured": "J.E. Rothenberg and R. Kelly, unpublished."
    },
    {
      "key": "10.1016/0168-583X(84)90083-1_BIB10",
      "first-page": "6531",
      "volume": "B18",
      "author": "Feibelman",
      "year": "1979",
      "journal-title": "Phys. Rev."
    },
    {
      "key": "10.1016/0168-583X(84)90083-1_BIB11",
      "doi-asserted-by": "crossref",
      "first-page": "205",
      "DOI": "10.1080/00337577808233191",
      "volume": "37",
      "author": "Overeijnder",
      "year": "1978",
      "journal-title": "Rad. Eff."
    },
    {
      "key": "10.1016/0168-583X(84)90083-1_BIB12",
      "doi-asserted-by": "crossref",
      "first-page": "21",
      "DOI": "10.1080/00337577808233204",
      "volume": "38",
      "author": "Overeijnder",
      "year": "1978",
      "journal-title": "Rad. Eff."
    },
    {
      "key": "10.1016/0168-583X(84)90083-1_BIB13",
      "first-page": "401",
      "volume": "5",
      "author": "Kanzaki",
      "year": "1983",
      "journal-title": "Semicond. Insulators"
    },
    {
      "key": "10.1016/0168-583X(84)90083-1_BIB14",
      "doi-asserted-by": "crossref",
      "first-page": "3645",
      "DOI": "10.1063/1.1703059",
      "volume": "36",
      "author": "Fleischer",
      "year": "1965",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/0168-583X(84)90083-1_BIB15",
      "doi-asserted-by": "crossref",
      "first-page": "2753",
      "DOI": "10.1063/1.1713836",
      "volume": "35",
      "author": "Knorr",
      "year": "1964",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/0168-583X(84)90083-1_BIB16",
      "doi-asserted-by": "crossref",
      "first-page": "1091",
      "DOI": "10.1016/0022-3115(79)90405-7",
      "volume": "85/86",
      "author": "Braun",
      "year": "1979",
      "journal-title": "J. Nucl. Mat."
    },
    {
      "key": "10.1016/0168-583X(84)90083-1_BIB17",
      "doi-asserted-by": "crossref",
      "first-page": "35",
      "DOI": "10.1080/00337578208211472",
      "volume": "66",
      "author": "Besocke",
      "year": "1982",
      "journal-title": "Rad. Eff."
    },
    {
      "key": "10.1016/0168-583X(84)90083-1_BIB18",
      "doi-asserted-by": "crossref",
      "first-page": "83",
      "DOI": "10.1007/BF00614908",
      "volume": "A30",
      "author": "Hofer",
      "year": "1983",
      "journal-title": "Appl. Phys."
    },
    {
      "key": "10.1016/0168-583X(84)90083-1_BIB19",
      "doi-asserted-by": "crossref",
      "first-page": "8",
      "DOI": "10.1063/1.1723562",
      "volume": "3",
      "author": "Honig",
      "year": "1963",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/0168-583X(84)90083-1_BIB20",
      "doi-asserted-by": "crossref",
      "first-page": "101",
      "DOI": "10.1016/0039-6028(83)90486-7",
      "volume": "133",
      "author": "Nakayama",
      "year": "1983",
      "journal-title": "Surface Sci."
    },
    {
      "key": "10.1016/0168-583X(84)90083-1_BIB21",
      "doi-asserted-by": "crossref",
      "first-page": "385",
      "DOI": "10.1063/1.92347",
      "volume": "38",
      "author": "Hanabusa",
      "year": "1981",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/0168-583X(84)90083-1_BIB22",
      "doi-asserted-by": "crossref",
      "first-page": "99",
      "DOI": "10.1063/1.92531",
      "volume": "39",
      "author": "Sheng",
      "year": "1981",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/0168-583X(84)90083-1_BIB23",
      "doi-asserted-by": "crossref",
      "first-page": "1955",
      "DOI": "10.1103/PhysRevLett.49.1955",
      "volume": "26",
      "author": "van Driel",
      "year": "1982",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "10.1016/0168-583X(84)90083-1_BIB24",
      "doi-asserted-by": "crossref",
      "first-page": "1285",
      "DOI": "10.1016/0038-1098(81)90228-3",
      "volume": "39",
      "author": "van Vechten",
      "year": "1981",
      "journal-title": "Sol. State Commun."
    },
    {
      "key": "10.1016/0168-583X(84)90083-1_BIB25",
      "doi-asserted-by": "crossref",
      "first-page": "115",
      "DOI": "10.1016/0036-9748(83)90082-0",
      "volume": "17",
      "author": "Kirkaldy",
      "year": "1983",
      "journal-title": "Scr. Met."
    },
    {
      "key": "10.1016/0168-583X(84)90083-1_BIB26",
      "unstructured": "R. Kelly, J.E. Rothenberg, P.A. Leary and J.J. Cuomo, to be published."
    },
    {
      "key": "10.1016/0168-583X(84)90083-1_BIB27",
      "doi-asserted-by": "crossref",
      "first-page": "915",
      "DOI": "10.1143/JPSJ.20.915",
      "volume": "20",
      "author": "Izui",
      "year": "1965",
      "journal-title": "J. Phys. Soc. Japan"
    },
    {
      "key": "10.1016/0168-583X(84)90083-1_BIB28",
      "first-page": "4",
      "author": "Zemansky",
      "year": "1972"
    },
    {
      "key": "10.1016/0168-583X(84)90083-1_BIB29",
      "doi-asserted-by": "crossref",
      "first-page": "774",
      "DOI": "10.1116/1.571824",
      "volume": "21",
      "author": "Kelly",
      "year": "1982",
      "journal-title": "J. Vac. Sci. Technol."
    }
  ],
  "container-title": "Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://api.elsevier.com/content/article/PII:0168583X84900831?httpAccept=text/xml",
      "content-type": "text/xml",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://api.elsevier.com/content/article/PII:0168583X84900831?httpAccept=text/plain",
      "content-type": "text/plain",
      "content-version": "vor",
      "intended-application": "text-mining"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2019,
        4,
        3
      ]
    ],
    "date-time": "2019-04-03T14:53:07Z",
    "timestamp": 1554303187000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://linkinghub.elsevier.com/retrieve/pii/0168583X84900831"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1984,
        2
      ]
    ]
  },
  "references-count": 29,
  "journal-issue": {
    "issue": "2-3",
    "published-print": {
      "date-parts": [
        [
          1984,
          2
        ]
      ]
    }
  },
  "alternative-id": [
    "0168583X84900831"
  ],
  "URL": "http://dx.doi.org/10.1016/0168-583X(84)90083-1",
  "relation": {},
  "ISSN": [
    "0168-583X"
  ],
  "subject": [],
  "container-title-short": "Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms",
  "published": {
    "date-parts": [
      [
        1984,
        2
      ]
    ]
  }
}