DOI: 10.1016/0167-9317(93)90051-6. Recent advances in application of focused ion beam technology

Recent advances in application of focused ion beam technology

10.1016/0167-9317(93)90051-6

Crossref journal-article

Elsevier BV

Microelectronic Engineering (78)

Bibliography

Lindquist, J. M., Young, R. J., & Jaehnig, M. C. (1993). Recent advances in application of focused ion beam technology. Microelectronic Engineering, 21(1â4), 179â185.

Authors 3

J.M. Lindquist (first)
R.J. Young (additional)
M.C. Jaehnig (additional)

References 5 Referenced 13

{'key': '10.1016/0167-9317(93)90051-6_BIB1', 'first-page': '183', 'volume': '39', 'author': 'MacKenzie', 'year': '1990', 'journal-title': 'Phys. A.'} / Phys. A. by MacKenzie (1990)
10.1016/0167-9317(90)90140-O / Microelectronic Engineering by Young (1990)
10.1116/1.584712 / J. Vac. Sci. Tech. B by Harriott (1989)
10.1016/0167-9317(89)90086-5 / Microelectronic Engineering by Levi-Setti (1989)
{'key': '10.1016/0167-9317(93)90051-6_BIB5', 'series-title': 'Proc. 17th Int. Symp. for Test and Failure Analysis', 'author': 'Crow', 'year': '1991'} / Proc. 17th Int. Symp. for Test and Failure Analysis by Crow (1991)

Dates

Type	When
Created	22 years, 10 months ago (Oct. 16, 2002, 4:59 p.m.)
Deposited	6 years, 4 months ago (April 7, 2019, 3:53 a.m.)
Indexed	4 months ago (April 17, 2025, 1:04 p.m.)
Issued	32 years, 4 months ago (April 1, 1993)
Published	32 years, 4 months ago (April 1, 1993)
Published Print	32 years, 4 months ago (April 1, 1993)

Funders 0

None

BibTeX

@article{Lindquist_1993, title={Recent advances in application of focused ion beam technology}, volume={21}, ISSN={0167-9317}, url={http://dx.doi.org/10.1016/0167-9317(93)90051-6}, DOI={10.1016/0167-9317(93)90051-6}, number={1–4}, journal={Microelectronic Engineering}, publisher={Elsevier BV}, author={Lindquist, J.M. and Young, R.J. and Jaehnig, M.C.}, year={1993}, month=apr, pages={179–185} }

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