DOI: 10.1016/0167-9317(90)90144-i. High-resolution focused ion beam lithography

High-resolution focused ion beam lithography

10.1016/0167-9317(90)90144-i

Crossref journal-article

Elsevier BV

Microelectronic Engineering (78)

Bibliography

Matsui, S., Kojima, Y., Ochiai, Y., Honda, T., & Suzuki, K. (1990). High-resolution focused ion beam lithography. Microelectronic Engineering, 11(1â4), 427â430.

Authors 5

Shinji Matsui (first)
Yoshikatsu Kojima (additional)
Yukinori Ochiai (additional)
Toshiyuki Honda (additional)
Katsumi Suzuki (additional)

References 12 Referenced 9

10.1116/1.570253 / J. Vac. Sci. Technol. by Seliger (1979)
10.1116/1.583524 / J. Vac. Sci. Technol. by Matsui (1986)
10.1116/1.583679 / J. Vac. Sci. Technol. by Matsui (1987)
10.1143/JJAP.27.L1780 / Jpn. J. appl. Phys. by Kojima (1988)
10.1063/1.100098 / Appl. Phys. Lett. by Matsui (1988)
10.1143/JJAP.23.L232 / Jpn. J. Appl. Phys. by Shiokawa (1984)
10.1117/12.945639 / Proc. SPIE by Ochiai (1988)
10.1116/1.571210 / J. Vac. Sci. Technol. by Ryssel (1981)
10.1116/1.571256 / J. Vac. Sci. Technol. by Karapiperis (1981)
10.1116/1.584297 / J. Vac. Sci. Technol. by Ochiai (1988)
10.1116/1.583957 / J. Vac. Sci. Technol. by Liu (1988)
10.1117/12.940349 / Proc. SPIE by Suzuki (1987)

Dates

Type	When
Created	22 years, 10 months ago (Oct. 16, 2002, 9:41 p.m.)
Deposited	6 years, 4 months ago (April 7, 2019, 7:21 a.m.)
Indexed	1 week, 1 day ago (Aug. 23, 2025, 12:59 a.m.)
Issued	35 years, 4 months ago (April 1, 1990)
Published	35 years, 4 months ago (April 1, 1990)
Published Print	35 years, 4 months ago (April 1, 1990)

Funders 0

None

BibTeX

@article{Matsui_1990, title={High-resolution focused ion beam lithography}, volume={11}, ISSN={0167-9317}, url={http://dx.doi.org/10.1016/0167-9317(90)90144-i}, DOI={10.1016/0167-9317(90)90144-i}, number={1–4}, journal={Microelectronic Engineering}, publisher={Elsevier BV}, author={Matsui, Shinji and Kojima, Yoshikatsu and Ochiai, Yukinori and Honda, Toshiyuki and Suzuki, Katsumi}, year={1990}, month=apr, pages={427–430} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        8,
        23
      ]
    ],
    "date-time": "2025-08-23T04:59:24Z",
    "timestamp": 1755925164841
  },
  "reference-count": 12,
  "publisher": "Elsevier BV",
  "issue": "1-4",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            1990,
            4,
            1
          ]
        ],
        "date-time": "1990-04-01T00:00:00Z",
        "timestamp": 638928000000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "https://www.elsevier.com/tdm/userlicense/1.0/"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        1990,
        4
      ]
    ]
  },
  "DOI": "10.1016/0167-9317(90)90144-i",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        10,
        17
      ]
    ],
    "date-time": "2002-10-17T01:41:58Z",
    "timestamp": 1034818918000
  },
  "page": "427-430",
  "source": "Crossref",
  "is-referenced-by-count": 9,
  "title": "High-resolution focused ion beam lithography",
  "prefix": "10.1016",
  "volume": "11",
  "author": [
    {
      "given": "Shinji",
      "family": "Matsui",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "Yoshikatsu",
      "family": "Kojima",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Yukinori",
      "family": "Ochiai",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Toshiyuki",
      "family": "Honda",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Katsumi",
      "family": "Suzuki",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "78",
  "reference": [
    {
      "key": "10.1016/0167-9317(90)90144-I_BIB1",
      "doi-asserted-by": "crossref",
      "first-page": "1610",
      "DOI": "10.1116/1.570253",
      "volume": "16",
      "author": "Seliger",
      "year": "1979",
      "journal-title": "J. Vac. Sci. Technol."
    },
    {
      "key": "10.1016/0167-9317(90)90144-I_BIB2",
      "doi-asserted-by": "crossref",
      "first-page": "845",
      "DOI": "10.1116/1.583524",
      "volume": "B4",
      "author": "Matsui",
      "year": "1986",
      "journal-title": "J. Vac. Sci. Technol."
    },
    {
      "key": "10.1016/0167-9317(90)90144-I_BIB3",
      "doi-asserted-by": "crossref",
      "first-page": "853",
      "DOI": "10.1116/1.583679",
      "volume": "B5",
      "author": "Matsui",
      "year": "1987",
      "journal-title": "J. Vac. Sci. Technol."
    },
    {
      "key": "10.1016/0167-9317(90)90144-I_BIB4",
      "doi-asserted-by": "crossref",
      "first-page": "1780",
      "DOI": "10.1143/JJAP.27.L1780",
      "volume": "27",
      "author": "Kojima",
      "year": "1988",
      "journal-title": "Jpn. J. appl. Phys."
    },
    {
      "key": "10.1016/0167-9317(90)90144-I_BIB5",
      "doi-asserted-by": "crossref",
      "first-page": "868",
      "DOI": "10.1063/1.100098",
      "volume": "53",
      "author": "Matsui",
      "year": "1988",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/0167-9317(90)90144-I_BIB6",
      "doi-asserted-by": "crossref",
      "first-page": "L232",
      "DOI": "10.1143/JJAP.23.L232",
      "volume": "23",
      "author": "Shiokawa",
      "year": "1984",
      "journal-title": "Jpn. J. Appl. Phys."
    },
    {
      "key": "10.1016/0167-9317(90)90144-I_BIB7",
      "doi-asserted-by": "crossref",
      "first-page": "106",
      "DOI": "10.1117/12.945639",
      "volume": "923",
      "author": "Ochiai",
      "year": "1988",
      "journal-title": "Proc. SPIE"
    },
    {
      "key": "10.1016/0167-9317(90)90144-I_BIB8",
      "doi-asserted-by": "crossref",
      "first-page": "1358",
      "DOI": "10.1116/1.571210",
      "volume": "19",
      "author": "Ryssel",
      "year": "1981",
      "journal-title": "J. Vac. Sci. Technol."
    },
    {
      "key": "10.1016/0167-9317(90)90144-I_BIB9",
      "doi-asserted-by": "crossref",
      "first-page": "1259",
      "DOI": "10.1116/1.571256",
      "volume": "19",
      "author": "Karapiperis",
      "year": "1981",
      "journal-title": "J. Vac. Sci. Technol."
    },
    {
      "key": "10.1016/0167-9317(90)90144-I_BIB10",
      "doi-asserted-by": "crossref",
      "first-page": "1055",
      "DOI": "10.1116/1.584297",
      "volume": "B6",
      "author": "Ochiai",
      "year": "1988",
      "journal-title": "J. Vac. Sci. Technol."
    },
    {
      "key": "10.1016/0167-9317(90)90144-I_BIB11",
      "doi-asserted-by": "crossref",
      "first-page": "379",
      "DOI": "10.1116/1.583957",
      "volume": "B6",
      "author": "Liu",
      "year": "1988",
      "journal-title": "J. Vac. Sci. Technol."
    },
    {
      "key": "10.1016/0167-9317(90)90144-I_BIB12",
      "doi-asserted-by": "crossref",
      "first-page": "23",
      "DOI": "10.1117/12.940349",
      "volume": "773",
      "author": "Suzuki",
      "year": "1987",
      "journal-title": "Proc. SPIE"
    }
  ],
  "container-title": "Microelectronic Engineering",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://api.elsevier.com/content/article/PII:016793179090144I?httpAccept=text/xml",
      "content-type": "text/xml",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://api.elsevier.com/content/article/PII:016793179090144I?httpAccept=text/plain",
      "content-type": "text/plain",
      "content-version": "vor",
      "intended-application": "text-mining"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2019,
        4,
        7
      ]
    ],
    "date-time": "2019-04-07T11:21:57Z",
    "timestamp": 1554636117000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://linkinghub.elsevier.com/retrieve/pii/016793179090144I"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1990,
        4
      ]
    ]
  },
  "references-count": 12,
  "journal-issue": {
    "issue": "1-4",
    "published-print": {
      "date-parts": [
        [
          1990,
          4
        ]
      ]
    }
  },
  "alternative-id": [
    "016793179090144I"
  ],
  "URL": "http://dx.doi.org/10.1016/0167-9317(90)90144-I",
  "relation": {},
  "ISSN": [
    "0167-9317"
  ],
  "subject": [],
  "container-title-short": "Microelectronic Engineering",
  "published": {
    "date-parts": [
      [
        1990,
        4
      ]
    ]
  }
}