DOI: 10.1016/0167-9317(90)90140-o. Gas-assisted focused ion beam etching for microfabrication and inspection

Gas-assisted focused ion beam etching for microfabrication and inspection

10.1016/0167-9317(90)90140-o

Crossref journal-article

Elsevier BV

Microelectronic Engineering (78)

Bibliography

Young, R. J., Cleaver, J. R. A., & Ahmed, H. (1990). Gas-assisted focused ion beam etching for microfabrication and inspection. Microelectronic Engineering, 11(1â4), 409â412.

Authors 3

R.J. Young (first)
J.R.A. Cleaver (additional)
H. Ahmed (additional)

References 10 Referenced 21

10.1116/1.583294 / J. Vac. Sci. Technol. by Yamaguchi (1985)
10.1116/1.583293 / J. Vac. Sci. Technol. by Ochiai (1985)
10.1116/1.583297 / J. Vac. Sci. Technol. by Heard (1985)
{'key': '10.1016/0167-9317(90)90140-O_BIB4', 'article-title': 'Microscopy of Semiconductor Materials', 'author': 'Kirk', 'year': '1989', 'journal-title': 'Inst. Phys. Conf. Ser.'} / Inst. Phys. Conf. Ser. / Microscopy of Semiconductor Materials by Kirk (1989)
10.1063/1.97677 / Appl. Phys. Lett. by Takado (1987)
R.C. Weast (ed.), Chemistry and Physics Tables, CRC Press, 56th Edition.
10.1007/BF01729909 / J. Mat. Sci. Lett. by Franklin (1988)
10.1088/0022-3719/21/14/009 / J. Phys. C: Solid State Phys. by Fletcher (1988)
J.F. Gibbons, W.S. Johnson and S.W. Mylroie, Projected Range Statistics (Semiconductors and Related Materials, 2nd Edition).
10.1063/1.98970 / Appl. Phys. Lett. by Scherer (1987)

Dates

Type	When
Created	22 years, 10 months ago (Oct. 16, 2002, 9:41 p.m.)
Deposited	6 years, 4 months ago (April 7, 2019, 7:21 a.m.)
Indexed	1 year, 7 months ago (Feb. 3, 2024, 1:19 a.m.)
Issued	35 years, 5 months ago (April 1, 1990)
Published	35 years, 5 months ago (April 1, 1990)
Published Print	35 years, 5 months ago (April 1, 1990)

Funders 0

None

BibTeX

@article{Young_1990, title={Gas-assisted focused ion beam etching for microfabrication and inspection}, volume={11}, ISSN={0167-9317}, url={http://dx.doi.org/10.1016/0167-9317(90)90140-o}, DOI={10.1016/0167-9317(90)90140-o}, number={1–4}, journal={Microelectronic Engineering}, publisher={Elsevier BV}, author={Young, R.J. and Cleaver, J.R.A. and Ahmed, H.}, year={1990}, month=apr, pages={409–412} }

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