DOI: 10.1016/0167-9317(87)90058-x. Nanometer structure fabricated by FIB and its observation by STM

Nanometer structure fabricated by FIB and its observation by STM

10.1016/0167-9317(87)90058-x

Crossref journal-article

Elsevier BV

Microelectronic Engineering (78)

Bibliography

Komuro, M., Okayama, S., Kitamura, O., Mizutani, W., Tokumoto, H., & Kajimura, K. (1987). Nanometer structure fabricated by FIB and its observation by STM. Microelectronic Engineering, 6(1â4), 343â348.

Authors 6

M. Komuro (first)
S. Okayama (additional)
O. Kitamura (additional)
W. Mizutani (additional)
H. Tokumoto (additional)
K. Kajimura (additional)

References 7 Referenced 1

10.1116/1.583435 / J. Vac. Sci. Technol. by Miyauchi (1986)
10.1116/1.583867 / J. Vac. Sci. Technol. by Morimoto (1987)
10.1116/1.583373 / J. Vac. Sci. Technol. by Melngailis (1986)
10.1116/1.582719 / J. Vac. Sci. Technol. by Komuro (1983)
10.1103/PhysRevLett.49.57 / Phys. Rev. Lett. by Binnig (1982)
Okano, M., Kajimura, K., Wakiyama, S., Sakai, F., Mizutani, W., and Ono M., J. Vac. Sci. Technol., (to be published)
10.1149/1.2119608 / J. Electrochem. Soc. by Adachi (1983)

Dates

Type	When
Created	22 years, 10 months ago (Oct. 16, 2002, 9:41 p.m.)
Deposited	6 years, 4 months ago (April 7, 2019, 6:57 a.m.)
Indexed	2 years, 3 months ago (May 15, 2023, 11:16 a.m.)
Issued	37 years, 9 months ago (Dec. 1, 1987)
Published	37 years, 9 months ago (Dec. 1, 1987)
Published Print	37 years, 9 months ago (Dec. 1, 1987)

Funders 0

None

BibTeX

@article{Komuro_1987, title={Nanometer structure fabricated by FIB and its observation by STM}, volume={6}, ISSN={0167-9317}, url={http://dx.doi.org/10.1016/0167-9317(87)90058-x}, DOI={10.1016/0167-9317(87)90058-x}, number={1–4}, journal={Microelectronic Engineering}, publisher={Elsevier BV}, author={Komuro, M. and Okayama, S. and Kitamura, O. and Mizutani, W. and Tokumoto, H. and Kajimura, K.}, year={1987}, month=dec, pages={343–348} }

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