DOI: 10.1016/0167-577x(84)90112-5. Solid-phase epitaxial growth of polycrystalline silicon films amorphized by ion implantation

Solid-phase epitaxial growth of polycrystalline silicon films amorphized by ion implantation

10.1016/0167-577x(84)90112-5

Crossref journal-article

Elsevier BV

Materials Letters (78)

Bibliography

Quach, N. T., & Reif, R. (1984). Solid-phase epitaxial growth of polycrystalline silicon films amorphized by ion implantation. Materials Letters, 2(5), 362â366.

Authors 2

N.T. Quach (first)
R. Reif (additional)

References 17 Referenced 7

10.1149/1.2129895 / J. Electrochem. Soc. by Srinivasan (1980)
{'key': '10.1016/0167-577X(84)90112-5_BIB2', 'first-page': '592', 'volume': '41', 'author': 'Thebault', 'year': '1980', 'journal-title': 'RCA Rev.'} / RCA Rev. by Thebault (1980)
{'key': '10.1016/0167-577X(84)90112-5_BIB3', 'first-page': '15', 'volume': 'Vol. 24', 'author': 'Gossard', 'year': '1982'} by Gossard (1982)
10.1063/1.94754 / Appl. Phys. Letters by Donahue (1984)
{'key': '10.1016/0167-577X(84)90112-5_BIB5', 'first-page': '689', 'volume': '31', 'author': 'Roth', 'year': '1977', 'journal-title': 'J. Appl. Phys.'} / J. Appl. Phys. by Roth (1977)
{'key': '10.1016/0167-577X(84)90112-5_BIB6', 'series-title': 'VLSI technology', 'first-page': '76', 'author': 'Pearce', 'year': '1983'} / VLSI technology by Pearce (1983)
10.1116/1.569824 / J. Vacuum Sci. Technol. by Lau (1978)
10.1063/1.325397 / J. Appl. Phys. by Csepregi (1978)
{'key': '10.1016/0167-577X(84)90112-5_BIB9', 'first-page': '99', 'volume': 'Vol. 78–82', 'author': 'Sigmon', 'year': '1978'} by Sigmon (1978)
10.1149/1.2129733 / J. Electrochem. Soc. by Kamins (1980)
{'key': '10.1016/0167-577X(84)90112-5_BIB11', 'first-page': '187', 'volume': '31', 'author': 'Kern', 'year': '1970', 'journal-title': 'RCA Rev.'} / RCA Rev. by Kern (1970)
10.1063/1.322243 / J. Appl. Phys. by Brice (1975)
{'key': '10.1016/0167-577X(84)90112-5_BIB13', 'series-title': 'Ion implantation in semiconductors', 'first-page': '25', 'author': 'Morehead', 'year': '1971'} / Ion implantation in semiconductors by Morehead (1971)
{'key': '10.1016/0167-577X(84)90112-5_BIB14', 'series-title': 'Proceedings of the Symposium on Laser and Electron Beam Processing of Materials', 'author': 'Hess', 'year': '1980'} / Proceedings of the Symposium on Laser and Electron Beam Processing of Materials by Hess (1980)
10.1063/1.325856 / J. Appl. Phys. by Zellama (1979)
10.1063/1.329763 / J. Appl. Phys. by Grimaldi (1981)
{'key': '10.1016/0167-577X(84)90112-5_BIB17', 'series-title': 'VLSI technology', 'first-page': '233', 'author': 'Seidel', 'year': '1983'} / VLSI technology by Seidel (1983)

Dates

Type	When
Created	22 years, 2 months ago (June 21, 2003, 12:22 a.m.)
Deposited	6 years, 5 months ago (March 19, 2019, 2:51 p.m.)
Indexed	1 year, 2 months ago (July 5, 2024, 12:40 a.m.)
Issued	41 years, 3 months ago (June 1, 1984)
Published	41 years, 3 months ago (June 1, 1984)
Published Print	41 years, 3 months ago (June 1, 1984)

Funders 0

None

BibTeX

@article{Quach_1984, title={Solid-phase epitaxial growth of polycrystalline silicon films amorphized by ion implantation}, volume={2}, ISSN={0167-577X}, url={http://dx.doi.org/10.1016/0167-577x(84)90112-5}, DOI={10.1016/0167-577x(84)90112-5}, number={5}, journal={Materials Letters}, publisher={Elsevier BV}, author={Quach, N.T. and Reif, R.}, year={1984}, month=jun, pages={362–366} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2024,
        7,
        5
      ]
    ],
    "date-time": "2024-07-05T04:40:38Z",
    "timestamp": 1720154438980
  },
  "reference-count": 17,
  "publisher": "Elsevier BV",
  "issue": "5",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            1984,
            6,
            1
          ]
        ],
        "date-time": "1984-06-01T00:00:00Z",
        "timestamp": 454896000000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "https://www.elsevier.com/tdm/userlicense/1.0/"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        1984,
        6
      ]
    ]
  },
  "DOI": "10.1016/0167-577x(84)90112-5",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2003,
        6,
        21
      ]
    ],
    "date-time": "2003-06-21T04:22:55Z",
    "timestamp": 1056169375000
  },
  "page": "362-366",
  "source": "Crossref",
  "is-referenced-by-count": 7,
  "special_numbering": "PA",
  "title": "Solid-phase epitaxial growth of polycrystalline silicon films amorphized by ion implantation",
  "prefix": "10.1016",
  "volume": "2",
  "author": [
    {
      "given": "N.T.",
      "family": "Quach",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "R.",
      "family": "Reif",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "78",
  "reference": [
    {
      "key": "10.1016/0167-577X(84)90112-5_BIB1",
      "doi-asserted-by": "crossref",
      "first-page": "1334",
      "DOI": "10.1149/1.2129895",
      "volume": "127",
      "author": "Srinivasan",
      "year": "1980",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "10.1016/0167-577X(84)90112-5_BIB2",
      "first-page": "592",
      "volume": "41",
      "author": "Thebault",
      "year": "1980",
      "journal-title": "RCA Rev."
    },
    {
      "key": "10.1016/0167-577X(84)90112-5_BIB3",
      "first-page": "15",
      "volume": "Vol. 24",
      "author": "Gossard",
      "year": "1982"
    },
    {
      "key": "10.1016/0167-577X(84)90112-5_BIB4",
      "doi-asserted-by": "crossref",
      "first-page": "346",
      "DOI": "10.1063/1.94754",
      "volume": "44",
      "author": "Donahue",
      "year": "1984",
      "journal-title": "Appl. Phys. Letters"
    },
    {
      "key": "10.1016/0167-577X(84)90112-5_BIB5",
      "first-page": "689",
      "volume": "31",
      "author": "Roth",
      "year": "1977",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/0167-577X(84)90112-5_BIB6",
      "series-title": "VLSI technology",
      "first-page": "76",
      "author": "Pearce",
      "year": "1983"
    },
    {
      "key": "10.1016/0167-577X(84)90112-5_BIB7",
      "doi-asserted-by": "crossref",
      "first-page": "1656",
      "DOI": "10.1116/1.569824",
      "volume": "15",
      "author": "Lau",
      "year": "1978",
      "journal-title": "J. Vacuum Sci. Technol."
    },
    {
      "key": "10.1016/0167-577X(84)90112-5_BIB8",
      "doi-asserted-by": "crossref",
      "first-page": "3906",
      "DOI": "10.1063/1.325397",
      "volume": "49",
      "author": "Csepregi",
      "year": "1978",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/0167-577X(84)90112-5_BIB9",
      "first-page": "99",
      "volume": "Vol. 78\u201382",
      "author": "Sigmon",
      "year": "1978"
    },
    {
      "key": "10.1016/0167-577X(84)90112-5_BIB10",
      "doi-asserted-by": "crossref",
      "first-page": "686",
      "DOI": "10.1149/1.2129733",
      "volume": "127",
      "author": "Kamins",
      "year": "1980",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "10.1016/0167-577X(84)90112-5_BIB11",
      "first-page": "187",
      "volume": "31",
      "author": "Kern",
      "year": "1970",
      "journal-title": "RCA Rev."
    },
    {
      "key": "10.1016/0167-577X(84)90112-5_BIB12",
      "doi-asserted-by": "crossref",
      "first-page": "3385",
      "DOI": "10.1063/1.322243",
      "volume": "46",
      "author": "Brice",
      "year": "1975",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/0167-577X(84)90112-5_BIB13",
      "series-title": "Ion implantation in semiconductors",
      "first-page": "25",
      "author": "Morehead",
      "year": "1971"
    },
    {
      "key": "10.1016/0167-577X(84)90112-5_BIB14",
      "series-title": "Proceedings of the Symposium on Laser and Electron Beam Processing of Materials",
      "author": "Hess",
      "year": "1980"
    },
    {
      "key": "10.1016/0167-577X(84)90112-5_BIB15",
      "doi-asserted-by": "crossref",
      "first-page": "6995",
      "DOI": "10.1063/1.325856",
      "volume": "50",
      "author": "Zellama",
      "year": "1979",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/0167-577X(84)90112-5_BIB16",
      "doi-asserted-by": "crossref",
      "first-page": "1351",
      "DOI": "10.1063/1.329763",
      "volume": "52",
      "author": "Grimaldi",
      "year": "1981",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/0167-577X(84)90112-5_BIB17",
      "series-title": "VLSI technology",
      "first-page": "233",
      "author": "Seidel",
      "year": "1983"
    }
  ],
  "container-title": "Materials Letters",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://api.elsevier.com/content/article/PII:0167577X84901125?httpAccept=text/xml",
      "content-type": "text/xml",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://api.elsevier.com/content/article/PII:0167577X84901125?httpAccept=text/plain",
      "content-type": "text/plain",
      "content-version": "vor",
      "intended-application": "text-mining"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2019,
        3,
        19
      ]
    ],
    "date-time": "2019-03-19T18:51:09Z",
    "timestamp": 1553021469000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://linkinghub.elsevier.com/retrieve/pii/0167577X84901125"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1984,
        6
      ]
    ]
  },
  "references-count": 17,
  "journal-issue": {
    "issue": "5",
    "published-print": {
      "date-parts": [
        [
          1984,
          6
        ]
      ]
    }
  },
  "alternative-id": [
    "0167577X84901125"
  ],
  "URL": "http://dx.doi.org/10.1016/0167-577X(84)90112-5",
  "relation": {},
  "ISSN": [
    "0167-577X"
  ],
  "subject": [],
  "container-title-short": "Materials Letters",
  "published": {
    "date-parts": [
      [
        1984,
        6
      ]
    ]
  }
}