Modeling and control of microelectronics materials processing
10.1016/0098-1354(94)e0038-o
Crossref journal-article
Elsevier BV
Computers & Chemical Engineering (78)
Bibliography

Badgwell, T. A., Breedijk, T., Bushman, S. G., Butler, S. W., Chatterjee, S., Edgar, T. F., Toprac, A. J., & Trachtenberg, I. (1995). Modeling and control of microelectronics materials processing. Computers & Chemical Engineering, 19(1), 1–41.

Authors 8
  1. T.A. Badgwell (first)
  2. T. Breedijk (additional)
  3. S.G. Bushman (additional)
  4. S.W. Butler (additional)
  5. S. Chatterjee (additional)
  6. T.F. Edgar (additional)
  7. A.J. Toprac (additional)
  8. I. Trachtenberg (additional)
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Dates
Type When
Created 23 years, 1 month ago (July 25, 2002, 9:06 a.m.)
Deposited 5 years, 7 months ago (Jan. 12, 2020, 8:19 a.m.)
Indexed 5 months ago (March 19, 2025, 6:30 a.m.)
Issued 30 years, 7 months ago (Jan. 1, 1995)
Published 30 years, 7 months ago (Jan. 1, 1995)
Published Print 30 years, 7 months ago (Jan. 1, 1995)
Funders 0

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@article{Badgwell_1995, title={Modeling and control of microelectronics materials processing}, volume={19}, ISSN={0098-1354}, url={http://dx.doi.org/10.1016/0098-1354(94)e0038-o}, DOI={10.1016/0098-1354(94)e0038-o}, number={1}, journal={Computers & Chemical Engineering}, publisher={Elsevier BV}, author={Badgwell, T.A. and Breedijk, T. and Bushman, S.G. and Butler, S.W. and Chatterjee, S. and Edgar, T.F. and Toprac, A.J. and Trachtenberg, I.}, year={1995}, month=jan, pages={1–41} }