DOI: 10.1016/0092-640x(84)90016-0. Energy dependence of the ion-induced sputtering yields of monatomic solids

Energy dependence of the ion-induced sputtering yields of monatomic solids

10.1016/0092-640x(84)90016-0

Crossref journal-article

Elsevier BV

Atomic Data and Nuclear Data Tables (78)

Bibliography

Matsunami, N., Yamamura, Y., Itikawa, Y., Itoh, N., Kazumata, Y., Miyagawa, S., Morita, K., Shimizu, R., & Tawara, H. (1984). Energy dependence of the ion-induced sputtering yields of monatomic solids. Atomic Data and Nuclear Data Tables, 31(1), 1â80.

Authors 9

Noriaki Matsunami (first)
Yasunori Yamamura (additional)
Yukikazu Itikawa (additional)
Noriaki Itoh (additional)
Yukio Kazumata (additional)
Soji Miyagawa (additional)
Kenji Morita (additional)
Ryuichi Shimizu (additional)
Hiroyuki Tawara (additional)

References 15 Referenced 693

{'key': '10.1016/0092-640X(84)90016-0_bib1', 'first-page': '145', 'article-title': 'Sputtering by Particle Bombardment', 'author': 'Andersen', 'year': '1981'} / Sputtering by Particle Bombardment by Andersen (1981)
{'key': '10.1016/0092-640X(84)90016-0_bib2', 'first-page': '5607', 'author': 'Barnett', 'year': '1977', 'journal-title': 'ORNL 5206'} / ORNL 5206 by Barnett (1977)
{'key': '10.1016/0092-640X(84)90016-0_bib3', 'first-page': '219', 'article-title': 'Sputtering by Particle Bombardment', 'author': 'Roosendaal', 'year': '1981'} / Sputtering by Particle Bombardment by Roosendaal (1981)
10.1016/0039-6028(80)90258-7 / Surf. Sci. by Betz (1980)
10.1103/PhysRev.184.383 / Phys. Rev. by Sigmund (1969)
10.1007/BF02402744 / J. Mater. Sci. by Littmark (1978)
10.1103/PhysRevB.23.823 / Phys. Rev. B by Tu (1981)
{'key': '10.1016/0092-640X(84)90016-0_bib8', 'first-page': '9', 'article-title': 'Sputtering by Particle Bombardment', 'author': 'Sigmund', 'year': '1981'} / Sputtering by Particle Bombardment by Sigmund (1981)
10.1080/00337578308218604 / Radiat. Eff. by Yamamura (1983)
10.1103/PhysRev.124.128 / Phys. Rev. by Lindhard (1961)
{'issue': 'No. 14', 'key': '10.1016/0092-640X(84)90016-0_bib10_2', 'volume': '33', 'author': 'Lindhard', 'year': '1963', 'journal-title': 'Mat.-Fys. Medd. Danske Vid. Selsk.'} / Mat.-Fys. Medd. Danske Vid. Selsk. by Lindhard (1963)
10.1007/BF00899693 / Appl. Phys. by Behrisch (1979)
10.1063/1.327954 / J. Appl. Phys. by Bohdansky (1980)
10.1080/01422448008225597 / Radiat. Eff. Lett. by Matsunami (1980)
{'key': '10.1016/0092-640X(84)90016-0_bib14', 'author': 'Matsunami', 'year': '1980'} by Matsunami (1980)

Dates

Type	When
Created	20 years, 6 months ago (Feb. 3, 2005, 2:16 a.m.)
Deposited	6 years, 6 months ago (Jan. 29, 2019, 1:55 p.m.)
Indexed	1 day, 5 hours ago (Aug. 23, 2025, 1:01 a.m.)
Issued	41 years, 1 month ago (July 1, 1984)
Published	41 years, 1 month ago (July 1, 1984)
Published Print	41 years, 1 month ago (July 1, 1984)

Funders 0

None

BibTeX

@article{Matsunami_1984, title={Energy dependence of the ion-induced sputtering yields of monatomic solids}, volume={31}, ISSN={0092-640X}, url={http://dx.doi.org/10.1016/0092-640x(84)90016-0}, DOI={10.1016/0092-640x(84)90016-0}, number={1}, journal={Atomic Data and Nuclear Data Tables}, publisher={Elsevier BV}, author={Matsunami, Noriaki and Yamamura, Yasunori and Itikawa, Yukikazu and Itoh, Noriaki and Kazumata, Yukio and Miyagawa, Soji and Morita, Kenji and Shimizu, Ryuichi and Tawara, Hiroyuki}, year={1984}, month=jul, pages={1–80} }

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