DOI: 10.1016/0040-6090(93)90069-2. Applications of spectroscopic ellipsometry to microelectronics

Applications of spectroscopic ellipsometry to microelectronics

10.1016/0040-6090(93)90069-2

Crossref journal-article

Elsevier BV

Thin Solid Films (78)

Bibliography

Irene, E. A. (1993). Applications of spectroscopic ellipsometry to microelectronics. Thin Solid Films, 233(1â2), 96â111.

Authors 1

E.A. Irene (first)

References 35 Referenced 131

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10.1016/0040-6090(79)90188-3 / Thin Solid Films by Theeten (1979)
{'key': '10.1016/0040-6090(93)90069-2_BIB3', 'first-page': '175', 'volume': 'Vol. 14', 'author': 'Irene', 'year': '1988'} by Irene (1988)
10.1103/PhysRevB.20.3292 / Phys. Rev. B by Aspnes (1979)
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10.1149/1.2133080 / J. Electrochem. Soc. by Irene (1976)
10.1149/1.2133151 / J. Electrochem. Soc. by Irene (1977)
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{'key': '10.1016/0040-6090(93)90069-2_BIB14', 'series-title': 'The Physics and Chemistry of SiO2 and the Si-SiO2 Interface', 'author': 'Irene', 'year': '1993'} / The Physics and Chemistry of SiO2 and the Si-SiO2 Interface by Irene (1993)
{'key': '10.1016/0040-6090(93)90069-2_BIB15', 'series-title': 'The Physics and Chemistry of SiO2 and the Si-SiO2 Interface', 'author': 'Grunthaner', 'year': '1987'} / The Physics and Chemistry of SiO2 and the Si-SiO2 Interface by Grunthaner (1987)
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{'key': '10.1016/0040-6090(93)90069-2_BIB18', 'series-title': 'The Physics and Chemistry of SiO2 and the Si-SiO2 Interface', 'author': 'Joseph', 'year': '1993'} / The Physics and Chemistry of SiO2 and the Si-SiO2 Interface by Joseph (1993)
10.1364/JOSA.64.000804 / J. Opt. Soc. Am. by van der Meulen (1974)
10.1103/PhysRevB.27.7466 / Phys. Rev. B by Jellison (1982)
10.1103/PhysRevB.36.4821 / Phys. Rev. B by Luatenschlager (1987)
R. K. Sampson, K. A. Conrad, E. A. Irene and H. Z. Massoud, J. Electrochem. Soc., submitted for publication.
K. A. Conrad, R. K. Sampson, H. Z. Massoud and E. A. Irene, J. Vac. Sci. Technol. B, submitted for publication.
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Dates

Type	When
Created	22 years, 10 months ago (Oct. 18, 2002, 11:19 a.m.)
Deposited	6 years, 4 months ago (April 5, 2019, 12:57 a.m.)
Indexed	2 months, 2 weeks ago (June 15, 2025, 8:02 a.m.)
Issued	31 years, 10 months ago (Oct. 1, 1993)
Published	31 years, 10 months ago (Oct. 1, 1993)
Published Print	31 years, 10 months ago (Oct. 1, 1993)

Funders 0

None

BibTeX

@article{Irene_1993, title={Applications of spectroscopic ellipsometry to microelectronics}, volume={233}, ISSN={0040-6090}, url={http://dx.doi.org/10.1016/0040-6090(93)90069-2}, DOI={10.1016/0040-6090(93)90069-2}, number={1–2}, journal={Thin Solid Films}, publisher={Elsevier BV}, author={Irene, E.A.}, year={1993}, month=oct, pages={96–111} }

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