DOI: 10.1016/0040-6090(87)90095-2. Mechanical properties and microstructures of Al-1%Si thin film metallizations

Mechanical properties and microstructures of Al-1%Si thin film metallizations

10.1016/0040-6090(87)90095-2

Crossref journal-article

Elsevier BV

Thin Solid Films (78)

Bibliography

Griffin, A. J., Brotzen, F. R., & Dunn, C. F. (1987). Mechanical properties and microstructures of Al-1%Si thin film metallizations. Thin Solid Films, 150(2â3), 237â244.

Authors 3

Alfred J. Griffin (first)
Franz R. Brotzen (additional)
Clyde F. Dunn (additional)

References 9 Referenced 40

{'key': '10.1016/0040-6090(87)90095-2_BIB1', 'first-page': '367', 'article-title': 'VLSI Technology', 'author': 'Sze', 'year': '1983'} / VLSI Technology by Sze (1983)
{'key': '10.1016/0040-6090(87)90095-2_BIB2', 'first-page': '211', 'volume': '3', 'author': 'Hoffman', 'year': '1966', 'journal-title': 'Phys. Thin Films'} / Phys. Thin Films by Hoffman (1966)
{'key': '10.1016/0040-6090(87)90095-2_BIB3', 'first-page': 'L39', 'volume': '75', 'author': 'Badachhape', 'year': '1986', 'journal-title': 'Thin Solid Films'} / Thin Solid Films by Badachhape (1986)
{'key': '10.1016/0040-6090(87)90095-2_BIB4', 'series-title': 'The Structure and Properties of Thin Films', 'first-page': '183', 'author': 'Beams', 'year': '1959'} / The Structure and Properties of Thin Films by Beams (1959)
10.1016/0001-6160(86)90181-1 / Acta Metall. by Dludek (1986)
10.1063/1.1659233 / J. Appl. Phys. by Attardo (1970)
{'key': '10.1016/0040-6090(87)90095-2_BIB7', 'first-page': '290', 'volume': '9', 'author': "d'Heurle", 'year': '1971', 'journal-title': 'J. Vac. Sci. Technol.'} / J. Vac. Sci. Technol. by d'Heurle (1971)
10.1051/jphyscol:1975419 / J. Phys. (Paris) by d'Heurle (1975)
10.1016/0036-9748(86)90046-3 / Scr. Metall. by Griffin (1986)

Dates

Type	When
Created	22 years, 10 months ago (Oct. 18, 2002, 6:05 p.m.)
Deposited	6 years, 4 months ago (April 5, 2019, 2:54 a.m.)
Indexed	1 month, 4 weeks ago (June 25, 2025, 3:46 p.m.)
Issued	38 years, 1 month ago (July 1, 1987)
Published	38 years, 1 month ago (July 1, 1987)
Published Print	38 years, 1 month ago (July 1, 1987)

Funders 0

None

BibTeX

@article{Griffin_1987, title={Mechanical properties and microstructures of Al-1%Si thin film metallizations}, volume={150}, ISSN={0040-6090}, url={http://dx.doi.org/10.1016/0040-6090(87)90095-2}, DOI={10.1016/0040-6090(87)90095-2}, number={2–3}, journal={Thin Solid Films}, publisher={Elsevier BV}, author={Griffin, Alfred J. and Brotzen, Franz R. and Dunn, Clyde F.}, year={1987}, month=jul, pages={237–244} }

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