DOI: 10.1016/0040-6090(78)90331-0. A kinetic model for radio frequency plasma-activated chemical vapour deposition

A kinetic model for radio frequency plasma-activated chemical vapour deposition

10.1016/0040-6090(78)90331-0

Crossref journal-article

Elsevier BV

Thin Solid Films (78)

Bibliography

Turban, G., & Catherine, Y. (1978). A kinetic model for radio frequency plasma-activated chemical vapour deposition. Thin Solid Films, 48(1), 57â65.

Authors 2

Guy Turban (first)
Yves Catherine (additional)

References 24 Referenced 16

10.1016/0038-1101(65)90033-X / Solid State Electron. by Sterling (1965)
10.1016/0040-6090(68)90075-8 / Thin Solid Films by Joyce (1967)
10.1080/00222337608061188 / J. Macromol. Sci., Chem. by Bell (1976)
10.1080/00222337608061191 / J. Macromol. Sci., Chem. by Lam (1976)
10.1016/0040-6090(75)90197-2 / Thin Solid Films by Vuillermoz (1975)
10.1016/0040-6090(76)90255-8 / Thin Solid Films by Turban (1976)
{'key': '10.1016/0040-6090(78)90331-0_BIB7', 'series-title': '2nd Int. Colloq. on Cathodic Sputtering, CIP 76', 'author': 'Turban', 'year': '1976'} / 2nd Int. Colloq. on Cathodic Sputtering, CIP 76 by Turban (1976)
10.1016/0040-6090(77)90326-1 / Thin Solid Films by Catherine (1977)
10.1021/ma60039a005 / Macromolecules by Kobayashi (1974)
{'key': '10.1016/0040-6090(78)90331-0_BIB10', 'series-title': '2nd Int. Colloq. on Cathodic Sputtering, CIP 76', 'author': 'Kay', 'year': '1976'} / 2nd Int. Colloq. on Cathodic Sputtering, CIP 76 by Kay (1976)
10.1002/app.1972.070160911 / J. Appl. Polym. Sci. by Thompson (1972)
10.1080/00222337608061195 / J. Macromol. Sci., Chem. by Kobayashi (1976)
10.1149/1.2134390 / J. Electrochem. Soc. by Nolet (1975)
10.1016/0040-6090(77)90099-2 / Thin Solid Films by Wahl (1977)
{'key': '10.1016/0040-6090(78)90331-0_BIB15', 'series-title': 'Techniques and Applications of Plasma Chemistry', 'first-page': '48', 'year': '1974'} / Techniques and Applications of Plasma Chemistry (1974)
{'key': '10.1016/0040-6090(78)90331-0_BIB16', 'first-page': '18', 'volume': '5', 'author': 'Ferguson', 'year': '1969', 'journal-title': 'Adv. At. Mol. Phys.'} / Adv. At. Mol. Phys. by Ferguson (1969)
10.1016/0017-9310(71)90021-4 / Int. J. Heat Mass Transfer by Villermaux (1971)
10.1103/PhysRev.79.946 / Phys. Rev. by Varnerin (1950)
10.1063/1.1705987 / Phys. Fluids by Romig (1960)
{'key': '10.1016/0040-6090(78)90331-0_BIB20', 'series-title': 'Proc. 5th Int. Conf. on Chemical Vapor Deposition', 'first-page': '270', 'author': 'Koenings', 'year': '1975'} / Proc. 5th Int. Conf. on Chemical Vapor Deposition by Koenings (1975)
{'key': '10.1016/0040-6090(78)90331-0_BIB21', 'first-page': '205', 'article-title': 'Plasma Chemistry in Electrical Discharges', 'author': 'McTaggart', 'year': '1967'} / Plasma Chemistry in Electrical Discharges by McTaggart (1967)
10.1016/0040-6090(77)90095-5 / Thin Solid Films by Brodsky (1977)
{'key': '10.1016/0040-6090(78)90331-0_BIB23', 'series-title': 'IUPAC Round Table on Plasma Polymerization', 'author': 'Catherine', 'year': '1977'} / IUPAC Round Table on Plasma Polymerization by Catherine (1977)
10.1016/0584-8547(75)80049-8 / Spectrochim. Acta, Part B by Brassem (1975)

Dates

Type	When
Created	22 years, 10 months ago (Oct. 18, 2002, 6:57 p.m.)
Deposited	6 years, 5 months ago (April 5, 2019, 1:58 a.m.)
Indexed	5 months, 1 week ago (March 29, 2025, 12:13 p.m.)
Issued	47 years, 8 months ago (Jan. 1, 1978)
Published	47 years, 8 months ago (Jan. 1, 1978)
Published Print	47 years, 8 months ago (Jan. 1, 1978)

Funders 0

None

BibTeX

@article{Turban_1978, title={A kinetic model for radio frequency plasma-activated chemical vapour deposition}, volume={48}, ISSN={0040-6090}, url={http://dx.doi.org/10.1016/0040-6090(78)90331-0}, DOI={10.1016/0040-6090(78)90331-0}, number={1}, journal={Thin Solid Films}, publisher={Elsevier BV}, author={Turban, Guy and Catherine, Yves}, year={1978}, month=jan, pages={57–65} }

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