DOI: 10.1016/0039-6028(91)90351-r. Pressure dependence of oxide growth rate on silicon and metal silicides

Pressure dependence of oxide growth rate on silicon and metal silicides

10.1016/0039-6028(91)90351-r

Crossref journal-article

Elsevier BV

Surface Science (78)

Bibliography

Terminello, L. J., Yarmoff, J. A., dâHeurle, F. M., & McFeely, F. R. (1991). Pressure dependence of oxide growth rate on silicon and metal silicides. Surface Science, 243(1â3), 127â131.

Authors 4

L.J Terminello (first)
J.A Yarmoff (additional)
F.M d'Heurle (additional)
F.R McFeely (additional)

References 11 Referenced 4

10.1063/1.332721 / J. Appl. Phys. by Bartur (1987)
10.1016/0040-6090(86)90166-5 / Thin Solid Films by Jiang (1986)
10.1080/13642818708211210 / Philos. Mag. by d'Heurle (1987)
10.1063/1.339383 / J. Appl. Phys. by Frampton (1987)
10.1116/1.583112 / J. Vac. Sci. Techol. by Kuiper (1985)
{'first-page': '35', 'year': '1988', 'author': 'Raider', 'key': '10.1016/0039-6028(91)90351-R_BIB6'} by Raider (1988)
10.1063/1.100105 / Appl. Phys. Lett. by Walkup (1988)
10.1103/PhysRevB.38.6084 / Phys. Rev. by Himpsel (1988)
10.1103/PhysRevLett.55.2332 / Phys. Rev. Lett. by Tromp (1985)
10.1016/0029-554X(80)90655-2 / Nucl. Instrum. Methods by Eastman (1980)
10.1016/0167-5087(84)90513-1 / Nucl. Instrum. Methods by Himpsel (1984)

Dates

Type	When
Created	22 years, 10 months ago (Oct. 18, 2002, 5:45 a.m.)
Deposited	6 years, 4 months ago (April 5, 2019, 9:23 a.m.)
Indexed	11 months, 1 week ago (Sept. 15, 2024, 9:27 p.m.)
Issued	34 years, 6 months ago (Feb. 1, 1991)
Published	34 years, 6 months ago (Feb. 1, 1991)
Published Print	34 years, 6 months ago (Feb. 1, 1991)

Funders 0

None

BibTeX

@article{Terminello_1991, title={Pressure dependence of oxide growth rate on silicon and metal silicides}, volume={243}, ISSN={0039-6028}, url={http://dx.doi.org/10.1016/0039-6028(91)90351-r}, DOI={10.1016/0039-6028(91)90351-r}, number={1–3}, journal={Surface Science}, publisher={Elsevier BV}, author={Terminello, L.J and Yarmoff, J.A and d’Heurle, F.M and McFeely, F.R}, year={1991}, month=feb, pages={127–131} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2024,
        9,
        16
      ]
    ],
    "date-time": "2024-09-16T01:27:51Z",
    "timestamp": 1726450071633
  },
  "reference-count": 11,
  "publisher": "Elsevier BV",
  "issue": "1-3",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            1991,
            2,
            1
          ]
        ],
        "date-time": "1991-02-01T00:00:00Z",
        "timestamp": 665366400000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "https://www.elsevier.com/tdm/userlicense/1.0/"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        1991,
        2
      ]
    ]
  },
  "DOI": "10.1016/0039-6028(91)90351-r",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        10,
        18
      ]
    ],
    "date-time": "2002-10-18T09:45:47Z",
    "timestamp": 1034934347000
  },
  "page": "127-131",
  "source": "Crossref",
  "is-referenced-by-count": 4,
  "title": "Pressure dependence of oxide growth rate on silicon and metal silicides",
  "prefix": "10.1016",
  "volume": "243",
  "author": [
    {
      "given": "L.J",
      "family": "Terminello",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "J.A",
      "family": "Yarmoff",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "F.M",
      "family": "d'Heurle",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "F.R",
      "family": "McFeely",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "78",
  "reference": [
    {
      "key": "10.1016/0039-6028(91)90351-R_BIB1",
      "doi-asserted-by": "crossref",
      "first-page": "5404",
      "DOI": "10.1063/1.332721",
      "volume": "54",
      "author": "Bartur",
      "year": "1987",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/0039-6028(91)90351-R_BIB2",
      "doi-asserted-by": "crossref",
      "first-page": "115",
      "DOI": "10.1016/0040-6090(86)90166-5",
      "volume": "140",
      "author": "Jiang",
      "year": "1986",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "10.1016/0039-6028(91)90351-R_BIB3",
      "doi-asserted-by": "crossref",
      "first-page": "291",
      "DOI": "10.1080/13642818708211210",
      "volume": "B 55",
      "author": "d'Heurle",
      "year": "1987",
      "journal-title": "Philos. Mag."
    },
    {
      "key": "10.1016/0039-6028(91)90351-R_BIB4",
      "doi-asserted-by": "crossref",
      "first-page": "2972",
      "DOI": "10.1063/1.339383",
      "volume": "62",
      "author": "Frampton",
      "year": "1987",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "10.1016/0039-6028(91)90351-R_BIB5",
      "doi-asserted-by": "crossref",
      "first-page": "830",
      "DOI": "10.1116/1.583112",
      "volume": "B 3",
      "author": "Kuiper",
      "year": "1985",
      "journal-title": "J. Vac. Sci. Techol."
    },
    {
      "first-page": "35",
      "year": "1988",
      "author": "Raider",
      "key": "10.1016/0039-6028(91)90351-R_BIB6"
    },
    {
      "key": "10.1016/0039-6028(91)90351-R_BIB7",
      "doi-asserted-by": "crossref",
      "first-page": "888",
      "DOI": "10.1063/1.100105",
      "volume": "53",
      "author": "Walkup",
      "year": "1988",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/0039-6028(91)90351-R_BIB8",
      "doi-asserted-by": "crossref",
      "first-page": "6084",
      "DOI": "10.1103/PhysRevB.38.6084",
      "volume": "B 38",
      "author": "Himpsel",
      "year": "1988",
      "journal-title": "Phys. Rev."
    },
    {
      "key": "10.1016/0039-6028(91)90351-R_BIB9",
      "doi-asserted-by": "crossref",
      "first-page": "2332",
      "DOI": "10.1103/PhysRevLett.55.2332",
      "volume": "55",
      "author": "Tromp",
      "year": "1985",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "10.1016/0039-6028(91)90351-R_BIB10",
      "doi-asserted-by": "crossref",
      "first-page": "327",
      "DOI": "10.1016/0029-554X(80)90655-2",
      "volume": "172",
      "author": "Eastman",
      "year": "1980",
      "journal-title": "Nucl. Instrum. Methods"
    },
    {
      "key": "10.1016/0039-6028(91)90351-R_BIB11",
      "doi-asserted-by": "crossref",
      "first-page": "107",
      "DOI": "10.1016/0167-5087(84)90513-1",
      "volume": "222",
      "author": "Himpsel",
      "year": "1984",
      "journal-title": "Nucl. Instrum. Methods"
    }
  ],
  "container-title": "Surface Science",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://api.elsevier.com/content/article/PII:003960289190351R?httpAccept=text/xml",
      "content-type": "text/xml",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://api.elsevier.com/content/article/PII:003960289190351R?httpAccept=text/plain",
      "content-type": "text/plain",
      "content-version": "vor",
      "intended-application": "text-mining"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2019,
        4,
        5
      ]
    ],
    "date-time": "2019-04-05T13:23:53Z",
    "timestamp": 1554470633000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://linkinghub.elsevier.com/retrieve/pii/003960289190351R"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1991,
        2
      ]
    ]
  },
  "references-count": 11,
  "journal-issue": {
    "issue": "1-3",
    "published-print": {
      "date-parts": [
        [
          1991,
          2
        ]
      ]
    }
  },
  "alternative-id": [
    "003960289190351R"
  ],
  "URL": "http://dx.doi.org/10.1016/0039-6028(91)90351-R",
  "relation": {},
  "ISSN": [
    "0039-6028"
  ],
  "subject": [],
  "container-title-short": "Surface Science",
  "published": {
    "date-parts": [
      [
        1991,
        2
      ]
    ]
  }
}