DOI: 10.1016/0039-6028(89)90133-7. Damage profiling of Ar+ -irradiated Si(100) and GaAs(100) by medium energy ion scattering

Damage profiling of Ar+ -irradiated Si(100) and GaAs(100) by medium energy ion scattering

10.1016/0039-6028(89)90133-7

Crossref journal-article

Elsevier BV

Surface Science (78)

Bibliography

Konomi, I., Kawano, A., & Kido, Y. (1989). Damage profiling of Ar+ -irradiated Si(100) and GaAs(100) by medium energy ion scattering. Surface Science, 207(2â3), 427â440.

Authors 3

I. Konomi (first)
A. Kawano (additional)
Y. Kido (additional)

References 23 Referenced 26

{'key': '10.1016/0039-6028(89)90133-7_BIB1', 'author': 'Mayer', 'year': '1977'} by Mayer (1977)
{'key': '10.1016/0039-6028(89)90133-7_BIB2', 'author': 'Chu', 'year': '1978'} by Chu (1978)
10.1016/0039-6028(80)90308-8 / Surface Sci. by Aspnes (1980)
10.1149/1.2114140 / J. Electrochem. Soc. by Oehrlein (1985)
10.1016/0040-6090(87)90250-1 / Thin Solid Films by Ivey (1987)
10.1016/0029-554X(76)90798-9 / Nucl. Instr. Methods by Turkenburg (1976)
10.1103/PhysRevLett.54.134 / Phys. Rev. Letters by Frenken (1985)
10.1016/0029-554X(82)90022-2 / Nucl. Instr. Methods by Smeenk (1982)
10.1016/0168-583X(84)90055-7 / Nucl. Instr. Methods B by Tromp (1984)
10.1103/PhysRevLett.33.1325 / Phys. Rev. Letters by Brandt (1974)
Y. Horino, M. Renda and K. Morita, Nucl. Instr. Methods B, to be published.
10.1016/0375-9601(71)90703-1 / Phys. Letters A by Caywood (1971)
10.1063/1.338148 / J. Appl. Phys. by Kido (1987)
{'key': '10.1016/0039-6028(89)90133-7_BIB14', 'first-page': '36', 'author': 'Marion', 'year': '1968'} by Marion (1968)
10.1080/00337577208231165 / Radiation Effects by Eisen (1972)
{'key': '10.1016/0039-6028(89)90133-7_BIB16', 'first-page': '75', 'author': 'Mea', 'year': '1975'} by Mea (1975)
10.1063/1.1659506 / J. Appl. Phys. by Feldman (1970)
10.1080/00337578008209179 / Radiation Effects by Chu (1980)
10.1143/JJAP.23.L262 / Japan. J. Appl. Phys. by Kang (1984)
10.1103/PhysRevB.9.5008 / Phys. Rev. B by Robinson (1974)
10.1103/PhysRevB.15.2458 / Phys. Rev. B by Wilson (1977)
10.1080/00337578008209189 / Radiation Effects by Kalbitzer (1980)
{'key': '10.1016/0039-6028(89)90133-7_BIB23', 'first-page': '14', 'volume': '37', 'author': 'Winterbon', 'year': '1970', 'journal-title': 'Kgl. Danske Videnskab. Selskab Mat.-Fys. Medd.'} / Kgl. Danske Videnskab. Selskab Mat.-Fys. Medd. by Winterbon (1970)

Dates

Type	When
Created	22 years, 10 months ago (Oct. 18, 2002, 9:45 a.m.)
Deposited	6 years, 4 months ago (April 5, 2019, 11:55 a.m.)
Indexed	1 year, 6 months ago (Feb. 4, 2024, 5:58 a.m.)
Issued	36 years, 7 months ago (Jan. 1, 1989)
Published	36 years, 7 months ago (Jan. 1, 1989)
Published Print	36 years, 7 months ago (Jan. 1, 1989)

Funders 0

None

BibTeX

@article{Konomi_1989, title={Damage profiling of Ar+ -irradiated Si(100) and GaAs(100) by medium energy ion scattering}, volume={207}, ISSN={0039-6028}, url={http://dx.doi.org/10.1016/0039-6028(89)90133-7}, DOI={10.1016/0039-6028(89)90133-7}, number={2–3}, journal={Surface Science}, publisher={Elsevier BV}, author={Konomi, I. and Kawano, A. and Kido, Y.}, year={1989}, month=jan, pages={427–440} }

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