DOI: 10.1016/0039-6028(70)90081-6. Analysis of amorphous layers on silicon by backscattering and channeling effect measurements

Analysis of amorphous layers on silicon by backscattering and channeling effect measurements

10.1016/0039-6028(70)90081-6

Crossref journal-article

Elsevier BV

Surface Science (78)

Bibliography

Meyer, O., Gyulai, J., & Mayer, J. W. (1970). Analysis of amorphous layers on silicon by backscattering and channeling effect measurements. Surface Science, 22(2), 263â276.

Authors 3

O. Meyer (first)
J. Gyulai (additional)
J.W. Mayer (additional)

References 17 Referenced 85

10.1016/0029-554X(59)90180-6 / Nucl. Instr. Methods by Rubin (1959)
10.1063/1.1652725 / Appl. Phys. Letters by Thompson (1969)
10.1029/JZ070i006p01311 / J. Geophys. Res. by Patterson (1965)
10.1126/science.134.3480.672 / Science by Turkevich (1961)
{'key': '10.1016/0039-6028(70)90081-6_BIB5', 'author': 'Loomis', 'year': '301964', 'journal-title': 'JPL Tech. Rept. No. 32–606'} / JPL Tech. Rept. No. 32–606 by Loomis (301964)
10.1063/1.1657473 / J. Appl. Phys. by Eriksson (1969)
{'key': '10.1016/0039-6028(70)90081-6_BIB7', 'first-page': '239', 'volume': 'Vol. 1', 'author': 'Mayer', 'year': '1969'} by Mayer (1969)
{'key': '10.1016/0039-6028(70)90081-6_BIB8', 'first-page': '528', 'volume': '110', 'author': 'Deal', 'year': '1963', 'journal-title': 'J. Electrochem. Soc.'} / J. Electrochem. Soc. by Deal (1963)
10.1149/1.2423333 / J. Electrochem. Soc. by Pliskin (1965)
10.1021/ac50157a027 / Anal. Chem. by Amsel (1967)
10.1103/PhysRev.126.61 / Phys. Rev. by Powers (1962)
C. Williamson and J.T. Boujot, CEA-2189 (1962). Data also given in ORTEC Surface Barriers Manual.
10.1139/p68-081 / Can. J. Phys. by Bøgh (1968)
10.1063/1.1653174 / Appl. Phys. Letters. by Gyulai (1970)
{'key': '10.1016/0039-6028(70)90081-6_BIB15', 'author': 'Gyulai', 'year': '1970', 'journal-title': 'J. Appl. Phys.'} / J. Appl. Phys. by Gyulai (1970)
{'key': '10.1016/0039-6028(70)90081-6_BIB16', 'author': 'Picraux', 'year': '1969'} by Picraux (1969)
10.1016/0040-6090(68)90010-2 / Thin Solid Films by Pliskin (1968)

Dates

Type	When
Created	22 years, 10 months ago (Oct. 18, 2002, 11:23 a.m.)
Deposited	6 years, 4 months ago (April 5, 2019, 8:53 a.m.)
Indexed	1 year, 6 months ago (Feb. 7, 2024, 2:24 a.m.)
Issued	54 years, 11 months ago (Sept. 1, 1970)
Published	54 years, 11 months ago (Sept. 1, 1970)
Published Print	54 years, 11 months ago (Sept. 1, 1970)

Funders 0

None

BibTeX

@article{Meyer_1970, title={Analysis of amorphous layers on silicon by backscattering and channeling effect measurements}, volume={22}, ISSN={0039-6028}, url={http://dx.doi.org/10.1016/0039-6028(70)90081-6}, DOI={10.1016/0039-6028(70)90081-6}, number={2}, journal={Surface Science}, publisher={Elsevier BV}, author={Meyer, O. and Gyulai, J. and Mayer, J.W.}, year={1970}, month=sep, pages={263–276} }

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