DOI: 10.1016/0029-554x(76)90756-4. The sputtering of PtSi and NiSi

10.1016/0029-554x(76)90756-4

Crossref journal-article

Elsevier BV

Nuclear Instruments and Methods (78)

Bibliography

Poate, J. M., Brown, W. L., Homer, R., Augustyniak, W. M., Mayer, J. W., Tu, K. N., & van der Weg, W. F. (1976). The sputtering of PtSi and NiSi. Nuclear Instruments and Methods, 132, 345â349.

Authors 7

J.M. Poate (first)
W.L. Brown (additional)
R. Homer (additional)
W.M. Augustyniak (additional)
J.W. Mayer (additional)
K.N. Tu (additional)
W.F. van der Weg (additional)

References 8 Referenced 70

10.1016/0022-3697(59)90041-1 / J. Phys. Chem. Sol. by Gillam (1959)
{'key': '10.1016/0029-554X(76)90756-4_BIB2', 'series-title': 'Proc. 7th Yugoslav Symp. on Physics of ionized gases', 'author': 'Andersen', 'year': '1975'} / Proc. 7th Yugoslav Symp. on Physics of ionized gases by Andersen (1975)
{'issue': 'no. 3', 'key': '10.1016/0029-554X(76)90756-4_BIB3', 'volume': '39', 'author': 'Andersen', 'year': '1974', 'journal-title': 'Kgl. Dan. Vid. Selsk. Mat. Fys. Medd.'} / Kgl. Dan. Vid. Selsk. Mat. Fys. Medd. by Andersen (1974)
10.1063/1.1657339 / J. Appl. Phys. by Ogar (1969)
10.1063/1.1655230 / Appl. Phys. Lett. by Poate (1974)
10.1016/0040-6090(75)90058-9 / Thin Solid Films by Tu (1975)
10.1016/S0092-640X(70)80016-X / Nucl. Data Tables by Northcliffe (1970)
10.1016/0040-6090(73)90063-1 / Thin Solid Films by Ziegler (1973)

Dates

Type	When
Created	22 years, 9 months ago (Nov. 11, 2002, 5:02 p.m.)
Deposited	6 years, 4 months ago (April 4, 2019, 1:55 a.m.)
Indexed	1 year, 1 month ago (July 10, 2024, 6:14 a.m.)
Issued	49 years, 7 months ago (Jan. 1, 1976)
Published	49 years, 7 months ago (Jan. 1, 1976)
Published Print	49 years, 7 months ago (Jan. 1, 1976)

Funders 0

None

BibTeX

@article{Poate_1976, title={The sputtering of PtSi and NiSi}, volume={132}, ISSN={0029-554X}, url={http://dx.doi.org/10.1016/0029-554x(76)90756-4}, DOI={10.1016/0029-554x(76)90756-4}, journal={Nuclear Instruments and Methods}, publisher={Elsevier BV}, author={Poate, J.M. and Brown, W.L. and Homer, R. and Augustyniak, W.M. and Mayer, J.W. and Tu, K.N. and van der Weg, W.F.}, year={1976}, month=jan, pages={345–349} }

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