DOI: 10.1016/0022-3115(76)90370-6. Implantation profiles and sputtering studied by detecting the optical radiation from sputtered particles during ion bombardment

Implantation profiles and sputtering studied by detecting the optical radiation from sputtered particles during ion bombardment

10.1016/0022-3115(76)90370-6

Crossref journal-article

Elsevier BV

Journal of Nuclear Materials (78)

Bibliography

Emmoth, B., Braun, M., & Palenius, H. P. (1976). Implantation profiles and sputtering studied by detecting the optical radiation from sputtered particles during ion bombardment. Journal of Nuclear Materials, 63, 482â486.

Authors 3

B. Emmoth (first)
M. Braun (additional)
H.P. Palenius (additional)

References 15 Referenced 10

10.1088/0031-8949/10/3/007 / Physica Scripta by Braun (1974)
10.1080/00337577608233030 / Rad. Eff. by Braun (1976)
10.1016/0029-554X(61)90026-X / Nucl. Instr. Meth. by Almén (1961)
10.1080/00337577308232233 / Rad. Eff. by Andersen (1973)
10.1103/PhysRev.184.383 / Phys. Rev. by Sigmund (1969)
{'issue': 'no. 14', 'key': '10.1016/0022-3115(76)90370-6_BIB6', 'volume': '33', 'author': 'Lindhard', 'year': '1963', 'journal-title': 'Kgl. Dan. Vid. Sci. Mat. Fys. Medd.'} / Kgl. Dan. Vid. Sci. Mat. Fys. Medd. by Lindhard (1963)
K.B. Winterbon, private communication.
10.1103/PhysRev.96.336 / Phys. Rev. by Hagstrum (1954)
10.1080/00337577308232213 / Rad. Eff. by Kelly (1973)
10.1063/1.1659854 / J. Appl. Phys. by Summers (1971)
{'key': '10.1016/0022-3115(76)90370-6_BIB11', 'first-page': '51', 'volume': '27', 'author': 'Benninghoven', 'year': '1969', 'journal-title': 'Z. Angew. Phys.'} / Z. Angew. Phys. by Benninghoven (1969)
10.1063/1.321449 / J. Appl. Phys. by Smith (1975)
10.1007/BF01394745 / Z. Physik by Benninghoven (1969)
10.1080/00337577308232126 / Rad. Eff. by Tolk (1973)
{'key': '10.1016/0022-3115(76)90370-6_BIB15', 'first-page': '511', 'volume': 'Vol. 2', 'year': '1975'} (1975)

Dates

Type	When
Created	22 years, 5 months ago (March 25, 2003, 6:24 p.m.)
Deposited	6 years, 5 months ago (March 24, 2019, 7:59 a.m.)
Indexed	1 year, 1 month ago (Aug. 2, 2024, 10:14 p.m.)
Issued	48 years, 9 months ago (Dec. 1, 1976)
Published	48 years, 9 months ago (Dec. 1, 1976)
Published Print	48 years, 9 months ago (Dec. 1, 1976)

Funders 0

None

BibTeX

@article{Emmoth_1976, title={Implantation profiles and sputtering studied by detecting the optical radiation from sputtered particles during ion bombardment}, volume={63}, ISSN={0022-3115}, url={http://dx.doi.org/10.1016/0022-3115(76)90370-6}, DOI={10.1016/0022-3115(76)90370-6}, journal={Journal of Nuclear Materials}, publisher={Elsevier BV}, author={Emmoth, B. and Braun, M. and Palenius, H.P.}, year={1976}, month=dec, pages={482–486} }

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