DOI: 10.1016/0022-0248(96)00277-1. Reaction kinetics and transport phenomena underlying the low-pressure metalorganic chemical vapor deposition of GaAs

Reaction kinetics and transport phenomena underlying the low-pressure metalorganic chemical vapor deposition of GaAs

10.1016/0022-0248(96)00277-1

Crossref journal-article

Elsevier BV

Journal of Crystal Growth (78)

Bibliography

Ingle, N. K., Theodoropoulos, C., Mountziaris, T. J., Wexler, R. M., & Smith, F. T. J. (1996). Reaction kinetics and transport phenomena underlying the low-pressure metalorganic chemical vapor deposition of GaAs. Journal of Crystal Growth, 167(3â4), 543â556.

Authors 5

N.K. Ingle (first)
C. Theodoropoulos (additional)
T.J. Mountziaris (additional)
R.M. Wexler (additional)
F.T.J. Smith (additional)

References 30 Referenced 30

10.1016/0079-6786(89)90007-1 / Progr. Solid State Chem. by Smith (1989)
{'key': '10.1016/0022-0248(96)00277-1_bib2', 'first-page': '117', 'volume': '204', 'author': 'Smith', 'year': '1991'} by Smith (1991)
10.1143/JJAP.24.L824 / Jpn. J. Appl. Phys. by Kobayashi (1985)
10.1016/0022-0248(86)90310-6 / J. Crystal Growth by Kuech (1986)
10.1016/0920-2307(87)90002-8 / Mater. Sci. Rep. by Kuech (1987)
10.1063/1.95995 / Appl. Phys. Lett. by Kuech (1985)
10.1143/JJAP.25.1393 / Jpn. J. Appl. Phys. by Kimura (1986)
10.1016/0022-0248(89)90195-4 / J. Crystal Growth by Jensen (1989)
10.1016/0022-0248(91)90428-8 / J. Crystal Growth by Jensen (1991)
10.1139/v79-520 / Can. J. Chem. by Paputa (1979)
10.1016/0022-0248(87)90218-1 / J. Crystal Growth by Lee (1987)
10.1149/1.2113929 / J. Electrochem. Soc. by Yoshida (1985)
10.1149/1.2085990 / J. Electrochem. Soc. by Mountziaris (1991)
10.1139/v63-213 / Can. J. Chem. by Jacko (1963)
10.1016/0039-6028(93)90247-H / Surf. Sci. by Donnelly (1993)
10.1016/0022-0248(88)90520-9 / J. Crystal Growth by Lückerath (1988)
{'key': '10.1016/0022-0248(96)00277-1_bib17', 'volume': 'Vol. B1', 'author': 'Hack', 'year': '1993'} by Hack (1993)
10.1063/1.555759 / J. Phys. Chem. Ref. Data by Tsang (1986)
{'key': '10.1016/0022-0248(96)00277-1_bib19', 'series-title': 'Rate Constants of Gas-Phase Reactions', 'author': 'Kondratiev', 'year': '1972'} / Rate Constants of Gas-Phase Reactions by Kondratiev (1972)
10.1149/1.2044246 / J. Electrochem. Soc. by Theodoropoulos (1995)
{'key': '10.1016/0022-0248(96)00277-1_bib21', 'series-title': 'Comprehensive Inorganic Chemistry', 'year': '1973'} / Comprehensive Inorganic Chemistry (1973)
{'key': '10.1016/0022-0248(96)00277-1_bib22', 'first-page': '15', 'volume': '204', 'author': 'Donnelly', 'year': '1991'} by Donnelly (1991)
10.1016/0039-6028(74)90269-6 / Surf. Sci. by Arthur (1974)
10.1116/1.577147 / J. Vac. Sci. Technol. A by Donnelly (1991)
10.1103/PhysRevLett.46.1652 / Phys. Rev. Lett. by Lüth (1981)
10.1016/0022-0248(93)90178-Y / J. Crystal Growth by Mountziaris (1993)
10.1017/S0022112094002752 / J. Fluid Mech. by Ingle (1994)
10.1017/S0022112096000584 / J. Fluid Mech. by Ingle (1996)
{'key': '10.1016/0022-0248(96)00277-1_bib28', 'series-title': 'The Properties of Gases and Liquids', 'author': 'Reid', 'year': '1977'} / The Properties of Gases and Liquids by Reid (1977)
{'key': '10.1016/0022-0248(96)00277-1_bib29', 'series-title': 'PhD Thesis', 'author': 'Ingle', 'year': '1995'} / PhD Thesis by Ingle (1995)

Dates

Type	When
Created	22 years, 3 months ago (May 12, 2003, 9:09 p.m.)
Deposited	6 years, 4 months ago (April 22, 2019, 10:27 a.m.)
Indexed	1 year, 6 months ago (Feb. 6, 2024, 6:58 p.m.)
Issued	28 years, 10 months ago (Oct. 1, 1996)
Published	28 years, 10 months ago (Oct. 1, 1996)
Published Print	28 years, 10 months ago (Oct. 1, 1996)

Funders 0

None

BibTeX

@article{Ingle_1996, title={Reaction kinetics and transport phenomena underlying the low-pressure metalorganic chemical vapor deposition of GaAs}, volume={167}, ISSN={0022-0248}, url={http://dx.doi.org/10.1016/0022-0248(96)00277-1}, DOI={10.1016/0022-0248(96)00277-1}, number={3–4}, journal={Journal of Crystal Growth}, publisher={Elsevier BV}, author={Ingle, N.K. and Theodoropoulos, C. and Mountziaris, T.J. and Wexler, R.M. and Smith, F.T.J.}, year={1996}, month=oct, pages={543–556} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2024,
        2,
        6
      ]
    ],
    "date-time": "2024-02-06T23:58:36Z",
    "timestamp": 1707263916750
  },
  "reference-count": 30,
  "publisher": "Elsevier BV",
  "issue": "3-4",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            1996,
            10,
            1
          ]
        ],
        "date-time": "1996-10-01T00:00:00Z",
        "timestamp": 844128000000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "https://www.elsevier.com/tdm/userlicense/1.0/"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        1996,
        10
      ]
    ]
  },
  "DOI": "10.1016/0022-0248(96)00277-1",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2003,
        5,
        13
      ]
    ],
    "date-time": "2003-05-13T01:09:12Z",
    "timestamp": 1052788152000
  },
  "page": "543-556",
  "source": "Crossref",
  "is-referenced-by-count": 30,
  "title": "Reaction kinetics and transport phenomena underlying the low-pressure metalorganic chemical vapor deposition of GaAs",
  "prefix": "10.1016",
  "volume": "167",
  "author": [
    {
      "given": "N.K.",
      "family": "Ingle",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "C.",
      "family": "Theodoropoulos",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "T.J.",
      "family": "Mountziaris",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "R.M.",
      "family": "Wexler",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "F.T.J.",
      "family": "Smith",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "78",
  "reference": [
    {
      "key": "10.1016/0022-0248(96)00277-1_bib1",
      "doi-asserted-by": "crossref",
      "first-page": "111",
      "DOI": "10.1016/0079-6786(89)90007-1",
      "volume": "19",
      "author": "Smith",
      "year": "1989",
      "journal-title": "Progr. Solid State Chem."
    },
    {
      "key": "10.1016/0022-0248(96)00277-1_bib2",
      "first-page": "117",
      "volume": "204",
      "author": "Smith",
      "year": "1991"
    },
    {
      "key": "10.1016/0022-0248(96)00277-1_bib3",
      "doi-asserted-by": "crossref",
      "first-page": "L824",
      "DOI": "10.1143/JJAP.24.L824",
      "volume": "24",
      "author": "Kobayashi",
      "year": "1985",
      "journal-title": "Jpn. J. Appl. Phys."
    },
    {
      "key": "10.1016/0022-0248(96)00277-1_bib4",
      "doi-asserted-by": "crossref",
      "first-page": "257",
      "DOI": "10.1016/0022-0248(86)90310-6",
      "volume": "77",
      "author": "Kuech",
      "year": "1986",
      "journal-title": "J. Crystal Growth"
    },
    {
      "key": "10.1016/0022-0248(96)00277-1_bib5",
      "doi-asserted-by": "crossref",
      "first-page": "1",
      "DOI": "10.1016/0920-2307(87)90002-8",
      "volume": "2",
      "author": "Kuech",
      "year": "1987",
      "journal-title": "Mater. Sci. Rep."
    },
    {
      "key": "10.1016/0022-0248(96)00277-1_bib6",
      "doi-asserted-by": "crossref",
      "first-page": "821",
      "DOI": "10.1063/1.95995",
      "volume": "47",
      "author": "Kuech",
      "year": "1985",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "10.1016/0022-0248(96)00277-1_bib7",
      "doi-asserted-by": "crossref",
      "first-page": "1393",
      "DOI": "10.1143/JJAP.25.1393",
      "volume": "25",
      "author": "Kimura",
      "year": "1986",
      "journal-title": "Jpn. J. Appl. Phys."
    },
    {
      "key": "10.1016/0022-0248(96)00277-1_bib8",
      "doi-asserted-by": "crossref",
      "first-page": "148",
      "DOI": "10.1016/0022-0248(89)90195-4",
      "volume": "98",
      "author": "Jensen",
      "year": "1989",
      "journal-title": "J. Crystal Growth"
    },
    {
      "key": "10.1016/0022-0248(96)00277-1_bib9",
      "doi-asserted-by": "crossref",
      "first-page": "1",
      "DOI": "10.1016/0022-0248(91)90428-8",
      "volume": "107",
      "author": "Jensen",
      "year": "1991",
      "journal-title": "J. Crystal Growth"
    },
    {
      "key": "10.1016/0022-0248(96)00277-1_bib10",
      "doi-asserted-by": "crossref",
      "first-page": "3178",
      "DOI": "10.1139/v79-520",
      "volume": "57",
      "author": "Paputa",
      "year": "1979",
      "journal-title": "Can. J. Chem."
    },
    {
      "key": "10.1016/0022-0248(96)00277-1_bib11",
      "doi-asserted-by": "crossref",
      "first-page": "165",
      "DOI": "10.1016/0022-0248(87)90218-1",
      "volume": "85",
      "author": "Lee",
      "year": "1987",
      "journal-title": "J. Crystal Growth"
    },
    {
      "key": "10.1016/0022-0248(96)00277-1_bib12",
      "doi-asserted-by": "crossref",
      "first-page": "677",
      "DOI": "10.1149/1.2113929",
      "volume": "132",
      "author": "Yoshida",
      "year": "1985",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "10.1016/0022-0248(96)00277-1_bib13",
      "doi-asserted-by": "crossref",
      "first-page": "2426",
      "DOI": "10.1149/1.2085990",
      "volume": "138",
      "author": "Mountziaris",
      "year": "1991",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "10.1016/0022-0248(96)00277-1_bib14",
      "doi-asserted-by": "crossref",
      "first-page": "1560",
      "DOI": "10.1139/v63-213",
      "volume": "41",
      "author": "Jacko",
      "year": "1963",
      "journal-title": "Can. J. Chem."
    },
    {
      "key": "10.1016/0022-0248(96)00277-1_bib15",
      "doi-asserted-by": "crossref",
      "first-page": "93",
      "DOI": "10.1016/0039-6028(93)90247-H",
      "volume": "293",
      "author": "Donnelly",
      "year": "1993",
      "journal-title": "Surf. Sci."
    },
    {
      "key": "10.1016/0022-0248(96)00277-1_bib16",
      "doi-asserted-by": "crossref",
      "first-page": "151",
      "DOI": "10.1016/0022-0248(88)90520-9",
      "volume": "93",
      "author": "L\u00fcckerath",
      "year": "1988",
      "journal-title": "J. Crystal Growth"
    },
    {
      "key": "10.1016/0022-0248(96)00277-1_bib17",
      "volume": "Vol. B1",
      "author": "Hack",
      "year": "1993"
    },
    {
      "key": "10.1016/0022-0248(96)00277-1_bib18",
      "doi-asserted-by": "crossref",
      "first-page": "1087",
      "DOI": "10.1063/1.555759",
      "volume": "15",
      "author": "Tsang",
      "year": "1986",
      "journal-title": "J. Phys. Chem. Ref. Data"
    },
    {
      "key": "10.1016/0022-0248(96)00277-1_bib19",
      "series-title": "Rate Constants of Gas-Phase Reactions",
      "author": "Kondratiev",
      "year": "1972"
    },
    {
      "key": "10.1016/0022-0248(96)00277-1_bib20",
      "doi-asserted-by": "crossref",
      "first-page": "2086",
      "DOI": "10.1149/1.2044246",
      "volume": "142",
      "author": "Theodoropoulos",
      "year": "1995",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "10.1016/0022-0248(96)00277-1_bib21",
      "series-title": "Comprehensive Inorganic Chemistry",
      "year": "1973"
    },
    {
      "key": "10.1016/0022-0248(96)00277-1_bib22",
      "first-page": "15",
      "volume": "204",
      "author": "Donnelly",
      "year": "1991"
    },
    {
      "key": "10.1016/0022-0248(96)00277-1_bib23",
      "doi-asserted-by": "crossref",
      "first-page": "449",
      "DOI": "10.1016/0039-6028(74)90269-6",
      "volume": "43",
      "author": "Arthur",
      "year": "1974",
      "journal-title": "Surf. Sci."
    },
    {
      "key": "10.1016/0022-0248(96)00277-1_bib24",
      "doi-asserted-by": "crossref",
      "first-page": "2872",
      "DOI": "10.1116/1.577147",
      "volume": "9",
      "author": "Donnelly",
      "year": "1991",
      "journal-title": "J. Vac. Sci. Technol. A"
    },
    {
      "key": "10.1016/0022-0248(96)00277-1_bib25",
      "doi-asserted-by": "crossref",
      "first-page": "1652",
      "DOI": "10.1103/PhysRevLett.46.1652",
      "volume": "46",
      "author": "L\u00fcth",
      "year": "1981",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "10.1016/0022-0248(96)00277-1_bib26",
      "doi-asserted-by": "crossref",
      "first-page": "283",
      "DOI": "10.1016/0022-0248(93)90178-Y",
      "volume": "131",
      "author": "Mountziaris",
      "year": "1993",
      "journal-title": "J. Crystal Growth"
    },
    {
      "key": "10.1016/0022-0248(96)00277-1_SB0135",
      "doi-asserted-by": "crossref",
      "first-page": "249",
      "DOI": "10.1017/S0022112094002752",
      "volume": "277",
      "author": "Ingle",
      "year": "1994",
      "journal-title": "J. Fluid Mech."
    },
    {
      "key": "10.1016/0022-0248(96)00277-1_SB0140",
      "doi-asserted-by": "crossref",
      "first-page": "373",
      "DOI": "10.1017/S0022112096000584",
      "volume": "316",
      "author": "Ingle",
      "year": "1996",
      "journal-title": "J. Fluid Mech."
    },
    {
      "key": "10.1016/0022-0248(96)00277-1_bib28",
      "series-title": "The Properties of Gases and Liquids",
      "author": "Reid",
      "year": "1977"
    },
    {
      "key": "10.1016/0022-0248(96)00277-1_bib29",
      "series-title": "PhD Thesis",
      "author": "Ingle",
      "year": "1995"
    }
  ],
  "container-title": "Journal of Crystal Growth",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://api.elsevier.com/content/article/PII:0022024896002771?httpAccept=text/plain",
      "content-type": "text/plain",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://api.elsevier.com/content/article/PII:0022024896002771?httpAccept=text/xml",
      "content-type": "text/xml",
      "content-version": "vor",
      "intended-application": "text-mining"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2019,
        4,
        22
      ]
    ],
    "date-time": "2019-04-22T14:27:34Z",
    "timestamp": 1555943254000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://linkinghub.elsevier.com/retrieve/pii/0022024896002771"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1996,
        10
      ]
    ]
  },
  "references-count": 30,
  "journal-issue": {
    "issue": "3-4",
    "published-print": {
      "date-parts": [
        [
          1996,
          10
        ]
      ]
    }
  },
  "alternative-id": [
    "0022024896002771"
  ],
  "URL": "http://dx.doi.org/10.1016/0022-0248(96)00277-1",
  "relation": {},
  "ISSN": [
    "0022-0248"
  ],
  "subject": [],
  "container-title-short": "Journal of Crystal Growth",
  "published": {
    "date-parts": [
      [
        1996,
        10
      ]
    ]
  }
}