Crossref journal-article
Elsevier BV
Journal of Crystal Growth (78)
Bibliography

Shigeta, M., Fujii, Y., Ogura, A., Furukawa, K., Suzuki, A., & Nakajima, S. (1988). Inclined-epitaxy of β-SiC on Si(n11) substrates (n = 3, 4, 5, 6) by chemical vapor deposition. Journal of Crystal Growth, 93(1–4), 766–770.

Authors 6
  1. M. Shigeta (first)
  2. Y. Fujii (additional)
  3. A. Ogura (additional)
  4. K. Furukawa (additional)
  5. A. Suzuki (additional)
  6. S. Nakajima (additional)
References 11 Referenced 9
  1. 10.1063/1.93970 / Appl. Phys. Letters by Nishino (1983)
  2. 10.1016/0022-0248(84)90275-6 / J. Crystal Growth by Suzuki (1984)
  3. 10.1063/1.94973 / Appl. Phys. Letters by Sasaki (1984)
  4. 10.1063/1.96860 / Appl. Phys. Letters by Furukawa (1986)
  5. 10.1109/EDL.1986.26417 / IEEE Electron Device Letters by Kondo (1986)
  6. 10.1109/EDL.1987.26547 / IEEE Electron Device Letters by Furukawa (1987)
  7. 10.1109/EDL.1986.26522 / IEEE Electron Device Letters by Shibahara (1986)
  8. 10.1063/1.97661 / Appl. Phys. Letters by Nutt (1987)
  9. 10.1063/1.97676 / Appl. Phys. Letters by Shibahara (1987)
  10. 10.1063/1.97767 / Appl. Phys. Letters by Shigeta (1987)
  11. {'key': '10.1016/0022-0248(88)90617-3_BIB11', 'series-title': 'Proc. 1988 Spring Meeting of Materials Research Society', 'author': 'Fujii', 'year': '1988'} / Proc. 1988 Spring Meeting of Materials Research Society by Fujii (1988)
Dates
Type When
Created 22 years, 10 months ago (Oct. 16, 2002, 2:09 p.m.)
Deposited 6 years, 4 months ago (April 7, 2019, 8:27 p.m.)
Indexed 1 year, 6 months ago (Feb. 2, 2024, 7:38 p.m.)
Issued 37 years, 7 months ago (Jan. 1, 1988)
Published 37 years, 7 months ago (Jan. 1, 1988)
Published Print 37 years, 7 months ago (Jan. 1, 1988)
Funders 0

None

@article{Shigeta_1988, title={Inclined-epitaxy of β-SiC on Si(n11) substrates (n = 3, 4, 5, 6) by chemical vapor deposition}, volume={93}, ISSN={0022-0248}, url={http://dx.doi.org/10.1016/0022-0248(88)90617-3}, DOI={10.1016/0022-0248(88)90617-3}, number={1–4}, journal={Journal of Crystal Growth}, publisher={Elsevier BV}, author={Shigeta, M. and Fujii, Y. and Ogura, A. and Furukawa, K. and Suzuki, A. and Nakajima, S.}, year={1988}, pages={766–770} }