DOI: 10.1016/0022-0248(82)90474-2. Thermally induced microdefects in Czochralski-grown silicon crystals

Thermally induced microdefects in Czochralski-grown silicon crystals

10.1016/0022-0248(82)90474-2

Crossref journal-article

Elsevier BV

Journal of Crystal Growth (78)

Bibliography

Matsushita, Y. (1982). Thermally induced microdefects in Czochralski-grown silicon crystals. Journal of Crystal Growth, 56(2), 516â525.

Authors 1

Yoshiaki Matsushita (first)

References 20 Referenced 44

{'key': '10.1016/0022-0248(82)90474-2_BIB1', 'first-page': '670', 'volume': '1973', 'author': 'Varker', 'year': '1973'} by Varker (1973)
10.1063/1.89340 / Appl. Phys. Letters by Tan (1977)
10.1063/1.91998 / Appl. Phys. Letters by Nagasawa (1980)
10.1143/JJAP.19.L466 / Japan. J. Appl. Phys. by Kishino (1980)
10.1063/1.1728931 / J. Appl. Phys. by Patel (1962)
{'key': '10.1016/0022-0248(82)90474-2_BIB6', 'first-page': '554', 'article-title': 'Electrochem. Soc. Meeting', 'volume': '78-2', 'author': 'Aoki', 'year': '1978', 'journal-title': 'Ext. Abs.'} / Ext. Abs. / Electrochem. Soc. Meeting by Aoki (1978)
{'key': '10.1016/0022-0248(82)90474-2_BIB7', 'first-page': '25', 'article-title': 'Proc. 12th Conf. Solid State Devices', 'volume': '20', 'author': 'Takasu', 'year': '1981'} / Proc. 12th Conf. Solid State Devices by Takasu (1981)
10.1063/1.89200 / Appl. Phys. Letters by Freeland (1977)
{'key': '10.1016/0022-0248(82)90474-2_BIB9', 'first-page': '1358', 'article-title': 'Electrochem. Soc. Meeting', 'volume': '79-2', 'author': 'Inoue', 'year': '1979', 'journal-title': 'Ext. Abs.'} / Ext. Abs. / Electrochem. Soc. Meeting by Inoue (1979)
S. Kishino, Y. Matsushita, M. Kanamori and T. Iizuka, Japan. J. Appl. Phys., to be published.
{'key': '10.1016/0022-0248(82)90474-2_BIB11', 'first-page': '442', 'article-title': 'Silicon Device Processing', 'author': 'Patrick', 'year': '1970'} / Silicon Device Processing by Patrick (1970)
10.1016/0022-3697(65)90166-6 / J. Phys. Chem. Solids by Newman (1965)
10.1143/JJAP.19.L101 / Japan. J. Appl. Phys. by Matsushita (1980)
10.1063/1.89292 / Appl. Phys. Letters by Mahajan (1977)
{'key': '10.1016/0022-0248(82)90474-2_BIB15', 'series-title': 'Semiconductor Silicon 1977', 'first-page': '585', 'author': 'Tempelhoff', 'year': '1977'} / Semiconductor Silicon 1977 by Tempelhoff (1977)
10.1063/1.91098 / Appl. Phys. Letters by Kishino (1979)
{'key': '10.1016/0022-0248(82)90474-2_BIB17', 'first-page': '1097', 'article-title': 'Electrochem. Soc. Meeting', 'volume': '80-2', 'author': 'Ogino', 'year': '1980', 'journal-title': 'Ext. Abs.'} / Ext. Abs. / Electrochem. Soc. Meeting by Ogino (1980)
{'key': '10.1016/0022-0248(82)90474-2_BIB18', 'first-page': '1127', 'article-title': 'Electrochem. Soc. Meeting', 'volume': '80-2', 'author': 'Pinizzotto', 'year': '1980', 'journal-title': 'Ext. Abs.'} / Ext. Abs. / Electrochem. Soc. Meeting by Pinizzotto (1980)
{'key': '10.1016/0022-0248(82)90474-2_BIB19', 'series-title': 'Semiconductor Silicon 1981', 'first-page': '254', 'author': 'Craven', 'year': '1981'} / Semiconductor Silicon 1981 by Craven (1981)
{'key': '10.1016/0022-0248(82)90474-2_BIB20', 'series-title': 'Semiconductor Silicon 1981', 'first-page': '282', 'author': 'Inoue', 'year': '1981'} / Semiconductor Silicon 1981 by Inoue (1981)

Dates

Type	When
Created	22 years, 10 months ago (Oct. 16, 2002, 10:46 a.m.)
Deposited	6 years, 4 months ago (April 7, 2019, 2:56 p.m.)
Indexed	1 year, 6 months ago (Feb. 10, 2024, 5:23 a.m.)
Issued	43 years, 7 months ago (Jan. 1, 1982)
Published	43 years, 7 months ago (Jan. 1, 1982)
Published Print	43 years, 7 months ago (Jan. 1, 1982)

Funders 0

None

BibTeX

@article{Matsushita_1982, title={Thermally induced microdefects in Czochralski-grown silicon crystals}, volume={56}, ISSN={0022-0248}, url={http://dx.doi.org/10.1016/0022-0248(82)90474-2}, DOI={10.1016/0022-0248(82)90474-2}, number={2}, journal={Journal of Crystal Growth}, publisher={Elsevier BV}, author={Matsushita, Yoshiaki}, year={1982}, month=jan, pages={516–525} }

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