DOI: 10.1007/s11664-997-0072-1. Effect of dry etching on surface properties of III-nitrides

Effect of dry etching on surface properties of III-nitrides

10.1007/s11664-997-0072-1

Crossref journal-article

Springer Science and Business Media LLC

Journal of Electronic Materials (297)

Bibliography

Ren, F., Lothian, J. R., Pearton, S. J., Abernahty, C. R., Vartuli, C. B., Mackenzie, J. D., Wilson, R. G., & Karlicek, R. F. (1997). Effect of dry etching on surface properties of III-nitrides. Journal of Electronic Materials, 26(11), 1287â1291.

Authors 8

F. Ren (first)
J. R. Lothian (additional)
S. J. Pearton (additional)
C. R. Abernahty (additional)
C. B. Vartuli (additional)
J. D. Mackenzie (additional)
R. G. Wilson (additional)
R. F. Karlicek (additional)

References 15 Referenced 36

M.A. Khan, J.N. Kuznia, D.T. Olson, W. Schaff, J. Burm and M.S. Shur, Appl. Phys. Lett. 65, 1121 (1994). (10.1063/1.112116) / Appl. Phys. Lett. by M.A. Khan (1994)
S.C. Binari, L.B. Rowland, W. Kruppa, G. Kelner, K. Doverspike and D.K. Gaskill, Electron Lett. 30, 1248 (1994). (10.1049/el:19940833) / Electron Lett. by S.C. Binari (1994)
M.A. Khan, M.S. Shur, J.N. Kuznia, J. Burm and W. Schuff, Appl. Phys. Lett. 66, 1083 (1995). (10.1063/1.113579) / Appl. Phys. Lett. by M.A. Khan (1995)
M.A. Khan, Q. Chen, C.J. Sun, J.W. Wang, M. Blasingame, M.S. Shur and H. Park, ibid. 68, 514 (1996). (10.1063/1.116384) / Appl. Phys. Lett. by M.A. Khan (1996)
W. Kruppa, S.C. Binari and K. Doverspike, Electron. Lett. 31, 1951 (1995). (10.1049/el:19951298) / Electron. Lett. by W. Kruppa (1995)
S.C. Binari, L.B. Rowland, G. Kelner, W. Kruppa, H.B. Dietrich, K. Doverspike and D.K. Gaskill, Inst. Phys. Conf. Ser. 141, 459 (Bristol, U.K.: Inst. of Physics, 1995). / Inst. Phys. Conf. Ser. 141 by S.C. Binari (1995)
F. Ren, C.R. Abernathy, S.N.G. Chu, J.R. Lothian and S.J. Pearton, Appl. Phys. Lett. 66, 1503 (1995). (10.1063/1.113669) / Appl. Phys. Lett. by F. Ren (1995)
S. Strite, M.E. Lin and H. Morkoç, Thin Solid Films 231, 197 (1993). (10.1016/0040-6090(93)90713-Y) / Thin Solid Films by S. Strite (1993)
H. Morkoç, S. Strite, G.B. Bao, M.E. Lin, B. Sverdlov and M. Burns, J. Appl. Phys. 76, 1363 (1994). (10.1063/1.358463) / J. Appl. Phys. by H. Morkoç (1994)
C.R. Abernathy, J.D. MacKenzie, S.R. Bharatan, K.S. Jones and S.J. Pearton, Appl. Phys. Lett. 66, 1632 (1995). (10.1063/1.113875) / Appl. Phys. Lett. by C.R. Abernathy (1995)
M.E. Lin, Z.E. Fan, Z. Ma, L.H. Allen and H. Morkoç, ibid. 64, 887 (1994). (10.1063/1.110985) / Appl. Phys. Lett. by M.E. Lin (1994)
I. Adesida, A.T. Ping, C. Youtsey, T. Dow, M.A. Khan, D.T. Olson, and J.A. Kuznia, ibid. 65, 889 (1994). (10.1063/1.112191) / Appl. Phys. Lett. by I. Adesida (1994)
G.F. McLane, L. Casas, S.J. Pearton and C.R. Abernathy, ibid. 66, 3328 (1995). (10.1063/1.113746) / App. Phys. Lett. by G.F. McLane (1995)
R.J. Shul, S.R. Kilcoyne, M.H. Crawford, J.E. Parmeter, C.B. Vartuli, C.R. Abernathy and S.J. Pearton, ibid. 66, 1761 (1995). (10.1063/1.113359) / Appl. Phys. Lett. by R.J. Shul (1995)
S.J. Pearton, C.R. Abernathy and E. Ren, ibid. 64, 3643 (1994). (10.1063/1.111230) / Appl. Phys. Lett. by S.J. Pearton (1994)

Dates

Type	When
Created	18 years, 1 month ago (July 26, 2007, 2:33 a.m.)
Deposited	6 years, 3 months ago (June 1, 2019, 4:01 p.m.)
Indexed	1 year, 6 months ago (Feb. 10, 2024, 9:24 p.m.)
Issued	27 years, 10 months ago (Nov. 1, 1997)
Published	27 years, 10 months ago (Nov. 1, 1997)
Published Print	27 years, 10 months ago (Nov. 1, 1997)

Funders 0

None

BibTeX

@article{Ren_1997, title={Effect of dry etching on surface properties of III-nitrides}, volume={26}, ISSN={1543-186X}, url={http://dx.doi.org/10.1007/s11664-997-0072-1}, DOI={10.1007/s11664-997-0072-1}, number={11}, journal={Journal of Electronic Materials}, publisher={Springer Science and Business Media LLC}, author={Ren, F. and Lothian, J. R. and Pearton, S. J. and Abernahty, C. R. and Vartuli, C. B. and Mackenzie, J. D. and Wilson, R. G. and Karlicek, R. F.}, year={1997}, month=nov, pages={1287–1291} }

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