DOI: 10.1007/s11664-002-0169-5. Electron backscattering diffraction investigation of focused ion beam surfaces

Electron backscattering diffraction investigation of focused ion beam surfaces

10.1007/s11664-002-0169-5

Crossref journal-article

Springer Science and Business Media LLC

Journal of Electronic Materials (297)

Bibliography

Matteson, T. L., Schwarz, S. W., Houge, E. C., Kempshall, B. W., & Giannuzzi, L. A. (2002). Electron backscattering diffraction investigation of focused ion beam surfaces. Journal of Electronic Materials, 31(1), 33â39.

Authors 5

T. L. Matteson (first)
S. W. Schwarz (additional)
E. C. Houge (additional)
B. W. Kempshall (additional)
L. A. Giannuzzi (additional)

References 19 Referenced 76

David J. Dingley, Electron Backscatter Diffraction in Materials Science, ed. Adam J. Schwartz, Mukul Kumar, and Brent L. Adams (New York: Kluwer Academic/Plenum Publishers, 2000), pp. 1–16. (10.1007/978-1-4757-3205-4_1) / Electron Backscatter Diffraction in Materials Science by David J. Dingley (2000)
OIM Analysis for Windows, User Manual (TexSem Laboratories, Inc., Draper, UT, 1997), p. 5.
B.L. Adams, S.I. Wright, and K. Kunze, Metall. Trans. A 24A, 819 (1993). (10.1007/BF02656503) / Metall. Trans. A by B.L. Adams (1993)
Dale E. Newbury, David C. Joy, Patrick Echlin, Charles E. Fiori, and Joseph I. Goldstein, Advanced Scanning Electron Microscopy and X-Ray Microanalysis (New York: Plenum Press, 1986), p. 105. (10.1007/978-1-4757-9027-6) / Advanced Scanning Electron Microscopy and X-Ray Microanalysis by Dale E. Newbury (1986)
D.J. Dingley, Scanning Electron Microsc. 4, 273 (1981). / Scanning Electron Microsc. by D.J. Dingley (1981)
C.J. Harland, P. Akhter, and J.A. Venables, J. Phys. E 14, 175 (1981). (10.1088/0022-3735/14/2/011) / J. Phys. E by C.J. Harland (1981)
F.A. Stevie, C.B. Vartuli, L.A. Giannuzzi, T.L. Shofner, S.R. Brown, B. Rossie, F. Hillion, R.H. Mills, M. Antonell, R.B. Irwin, and B.M. Purcell, Surf. Interface Anal. 31, 345 (2001). (10.1002/sia.1063) / Surf. Interface Anal. by F.A. Stevie (2001)
M. Nastasi, J.W. Mayer, and J.K. Hirvonen, Ion-Solid Interactions: Fundamentals and Applications (New York: Cambridge University Press, 1996), pp. 354–355. (10.1017/CBO9780511565007) / Ion-Solid Interactions: Fundamentals and Applications by M. Nastasi (1996)
M. Nastasi, J.W. Mayer, and J.K. Hirvonen, Ion-Solid Interactions: Fundamentals and Applications (New York: Cambridge University Press, 1996) pp. 133–139. (10.1017/CBO9780511565007) / Ion-Solid Interactions: Fundamentals and Applications by M. Nastasi (1996)
David W. Susnitzky and Kevin D. Johnson, Microsc. Microanal. 4, 656 (1998). (10.1017/S1431927600023400) / Microsc. Microanal. by David W. Susnitzky (1998)
C.A. Urbanik, B.I. Prenitzer, L.A. Giannuzzi, S.R. Brown, T.L. Shofner, B. Rossie, R.B. Irwin, and F.A. Stevie, Microscopy & Microanalysis, Proc.: Microscopy & Microanalysis 99, vol. 5 (Microscopy Society of America, 1999), pp. 740–741. (10.1017/S1431927600017025) / Microscopy & Microanalysis by C.A. Urbanik (1999)
L.A. Giannuzzi and F.A. Stevie, Microscopy & Microanalysis, Proc.: Microscopy & Microanalysis 99, vol. 6, (Microscopy Society of America, 2000), pp. 508–509. (10.1017/S1431927600035030) / Microscopy & Microanalysis by L.A. Giannuzzi (2000)
L.A. Giannuzzi, J.L. Drown, S.R. Brown, R.B. Irwin, and F.A. Stevie, Workshop on Specimen Preparation for TEM of Materials IV, vol. 480, (Pittsburgh, PA: Materials Research Society, 1997), pp. 19–27. / Workshop on Specimen Preparation for TEM of Materials IV, vol. 480 by L.A. Giannuzzi (1997)
L.A. Giannuzzi, J.L. Drown, S.R. Brown, R.B. Irwin, F.A. Stevie, Microsc. Res. Techn. 41, 285 (1998). (10.1002/(SICI)1097-0029(19980515)41:4<285::AID-JEMT1>3.0.CO;2-Q) / Microsc. Res. Techn. by L.A. Giannuzzi (1998)
L.M. Gignac, K.P. Rodbell, C. Murray, and M.J. Gribelyuk (Paper presented at ASM 2000, St. Louis, MO, 2000).
J.F. Ziegler, Ion Beam Interactions With Matter: Introduction of SRIM, http://www.research.ibm.com/ionbeams/home.htm#Home:SRIM Manual (1998).
B.W. Kempshall, S.M. Schwarz, B.I. Prenitzer, L.A. Giannuzzi, and F.A. Stevie, J. Vac. Sci. Technol. B 19, 749 (2001). (10.1116/1.1368670) / J. Vac. Sci. Technol. B by B.W. Kempshall (2001)
Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, A.D. Romig, Jr., Charles E. Lyman, Charles Fiori, Charles, and Eric Lifshin, Scanning Electron Microscopy and X-Ray Microanalysis, 2nd ed. (New York: Plenum Press, 1992), pp. 76–89. (10.1007/978-1-4613-0491-3) / Scanning Electron Microscopy and X-Ray Microanalysis by Joseph I. Goldstein (1992)
R.J. Young, Microscopy & Microanalysis, Proc.: Microscopy & Microanalysis 99, vol. 6, (Microscopy Society of America, 2000), pp. 512–513. (10.1017/S1431927600035054) / Microscopy & Microanalysis by R.J. Young (2000)

Dates

Type	When
Created	18 years, 4 months ago (April 6, 2007, 3:49 p.m.)
Deposited	4 years ago (Aug. 12, 2021, 6:28 a.m.)
Indexed	23 minutes ago (Aug. 20, 2025, 11:16 p.m.)
Issued	23 years, 7 months ago (Jan. 1, 2002)
Published	23 years, 7 months ago (Jan. 1, 2002)
Published Print	23 years, 7 months ago (Jan. 1, 2002)

Funders 0

None

BibTeX

@article{Matteson_2002, title={Electron backscattering diffraction investigation of focused ion beam surfaces}, volume={31}, ISSN={1543-186X}, url={http://dx.doi.org/10.1007/s11664-002-0169-5}, DOI={10.1007/s11664-002-0169-5}, number={1}, journal={Journal of Electronic Materials}, publisher={Springer Science and Business Media LLC}, author={Matteson, T. L. and Schwarz, S. W. and Houge, E. C. and Kempshall, B. W. and Giannuzzi, L. A.}, year={2002}, month=jan, pages={33–39} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        8,
        21
      ]
    ],
    "date-time": "2025-08-21T03:16:57Z",
    "timestamp": 1755746217770
  },
  "reference-count": 19,
  "publisher": "Springer Science and Business Media LLC",
  "issue": "1",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            2002,
            1,
            1
          ]
        ],
        "date-time": "2002-01-01T00:00:00Z",
        "timestamp": 1009843200000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "http://www.springer.com/tdm"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        2002,
        1
      ]
    ]
  },
  "DOI": "10.1007/s11664-002-0169-5",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2007,
        4,
        6
      ]
    ],
    "date-time": "2007-04-06T19:49:05Z",
    "timestamp": 1175888945000
  },
  "page": "33-39",
  "source": "Crossref",
  "is-referenced-by-count": 76,
  "title": "Electron backscattering diffraction investigation of focused ion beam surfaces",
  "prefix": "10.1007",
  "volume": "31",
  "author": [
    {
      "given": "T. L.",
      "family": "Matteson",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "S. W.",
      "family": "Schwarz",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "E. C.",
      "family": "Houge",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "B. W.",
      "family": "Kempshall",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "L. A.",
      "family": "Giannuzzi",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "297",
  "reference": [
    {
      "key": "169_CR1",
      "doi-asserted-by": "crossref",
      "first-page": "1",
      "DOI": "10.1007/978-1-4757-3205-4_1",
      "volume-title": "Electron Backscatter Diffraction in Materials Science",
      "author": "David J. Dingley",
      "year": "2000",
      "unstructured": "David J. Dingley, Electron Backscatter Diffraction in Materials Science, ed. Adam J. Schwartz, Mukul Kumar, and Brent L. Adams (New York: Kluwer Academic/Plenum Publishers, 2000), pp. 1\u201316."
    },
    {
      "key": "169_CR2",
      "unstructured": "OIM Analysis for Windows, User Manual (TexSem Laboratories, Inc., Draper, UT, 1997), p. 5."
    },
    {
      "key": "169_CR3",
      "doi-asserted-by": "crossref",
      "first-page": "819",
      "DOI": "10.1007/BF02656503",
      "volume": "24A",
      "author": "B.L. Adams",
      "year": "1993",
      "unstructured": "B.L. Adams, S.I. Wright, and K. Kunze, Metall. Trans. A 24A, 819 (1993).",
      "journal-title": "Metall. Trans. A"
    },
    {
      "key": "169_CR4",
      "doi-asserted-by": "crossref",
      "first-page": "105",
      "DOI": "10.1007/978-1-4757-9027-6",
      "volume-title": "Advanced Scanning Electron Microscopy and X-Ray Microanalysis",
      "author": "Dale E. Newbury",
      "year": "1986",
      "unstructured": "Dale E. Newbury, David C. Joy, Patrick Echlin, Charles E. Fiori, and Joseph I. Goldstein, Advanced Scanning Electron Microscopy and X-Ray Microanalysis (New York: Plenum Press, 1986), p. 105."
    },
    {
      "key": "169_CR5",
      "first-page": "273",
      "volume": "4",
      "author": "D.J. Dingley",
      "year": "1981",
      "unstructured": "D.J. Dingley, Scanning Electron Microsc. 4, 273 (1981).",
      "journal-title": "Scanning Electron Microsc."
    },
    {
      "key": "169_CR6",
      "doi-asserted-by": "crossref",
      "first-page": "175",
      "DOI": "10.1088/0022-3735/14/2/011",
      "volume": "14",
      "author": "C.J. Harland",
      "year": "1981",
      "unstructured": "C.J. Harland, P. Akhter, and J.A. Venables, J. Phys. E 14, 175 (1981).",
      "journal-title": "J. Phys. E"
    },
    {
      "key": "169_CR7",
      "doi-asserted-by": "crossref",
      "first-page": "345",
      "DOI": "10.1002/sia.1063",
      "volume": "31",
      "author": "F.A. Stevie",
      "year": "2001",
      "unstructured": "F.A. Stevie, C.B. Vartuli, L.A. Giannuzzi, T.L. Shofner, S.R. Brown, B. Rossie, F. Hillion, R.H. Mills, M. Antonell, R.B. Irwin, and B.M. Purcell, Surf. Interface Anal. 31, 345 (2001).",
      "journal-title": "Surf. Interface Anal."
    },
    {
      "key": "169_CR8",
      "doi-asserted-by": "crossref",
      "first-page": "354",
      "DOI": "10.1017/CBO9780511565007",
      "volume-title": "Ion-Solid Interactions: Fundamentals and Applications",
      "author": "M. Nastasi",
      "year": "1996",
      "unstructured": "M. Nastasi, J.W. Mayer, and J.K. Hirvonen, Ion-Solid Interactions: Fundamentals and Applications (New York: Cambridge University Press, 1996), pp. 354\u2013355."
    },
    {
      "key": "169_CR9",
      "doi-asserted-by": "crossref",
      "first-page": "133",
      "DOI": "10.1017/CBO9780511565007",
      "volume-title": "Ion-Solid Interactions: Fundamentals and Applications",
      "author": "M. Nastasi",
      "year": "1996",
      "unstructured": "M. Nastasi, J.W. Mayer, and J.K. Hirvonen, Ion-Solid Interactions: Fundamentals and Applications (New York: Cambridge University Press, 1996) pp. 133\u2013139."
    },
    {
      "key": "169_CR10",
      "doi-asserted-by": "crossref",
      "first-page": "656",
      "DOI": "10.1017/S1431927600023400",
      "volume": "4",
      "author": "David W. Susnitzky",
      "year": "1998",
      "unstructured": "David W. Susnitzky and Kevin D. Johnson, Microsc. Microanal. 4, 656 (1998).",
      "journal-title": "Microsc. Microanal."
    },
    {
      "key": "169_CR11",
      "doi-asserted-by": "crossref",
      "first-page": "740",
      "DOI": "10.1017/S1431927600017025",
      "volume": "5",
      "author": "C.A. Urbanik",
      "year": "1999",
      "unstructured": "C.A. Urbanik, B.I. Prenitzer, L.A. Giannuzzi, S.R. Brown, T.L. Shofner, B. Rossie, R.B. Irwin, and F.A. Stevie, Microscopy & Microanalysis, Proc.: Microscopy & Microanalysis 99, vol. 5 (Microscopy Society of America, 1999), pp. 740\u2013741.",
      "journal-title": "Microscopy & Microanalysis"
    },
    {
      "key": "169_CR12",
      "doi-asserted-by": "crossref",
      "first-page": "508",
      "DOI": "10.1017/S1431927600035030",
      "volume": "6",
      "author": "L.A. Giannuzzi",
      "year": "2000",
      "unstructured": "L.A. Giannuzzi and F.A. Stevie, Microscopy & Microanalysis, Proc.: Microscopy & Microanalysis 99, vol. 6, (Microscopy Society of America, 2000), pp. 508\u2013509.",
      "journal-title": "Microscopy & Microanalysis"
    },
    {
      "key": "169_CR13",
      "first-page": "19",
      "volume-title": "Workshop on Specimen Preparation for TEM of Materials IV, vol. 480",
      "author": "L.A. Giannuzzi",
      "year": "1997",
      "unstructured": "L.A. Giannuzzi, J.L. Drown, S.R. Brown, R.B. Irwin, and F.A. Stevie, Workshop on Specimen Preparation for TEM of Materials IV, vol. 480, (Pittsburgh, PA: Materials Research Society, 1997), pp. 19\u201327."
    },
    {
      "key": "169_CR14",
      "doi-asserted-by": "crossref",
      "first-page": "285",
      "DOI": "10.1002/(SICI)1097-0029(19980515)41:4<285::AID-JEMT1>3.0.CO;2-Q",
      "volume": "41",
      "author": "L.A. Giannuzzi",
      "year": "1998",
      "unstructured": "L.A. Giannuzzi, J.L. Drown, S.R. Brown, R.B. Irwin, F.A. Stevie, Microsc. Res. Techn. 41, 285 (1998).",
      "journal-title": "Microsc. Res. Techn."
    },
    {
      "key": "169_CR15",
      "unstructured": "L.M. Gignac, K.P. Rodbell, C. Murray, and M.J. Gribelyuk (Paper presented at ASM 2000, St. Louis, MO, 2000)."
    },
    {
      "key": "169_CR16",
      "unstructured": "J.F. Ziegler, Ion Beam Interactions With Matter: Introduction of SRIM, http://www.research.ibm.com/ionbeams/home.htm#Home:SRIM Manual (1998)."
    },
    {
      "key": "169_CR17",
      "doi-asserted-by": "crossref",
      "first-page": "749",
      "DOI": "10.1116/1.1368670",
      "volume": "19",
      "author": "B.W. Kempshall",
      "year": "2001",
      "unstructured": "B.W. Kempshall, S.M. Schwarz, B.I. Prenitzer, L.A. Giannuzzi, and F.A. Stevie, J. Vac. Sci. Technol. B 19, 749 (2001).",
      "journal-title": "J. Vac. Sci. Technol. B"
    },
    {
      "key": "169_CR18",
      "doi-asserted-by": "crossref",
      "first-page": "76",
      "DOI": "10.1007/978-1-4613-0491-3",
      "volume-title": "Scanning Electron Microscopy and X-Ray Microanalysis",
      "author": "Joseph I. Goldstein",
      "year": "1992",
      "unstructured": "Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, A.D. Romig, Jr., Charles E. Lyman, Charles Fiori, Charles, and Eric Lifshin, Scanning Electron Microscopy and X-Ray Microanalysis, 2nd ed. (New York: Plenum Press, 1992), pp. 76\u201389.",
      "edition": "2nd ed."
    },
    {
      "key": "169_CR19",
      "doi-asserted-by": "crossref",
      "first-page": "512",
      "DOI": "10.1017/S1431927600035054",
      "volume": "6",
      "author": "R.J. Young",
      "year": "2000",
      "unstructured": "R.J. Young, Microscopy & Microanalysis, Proc.: Microscopy & Microanalysis 99, vol. 6, (Microscopy Society of America, 2000), pp. 512\u2013513.",
      "journal-title": "Microscopy & Microanalysis"
    }
  ],
  "container-title": "Journal of Electronic Materials",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "http://link.springer.com/content/pdf/10.1007/s11664-002-0169-5.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "http://link.springer.com/article/10.1007/s11664-002-0169-5/fulltext.html",
      "content-type": "text/html",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "http://link.springer.com/content/pdf/10.1007/s11664-002-0169-5",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2021,
        8,
        12
      ]
    ],
    "date-time": "2021-08-12T10:28:52Z",
    "timestamp": 1628764132000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "http://link.springer.com/10.1007/s11664-002-0169-5"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2002,
        1
      ]
    ]
  },
  "references-count": 19,
  "journal-issue": {
    "issue": "1",
    "published-print": {
      "date-parts": [
        [
          2002,
          1
        ]
      ]
    }
  },
  "alternative-id": [
    "169"
  ],
  "URL": "http://dx.doi.org/10.1007/s11664-002-0169-5",
  "relation": {},
  "ISSN": [
    "0361-5235",
    "1543-186X"
  ],
  "subject": [],
  "container-title-short": "Journal of Elec Materi",
  "published": {
    "date-parts": [
      [
        2002,
        1
      ]
    ]
  }
}