DOI: 10.1007/s11661-002-0116-3. Microstructural and mechanical properties investigation of electrodeposited and annealed LIGA nickel structures

Microstructural and mechanical properties investigation of electrodeposited and annealed LIGA nickel structures

10.1007/s11661-002-0116-3

Crossref journal-article

Springer Science and Business Media LLC

Metallurgical and Materials Transactions A (297)

Bibliography

Buchheit, T. E., Michael, J. R., Christenson, T. R., LaVan, D. A., & Leith, S. D. (2002). Microstructural and mechanical properties investigation of electrodeposited and annealed LIGA nickel structures. Metallurgical and Materials Transactions A, 33(3), 539â554.

Authors 5

Thomas E. Buchheit (first)
Joseph R. Michael (additional)
Todd R. Christenson (additional)
David A. LaVan (additional)
Steven D. Leith (additional)

References 37 Referenced 99

E.W. Becker, W. Ehrfeld, P. Hagmann, A. Maner, and D. Munchmeyer: Microelectr. Eng., 1986, vol. 4, pp. 35–56. (10.1016/0167-9317(86)90004-3) / Microelectr. Eng. by E.W. Becker (1986)
W. Bacher, W. Menz, and J. Mohr: IEEE Trans. Ind. Electr., 1995, vol. 42 (5), pp. 431–41. (10.1109/41.464604) / IEEE Trans. Ind. Electr. by W. Bacher (1995)
J. Mohr: Sensors Materials, 1998, vol. 10 (6), pp. 363–73. / Sensors Materials by J. Mohr (1998)
M. Polosky, T.R. Christenson, A.A. Jojola, and D.W. Plummer: Book of Abstracts, 3rd Int. Workshop on High Aspect Ratio Microstructure Technology (HARMST ’99). Kisarazu, Japan, 1999, pp. 144–45. / Book of Abstracts by M. Polosky (1999)
T.R. Christenson, T.E. Buchheit, and D.T. Schmale: Materials Science of Microelectromechanical Systems (MEMS) Devices, Materials Research Society Symposia Proceedings, Materials Research Society, Pittsburgh, PA, 1999, vol. 546, pp. 127–31. / Materials Science of Microelectromechanical Systems (MEMS) Devices by T.R. Christenson (1999)
T.R. Christenson and H. Guckel: Micromachining and Microfabrication Technology, SPIE Proc., 1995, vol. 2639, pp. 134–45. (10.1117/12.221271) / Micromachining and Microfabrication Technology by T.R. Christenson (1995)
T.E. Buchheit, T.R. Christenson, D.T. Schmale, and D.A. LaVan: Materials Science of Microelectromechanical Systems Devices, Materials Research Society Symposia Proceedings, Materials Research Society, Pittsburgh, PA, 1998, vol. 546, pp. 121–26. / Materials Research Society Symposia Proceedings by T.E. Buchheit (1998)
V. Landa, J. Vitek, and J. Neumann: Plating Surface Finishing, 1987, vol. 68, pp. 128–33. / Plating Surface Finishing by V. Landa (1987)
W.H. Safranek: The Properties of Electrodeposited Metals and Alloys, A Handbook, 2nd ed., American Electroplaters Society, Orlando, FL, 1986. / The Properties of Electrodeposited Metals and Alloys, A Handbook by W.H. Safranek (1986)
S.D. Leith and D.T. Schwartz: J. Microelectromech. Sys., 1999, vol. 8 (4), pp. 384–92. (10.1109/84.809052) / J. Microelectromech. Sys. by S.D. Leith (1999)
J.W. Dini: Electrodeposition, The Materials Science of Coatings and Substrates, Noyes Publications, Park Ridge, NJ, 1993. / Electrodeposition, The Materials Science of Coatings and Substrates by J.W. Dini (1993)
J. Amblard, I. Epelboin, M. Froment, and G. Maurin: J. Appl. Electrochem., 1979, vol. 9, pp. 233–42. (10.1007/BF00616093) / J. Appl. Electrochem. by J. Amblard (1979)
C. Kollia, N. Spryrellis, J. Amblard, M. Froment, and G. Maurin: J. Appl. Electrochem., 1990, vol. 20, pp. 1025–32. (10.1007/BF01019584) / J. Appl. Electrochem. by C. Kollia (1990)
C. Bergenstef-Nielsen, A. Horsewell, and M.T.L. Ostergard: J. Appl. Electrochem., 1997, vol. 27, pp. 839–45. (10.1023/A:1018429013660) / J. Appl. Electrochem. by C. Bergenstef-Nielsen (1997)
C.B. Sanborn: Symp. on Electrodeposited Metals as Materials for Selected Applications, MCIC-72-05, AFSC, Wright-Patterson AFB, OH, 1972, pp. 65–81. / Symp. on Electrodeposited Metals as Materials for Selected Applications by C.B. Sanborn (1972)
Metals Handbook: Desk Edition, H.E. Boyer and T.L. Gall, eds., ASM, Metals Park, OH, 1985, ch. 15. / Metals Handbook: Desk Edition (1985)
R. Weil: Ann. Rev. Mater. Sci., 1989, vol. 19, pp. 165–82. (10.1146/annurev.matsci.19.1.165) / Ann. Rev. Mater. Sci. by R. Weil (1989)
S.W. Banovic, K. Barmak, and A.R. Marder: J. Mater. Sci., 1998, vol. 33, pp. 639–43. (10.1023/A:1004321224586) / J. Mater. Sci. by S.W. Banovic (1998)
H.R. Johnson, J.W. Dini, and R.E. Stoltz: Plating Surf. Finishing, 1979, vol. 66, pp. 57–62. / Plating Surf. Finishing by H.R. Johnson (1979)
T. Tsuchiya, O. Tabata, J. Sakata, and Y. Taga: IEEE Proc. 10th Annual Int. Workshop on Microelectromechanical Systems, Nagoya, Japan, 1997, IEEE Society, Piscataway, NJ, pp. 529–34.
W.N. Sharpe, B. Yuan, R. Vaidyanathan, and R.L. Edwards: IEEE Proc. 10th Annual Int. Workshop on Microelectromechanical Systems, 1997, pp. 424–29. (10.1109/MEMSYS.1997.581881)
W.N. Sharpe, D.L. LaVan, and R.L. Edwards: Int. Conf. on Solid-State Sensors and Actuators, Chicago, IL, 1997, pp. 607–10.
S. Greek and F. Ericson: Mater Res. Soc. Symp. Proc., 1998, vol. 518, pp. 51–56. (10.1557/PROC-518-51) / Mater Res. Soc. Symp. Proc. by S. Greek (1998)
D.A. LaVan and T.E. Buchheit: Materials Science of Microelectromechanical System (MEMS) Devices, Materials Research Society Symposia Proceedings, Materials Research Society, Pittsburgh, PA, 1999, vol. 546, 1999, p. 121. / Materials Research Society Symposia Proceedings by D.A. LaVan (1999)
T.R. Christenson, T.E. Buchheit, D.T. Schmale, and R.J. Bourcier: Microelectromechanical Structures for Materials Research, Materials Research Society Symposia Proceedings, Materials Research Society, Pittsburgh, PA, 1998, vol. 518, pp. 185–90. / Materials Research Society Symposia Proceedings by T.R. Christenson (1998)
B.E. Jacobson and J.W. Sliwa: Plating Surf. Finishing, 1979, vol. 60 (9), pp. 42–47. / Plating Surf. Finishing by B.E. Jacobson (1979)
Electron Backscatter Diffraction in Materials Science, A.J. Schwartz, M. Kumar, and B.L. Adams, eds., Kluwer/Academic Press, New York, NY, 2000. / Electron Backscatter Diffraction in Materials Science (2000)
H.R. Last, R. Witt, and K.J. Hemker: Microelectromechanical Structures for Materials Research, Materials Research Society Symposia Proceedings, Materials Research Society, Pittsburgh, PA, vol. 605, 2002, pp. 197–202. / Materials Research Society Symposia Proceedings by H.R. Last (2002)
J. Don and S. Majundar: Acta Metall., vol. 34, p. 961, 1986. (10.1016/0001-6160(86)90069-6) / Acta Metall. by J. Don (1986)
G. Palumbo, K.T. Aust, U. Erb, P.J. King, A.M. Brennenstohl, and P.C. Lichtenberger: Phys. Status Solidi (a), vol. 131, 1992, pp. 425–8. (10.1002/pssa.2211310216) / Phys. Status Solidi (a) by G. Palumbo (1992)
V.Y. Gertsmann, K. Tangri, and R.Z. Valiev: Acta Metall. Mater., 1994, vol. 42 (6), pp. 1785–1804. (10.1016/0956-7151(94)90004-3) / Acta Metall. Mater. by V.Y. Gertsmann (1994)
C.K. Malek, H.M. Manohara, and V. Saile: Microsys. Technol., 1997, vol. 4 (1), pp. 2–6. (10.1007/s005420050081) / Microsys. Technol. by C.K. Malek (1997)
J.M. Hruby, M.A. Bankert, T.E. Bennett, D.R. Boehme, W.D. Bonivert, S.K. Griffiths, J.T. Hachman, J. Krafcik, Jr., A. Morales, and A. Ting: 3rd Int. Workshop for High Aspect Ratio Microstructures (HARMST), Kisarazu, Japan, 1999, pp. 46–47.
D.T. Schmale, R.J. Bourcier, and T.E. Buchheit: “Description of a Micro-mechanical Testing System” Report No. SAND-97-1608 Sandia National Laboratories, Albuquerque, NM, 1997. (10.2172/515567) / Description of a Micro-mechanical Testing System by D.T. Schmale (1997)
Keyence Corp. www.keyence.com.
S.D. Leith and D.T. Schwartz: J. Microelectromech. Sys., 1999, vol. 8 (4), pp. 384–92. (10.1109/84.809052) / J. Microelectromech. Sys. by S.D. Leith (1999)
V.Y. Gertsmann, A.P. Zhilyeav, A.I. Pshenichnyuk, and R.Z. Valiev: Acta Metall., 1991, vol. 40, (6), pp. 1433–41. (10.1016/0956-7151(92)90445-K) / Acta Metall. by V.Y. Gertsmann (1991)

Dates

Type	When
Created	18 years, 4 months ago (April 17, 2007, 3:40 a.m.)
Deposited	7 months ago (Jan. 15, 2025, 3:24 p.m.)
Indexed	1 day, 19 hours ago (Aug. 19, 2025, 5:56 a.m.)
Issued	23 years, 5 months ago (March 1, 2002)
Published	23 years, 5 months ago (March 1, 2002)
Published Print	23 years, 5 months ago (March 1, 2002)

Funders 0

None

BibTeX

@article{Buchheit_2002, title={Microstructural and mechanical properties investigation of electrodeposited and annealed LIGA nickel structures}, volume={33}, ISSN={1543-1940}, url={http://dx.doi.org/10.1007/s11661-002-0116-3}, DOI={10.1007/s11661-002-0116-3}, number={3}, journal={Metallurgical and Materials Transactions A}, publisher={Springer Science and Business Media LLC}, author={Buchheit, Thomas E. and Michael, Joseph R. and Christenson, Todd R. and LaVan, David A. and Leith, Steven D.}, year={2002}, month=mar, pages={539–554} }

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