DOI: 10.1007/s10853-006-6567-y. Strength and sharp contact fracture of silicon

Strength and sharp contact fracture of silicon

10.1007/s10853-006-6567-y

Crossref journal-article

Springer Science and Business Media LLC

Journal of Materials Science (297)

Bibliography

Cook, R. F. (2006). Strength and sharp contact fracture of silicon. Journal of Materials Science, 41(3), 841â872.

Authors 1

R. F. Cook (first)

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Dates

Type	When
Created	19 years, 5 months ago (Feb. 22, 2006, 3:52 a.m.)
Deposited	2 years, 3 months ago (May 6, 2023, 11:13 a.m.)
Indexed	2 weeks, 1 day ago (Aug. 5, 2025, 8:57 a.m.)
Issued	19 years, 6 months ago (Feb. 1, 2006)
Published	19 years, 6 months ago (Feb. 1, 2006)
Published Print	19 years, 6 months ago (Feb. 1, 2006)

Funders 0

None

BibTeX

@article{Cook_2006, title={Strength and sharp contact fracture of silicon}, volume={41}, ISSN={1573-4803}, url={http://dx.doi.org/10.1007/s10853-006-6567-y}, DOI={10.1007/s10853-006-6567-y}, number={3}, journal={Journal of Materials Science}, publisher={Springer Science and Business Media LLC}, author={Cook, R. F.}, year={2006}, month=feb, pages={841–872} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        8,
        5
      ]
    ],
    "date-time": "2025-08-05T12:57:21Z",
    "timestamp": 1754398641205
  },
  "reference-count": 139,
  "publisher": "Springer Science and Business Media LLC",
  "issue": "3",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            2006,
            2,
            1
          ]
        ],
        "date-time": "2006-02-01T00:00:00Z",
        "timestamp": 1138752000000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "http://www.springer.com/tdm"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        2006,
        2
      ]
    ]
  },
  "DOI": "10.1007/s10853-006-6567-y",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2006,
        2,
        22
      ]
    ],
    "date-time": "2006-02-22T08:52:27Z",
    "timestamp": 1140598347000
  },
  "page": "841-872",
  "source": "Crossref",
  "is-referenced-by-count": 177,
  "title": "Strength and sharp contact fracture of silicon",
  "prefix": "10.1007",
  "volume": "41",
  "author": [
    {
      "given": "R. F.",
      "family": "Cook",
      "sequence": "first",
      "affiliation": []
    }
  ],
  "member": "297",
  "reference": [
    {
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      "author": "A. KELLY",
      "year": "1970",
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      "unstructured": "J. F. NYE, \u201cPhysical Properties of Crystals\u201d (Oxford University Press, Oxford, 1979)"
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    },
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    }
  ],
  "container-title": "Journal of Materials Science",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "http://link.springer.com/content/pdf/10.1007/s10853-006-6567-y.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "http://link.springer.com/article/10.1007/s10853-006-6567-y/fulltext.html",
      "content-type": "text/html",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "http://link.springer.com/content/pdf/10.1007/s10853-006-6567-y",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2023,
        5,
        6
      ]
    ],
    "date-time": "2023-05-06T15:13:45Z",
    "timestamp": 1683386025000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "http://link.springer.com/10.1007/s10853-006-6567-y"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2006,
        2
      ]
    ]
  },
  "references-count": 139,
  "journal-issue": {
    "issue": "3",
    "published-print": {
      "date-parts": [
        [
          2006,
          2
        ]
      ]
    }
  },
  "alternative-id": [
    "6567"
  ],
  "URL": "http://dx.doi.org/10.1007/s10853-006-6567-y",
  "relation": {},
  "ISSN": [
    "0022-2461",
    "1573-4803"
  ],
  "subject": [],
  "container-title-short": "J Mater Sci",
  "published": {
    "date-parts": [
      [
        2006,
        2
      ]
    ]
  }
}