DOI: 10.1007/s00706-012-0730-8. Correlation of surface roughness and surface energy of silicon-based materials with their priming reactivity

Correlation of surface roughness and surface energy of silicon-based materials with their priming reactivity

10.1007/s00706-012-0730-8

Crossref journal-article

Springer Science and Business Media LLC

Monatshefte für Chemie - Chemical Monthly (297)

Bibliography

Bodner, T., Behrendt, A., Prax, E., & Wiesbrock, F. (2012). Correlation of surface roughness and surface energy of silicon-based materials with their priming reactivity. Monatshefte FÃ¼r Chemie - Chemical Monthly, 143(5), 717â722.

Authors 4

Thomas Bodner (first)
Andreas Behrendt (additional)
Emil Prax (additional)
Frank Wiesbrock (additional)

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Dates

Type	When
Created	13 years, 6 months ago (Feb. 15, 2012, 10:18 a.m.)
Deposited	6 years, 2 months ago (May 29, 2019, 1:14 a.m.)
Indexed	3 weeks ago (July 30, 2025, 11:29 a.m.)
Issued	13 years, 6 months ago (Feb. 16, 2012)
Published	13 years, 6 months ago (Feb. 16, 2012)
Published Online	13 years, 6 months ago (Feb. 16, 2012)
Published Print	13 years, 3 months ago (May 1, 2012)

Funders 0

None

BibTeX

@article{Bodner_2012, title={Correlation of surface roughness and surface energy of silicon-based materials with their priming reactivity}, volume={143}, ISSN={1434-4475}, url={http://dx.doi.org/10.1007/s00706-012-0730-8}, DOI={10.1007/s00706-012-0730-8}, number={5}, journal={Monatshefte für Chemie - Chemical Monthly}, publisher={Springer Science and Business Media LLC}, author={Bodner, Thomas and Behrendt, Andreas and Prax, Emil and Wiesbrock, Frank}, year={2012}, month=feb, pages={717–722} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        7,
        30
      ]
    ],
    "date-time": "2025-07-30T15:29:19Z",
    "timestamp": 1753889359998
  },
  "reference-count": 38,
  "publisher": "Springer Science and Business Media LLC",
  "issue": "5",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            2012,
            2,
            16
          ]
        ],
        "date-time": "2012-02-16T00:00:00Z",
        "timestamp": 1329350400000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "http://www.springer.com/tdm"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        2012,
        5
      ]
    ]
  },
  "DOI": "10.1007/s00706-012-0730-8",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2012,
        2,
        15
      ]
    ],
    "date-time": "2012-02-15T15:18:07Z",
    "timestamp": 1329319087000
  },
  "page": "717-722",
  "source": "Crossref",
  "is-referenced-by-count": 20,
  "title": "Correlation of surface roughness and surface energy of silicon-based materials with their priming reactivity",
  "prefix": "10.1007",
  "volume": "143",
  "author": [
    {
      "given": "Thomas",
      "family": "Bodner",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "Andreas",
      "family": "Behrendt",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Emil",
      "family": "Prax",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Frank",
      "family": "Wiesbrock",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "297",
  "published-online": {
    "date-parts": [
      [
        2012,
        2,
        16
      ]
    ]
  },
  "reference": [
    {
      "key": "730_CR1",
      "doi-asserted-by": "crossref",
      "first-page": "8",
      "DOI": "10.1109/MSP.2011.941136",
      "volume": "28",
      "author": "R Schneiderman",
      "year": "2011",
      "unstructured": "Schneiderman R (2011) IEEE Signal Process Mag 28:8",
      "journal-title": "IEEE Signal Process Mag"
    },
    {
      "key": "730_CR2",
      "volume-title": "Introduction to microfabrication",
      "author": "S Franssila",
      "year": "2004",
      "unstructured": "Franssila S (2004) Introduction to microfabrication. Wiley, Chichester"
    },
    {
      "key": "730_CR3",
      "doi-asserted-by": "crossref",
      "first-page": "2105",
      "DOI": "10.1039/b810329a",
      "volume": "8",
      "author": "N Li",
      "year": "2008",
      "unstructured": "Li N, Ho C-M (2008) Lab Chip 8:2105",
      "journal-title": "Lab Chip"
    },
    {
      "key": "730_CR4",
      "doi-asserted-by": "crossref",
      "first-page": "58",
      "DOI": "10.1016/S0167-7799(99)01412-2",
      "volume": "18",
      "author": "E Sackmann",
      "year": "2000",
      "unstructured": "Sackmann E, Tanaka M (2000) Trends Biotechnol 18:58",
      "journal-title": "Trends Biotechnol"
    },
    {
      "key": "730_CR5",
      "doi-asserted-by": "crossref",
      "first-page": "4908",
      "DOI": "10.1021/la0112559",
      "volume": "18",
      "author": "F Rehfeldt",
      "year": "2002",
      "unstructured": "Rehfeldt F, Tanaka M, Pagnoni L, Jordan R (2002) Langmuir 18:4908",
      "journal-title": "Langmuir"
    },
    {
      "key": "730_CR6",
      "volume-title": "Handbook of adhesive technology",
      "author": "J Schultz",
      "year": "2003",
      "unstructured": "Schultz J, Nardin M (2003) Theories and mechanisms of adhesion. In: Pizzi A, Mittal KL (eds) Handbook of adhesive technology, 2nd edn. Marcel Dekker Inc, New York",
      "edition": "2"
    },
    {
      "key": "730_CR7",
      "doi-asserted-by": "crossref",
      "first-page": "301",
      "DOI": "10.1038/nmat856",
      "volume": "2",
      "author": "R Blossey",
      "year": "2003",
      "unstructured": "Blossey R (2003) Nat Mater 2:301",
      "journal-title": "Nat Mater"
    },
    {
      "key": "730_CR8",
      "doi-asserted-by": "crossref",
      "first-page": "034004",
      "DOI": "10.1088/0022-3727/44/3/034004",
      "volume": "44",
      "author": "VK Khanna",
      "year": "2011",
      "unstructured": "Khanna VK (2011) J Phys D Appl Phys 44:034004",
      "journal-title": "J Phys D Appl Phys"
    },
    {
      "key": "730_CR9",
      "doi-asserted-by": "crossref",
      "first-page": "034011",
      "DOI": "10.1088/0022-3727/44/3/034011",
      "volume": "44",
      "author": "L Petersson",
      "year": "2011",
      "unstructured": "Petersson L, Meier P, Kornmann X, Hillborg H (2011) J Phys D Appl Phys 44:034011",
      "journal-title": "J Phys D Appl Phys"
    },
    {
      "key": "730_CR10",
      "doi-asserted-by": "crossref",
      "first-page": "99",
      "DOI": "10.1002/(SICI)1097-4636(199707)36:1<99::AID-JBM12>3.0.CO;2-E",
      "volume": "36",
      "author": "M Lampin",
      "year": "1997",
      "unstructured": "Lampin M, Warocquier-Clerout R, Legris C, Degrange M, Sigot-Luizard MF (1997) J Biomed Mater Res Part A 36:99",
      "journal-title": "J Biomed Mater Res Part A"
    },
    {
      "key": "730_CR11",
      "first-page": "47",
      "volume-title": "Handbook of semiconductor wafer cleaning technology",
      "author": "W Kern",
      "year": "2008",
      "unstructured": "Kern W (2008) Evolution of wafer cleaning science and technology. In: Kern W, Reinhardt KA (eds) Handbook of semiconductor wafer cleaning technology, 2nd edn. William Andrew Inc, Norwich, p 47",
      "edition": "2"
    },
    {
      "key": "730_CR12",
      "first-page": "187",
      "volume": "31",
      "author": "W Kern",
      "year": "1970",
      "unstructured": "Kern W, Puotinen DA (1970) RCA Rev 31:187",
      "journal-title": "RCA Rev"
    },
    {
      "key": "730_CR13",
      "doi-asserted-by": "crossref",
      "first-page": "601",
      "DOI": "10.2494/photopolymer.19.601",
      "volume": "19",
      "author": "M Sato",
      "year": "2006",
      "unstructured": "Sato M, Kawai A (2006) J Photopolym Sci Tec 19:601",
      "journal-title": "J Photopolym Sci Tec"
    },
    {
      "key": "730_CR14",
      "doi-asserted-by": "crossref",
      "first-page": "463",
      "DOI": "10.1116/1.585045",
      "volume": "8",
      "author": "JJ Ponje\u00e9",
      "year": "1990",
      "unstructured": "Ponje\u00e9 JJ, Mariott VB, Michielsen MCBA, Touwslager FJ, van Velzen PNT, van der Wel H (1990) J Vac Sci Technol B 8:463",
      "journal-title": "J Vac Sci Technol B"
    },
    {
      "key": "730_CR15",
      "doi-asserted-by": "crossref",
      "first-page": "2485",
      "DOI": "10.1116/1.588757",
      "volume": "14",
      "author": "J Bauer",
      "year": "1996",
      "unstructured": "Bauer J, Drescher G, Illig M (1996) J Vac Sci Technol B 14:2485",
      "journal-title": "J Vac Sci Technol B"
    },
    {
      "key": "730_CR16",
      "doi-asserted-by": "crossref",
      "first-page": "161",
      "DOI": "10.1088/0960-1317/16/6/S24",
      "volume": "16",
      "author": "MP Larsson",
      "year": "2006",
      "unstructured": "Larsson MP, Ahmad MM (2006) J Micromech Microeng 16:161",
      "journal-title": "J Micromech Microeng"
    },
    {
      "key": "730_CR17",
      "doi-asserted-by": "crossref",
      "first-page": "2181",
      "DOI": "10.1021/j100683a020",
      "volume": "75",
      "author": "W Hertl",
      "year": "1971",
      "unstructured": "Hertl W, Hair ML (1971) J Phys Chem 75:2181",
      "journal-title": "J Phys Chem"
    },
    {
      "key": "730_CR18",
      "doi-asserted-by": "crossref",
      "first-page": "157",
      "DOI": "10.1006/jcis.2000.6934",
      "volume": "228",
      "author": "VM Gun\u2019ko",
      "year": "2000",
      "unstructured": "Gun\u2019ko VM, Vedamuthu MS, Henderson GL, Blitz JP (2000) J Colloid Interface Sci 228:157",
      "journal-title": "J Colloid Interface Sci"
    },
    {
      "key": "730_CR19",
      "doi-asserted-by": "crossref",
      "first-page": "117001",
      "DOI": "10.1088/0960-1317/20/11/117001",
      "volume": "20",
      "author": "K-Y Hwang",
      "year": "2010",
      "unstructured": "Hwang K-Y, Park C-S, Kim J-H, Suh K-Y, Cho E-C, Huh N (2010) J Micromech Microeng 20:117001",
      "journal-title": "J Micromech Microeng"
    },
    {
      "key": "730_CR20",
      "volume-title": "Polymers for high technology electronics and photonics",
      "author": "JN Helbert",
      "year": "1984",
      "unstructured": "Helbert JN, Saha NC (1984) Importance of the interface condition upon photoresist image adhesion in microelectronic device fabrication. In: Bowden MJ, Turner SR (eds) Polymers for high technology electronics and photonics. ACS Symposium Series, Washington DC"
    },
    {
      "key": "730_CR21",
      "doi-asserted-by": "crossref",
      "first-page": "1965",
      "DOI": "10.1021/j100635a008",
      "volume": "75",
      "author": "ML Hair",
      "year": "1973",
      "unstructured": "Hair ML, Hertl W (1973) J Phys Chem 75:1965",
      "journal-title": "J Phys Chem"
    },
    {
      "key": "730_CR22",
      "doi-asserted-by": "crossref",
      "first-page": "236",
      "DOI": "10.1088/0957-4484/4/4/010",
      "volume": "4",
      "author": "Y Samitsu",
      "year": "1993",
      "unstructured": "Samitsu Y (1993) Nanotechnology 4:236",
      "journal-title": "Nanotechnology"
    },
    {
      "key": "730_CR23",
      "doi-asserted-by": "crossref",
      "first-page": "319",
      "DOI": "10.1016/0166-6622(84)80175-4",
      "volume": "9",
      "author": "HJ Busscher",
      "year": "1984",
      "unstructured": "Busscher HJ, van Pelt AWJ, de Boer P, de Jong HP, Arends J (1984) Colloids Surf 9:319",
      "journal-title": "Colloids Surf"
    },
    {
      "key": "730_CR24",
      "doi-asserted-by": "crossref",
      "first-page": "1444",
      "DOI": "10.1002/sia.2923",
      "volume": "40",
      "author": "A Vesel",
      "year": "2008",
      "unstructured": "Vesel A, Junkar I, Cvelbar U, Kovac J, Mozetic M (2008) Surf Interface Anal 40:1444",
      "journal-title": "Surf Interface Anal"
    },
    {
      "key": "730_CR25",
      "doi-asserted-by": "crossref",
      "first-page": "5872",
      "DOI": "10.1063/1.1516866",
      "volume": "92",
      "author": "M Chasse",
      "year": "2002",
      "unstructured": "Chasse M, Ross GG (2002) J Appl Phys 92:5872",
      "journal-title": "J Appl Phys"
    },
    {
      "key": "730_CR26",
      "doi-asserted-by": "crossref",
      "first-page": "4663",
      "DOI": "10.1016/S0142-9612(03)00366-1",
      "volume": "24",
      "author": "B Feng",
      "year": "2003",
      "unstructured": "Feng B, Weng J, Yang BC, Qu SX, Zhang XD (2003) Biomaterials 24:4663",
      "journal-title": "Biomaterials"
    },
    {
      "key": "730_CR27",
      "doi-asserted-by": "crossref",
      "first-page": "352",
      "DOI": "10.1016/0021-9797(87)90280-3",
      "volume": "119",
      "author": "G Str\u00f6m",
      "year": "1986",
      "unstructured": "Str\u00f6m G, Frederiksson M, Stenius P (1986) J Coll Interface Sci 119:352",
      "journal-title": "J Coll Interface Sci"
    },
    {
      "key": "730_CR28",
      "doi-asserted-by": "crossref",
      "first-page": "1701",
      "DOI": "10.1021/la00101a014",
      "volume": "6",
      "author": "AFM Leenaars",
      "year": "1990",
      "unstructured": "Leenaars AFM, Huethorst JAM, van Oekel JJ (1990) Langmuir 6:1701",
      "journal-title": "Langmuir"
    },
    {
      "key": "730_CR29",
      "doi-asserted-by": "crossref",
      "first-page": "247",
      "DOI": "10.1007/978-3-662-04160-4",
      "volume-title": "Technology of integrated circuits",
      "author": "D Widmann",
      "year": "2000",
      "unstructured": "Widmann D, Mader H, Friedrich H (2000) Technology of integrated circuits. Springer, Heidelberg, p 247"
    },
    {
      "key": "730_CR30",
      "doi-asserted-by": "crossref",
      "first-page": "5804",
      "DOI": "10.1002/ange.200280013",
      "volume": "115",
      "author": "G Friedbacher",
      "year": "2003",
      "unstructured": "Friedbacher G, Fuchs H (2003) Angew Chem 115:5804",
      "journal-title": "Angew Chem"
    },
    {
      "key": "730_CR31",
      "doi-asserted-by": "crossref",
      "first-page": "873",
      "DOI": "10.1002/adfm.200304445",
      "volume": "13",
      "author": "JP Lee",
      "year": "2003",
      "unstructured": "Lee JP, Jang YJ, Sung MM (2003) Adv Funct Mater 13:873",
      "journal-title": "Adv Funct Mater"
    },
    {
      "key": "730_CR32",
      "doi-asserted-by": "crossref",
      "first-page": "1806",
      "DOI": "10.1002/adfm.200400486",
      "volume": "15",
      "author": "SY Yang",
      "year": "2005",
      "unstructured": "Yang SY, Shin K, Park CE (2005) Adv Funct Mater 15:1806",
      "journal-title": "Adv Funct Mater"
    },
    {
      "key": "730_CR33",
      "doi-asserted-by": "crossref",
      "first-page": "7652",
      "DOI": "10.1021/ma034597p",
      "volume": "36",
      "author": "K Cho",
      "year": "2003",
      "unstructured": "Cho K, Kim D, Yoon S (2003) Macromolecules 36:7652",
      "journal-title": "Macromolecules"
    },
    {
      "key": "730_CR34",
      "doi-asserted-by": "crossref",
      "first-page": "1741",
      "DOI": "10.1002/app.1969.070130815",
      "volume": "13",
      "author": "DK Owens",
      "year": "1969",
      "unstructured": "Owens DK, Wendt RC (1969) J Appl Polym Sci 13:1741",
      "journal-title": "J Appl Polym Sci"
    },
    {
      "key": "730_CR35",
      "first-page": "997",
      "volume": "77",
      "author": "W Rabel",
      "year": "1971",
      "unstructured": "Rabel W (1971) Farbe Lack 77:997",
      "journal-title": "Farbe Lack"
    },
    {
      "key": "730_CR36",
      "doi-asserted-by": "crossref",
      "first-page": "66",
      "DOI": "10.1080/0021846708544582",
      "volume": "2",
      "author": "DH Kaelble",
      "year": "1970",
      "unstructured": "Kaelble DH (1970) J Adhes 2:66",
      "journal-title": "J Adhes"
    },
    {
      "key": "730_CR37",
      "doi-asserted-by": "crossref",
      "first-page": "25",
      "DOI": "10.1142/9789812817464_0003",
      "volume-title": "Infrared characterization for microelectronics",
      "author": "WS Lau",
      "year": "1999",
      "unstructured": "Lau WS (1999) Infrared characterization for microelectronics. World Scientific, Singapore, p 25"
    },
    {
      "key": "730_CR38",
      "doi-asserted-by": "crossref",
      "first-page": "1239",
      "DOI": "10.1116/1.579868",
      "volume": "13",
      "author": "TL Barr",
      "year": "1995",
      "unstructured": "Barr TL, Seal S (1995) J Vac Sci Technol A 13:1239",
      "journal-title": "J Vac Sci Technol A"
    }
  ],
  "container-title": "Monatshefte f\u00fcr Chemie - Chemical Monthly",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "http://link.springer.com/content/pdf/10.1007/s00706-012-0730-8.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "http://link.springer.com/article/10.1007/s00706-012-0730-8/fulltext.html",
      "content-type": "text/html",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "http://link.springer.com/content/pdf/10.1007/s00706-012-0730-8",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2019,
        5,
        29
      ]
    ],
    "date-time": "2019-05-29T05:14:25Z",
    "timestamp": 1559106865000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "http://link.springer.com/10.1007/s00706-012-0730-8"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2012,
        2,
        16
      ]
    ]
  },
  "references-count": 38,
  "journal-issue": {
    "issue": "5",
    "published-print": {
      "date-parts": [
        [
          2012,
          5
        ]
      ]
    }
  },
  "alternative-id": [
    "730"
  ],
  "URL": "http://dx.doi.org/10.1007/s00706-012-0730-8",
  "relation": {},
  "ISSN": [
    "0026-9247",
    "1434-4475"
  ],
  "subject": [],
  "container-title-short": "Monatsh Chem",
  "published": {
    "date-parts": [
      [
        2012,
        2,
        16
      ]
    ]
  }
}