DOI: 10.1007/s005420050150. Materials of LIGA technology

10.1007/s005420050150

Crossref journal-article

Springer Science and Business Media LLC

Microsystem Technologies (297)

Bibliography

Ehrfeld, W., Hessel, V., LÃ¶we, H., Schulz, C., & Weber, L. (1999). Materials of LIGA technology. Microsystem Technologies, 5(3), 105â112.

Authors 5

W. Ehrfeld (first)
V. Hessel (additional)
H. Löwe (additional)
C. Schulz (additional)
L. Weber (additional)

References 0 Referenced 63

None

Dates

Type	When
Created	23 years ago (Aug. 25, 2002, 1:09 a.m.)
Deposited	6 years, 3 months ago (May 29, 2019, 5:48 a.m.)
Indexed	2 months ago (June 24, 2025, 6:25 a.m.)
Issued	26 years, 6 months ago (Feb. 26, 1999)
Published	26 years, 6 months ago (Feb. 26, 1999)
Published Print	26 years, 6 months ago (Feb. 26, 1999)

Funders 0

None

BibTeX

@article{Ehrfeld_1999, title={Materials of LIGA technology}, volume={5}, ISSN={1432-1858}, url={http://dx.doi.org/10.1007/s005420050150}, DOI={10.1007/s005420050150}, number={3}, journal={Microsystem Technologies}, publisher={Springer Science and Business Media LLC}, author={Ehrfeld, W. and Hessel, V. and Löwe, H. and Schulz, C. and Weber, L.}, year={1999}, month=feb, pages={105–112} }

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