DOI: 10.1007/s005420050137. Fracture and fatigue behavior of single crystal silicon microelements and nanoscopic AFM damage evaluation

Fracture and fatigue behavior of single crystal silicon microelements and nanoscopic AFM damage evaluation

10.1007/s005420050137

Crossref journal-article

Springer Science and Business Media LLC

Microsystem Technologies (297)

Bibliography

Komai, K., Minoshima, K., & Inoue, S. (1998). Fracture and fatigue behavior of single crystal silicon microelements and nanoscopic AFM damage evaluation. Microsystem Technologies, 5(1), 30â37.

Authors 3

K. Komai (first)
K. Minoshima (additional)
S. Inoue (additional)

References 0 Referenced 71

None

Dates

Type	When
Created	23 years ago (Aug. 25, 2002, 5:09 a.m.)
Deposited	6 years, 2 months ago (May 29, 2019, 9:48 a.m.)
Indexed	3 weeks ago (Aug. 6, 2025, 8:45 a.m.)
Issued	26 years, 10 months ago (Oct. 23, 1998)
Published	26 years, 10 months ago (Oct. 23, 1998)
Published Print	26 years, 10 months ago (Oct. 23, 1998)

Funders 0

None

BibTeX

@article{Komai_1998, title={Fracture and fatigue behavior of single crystal silicon microelements and nanoscopic AFM damage evaluation}, volume={5}, ISSN={1432-1858}, url={http://dx.doi.org/10.1007/s005420050137}, DOI={10.1007/s005420050137}, number={1}, journal={Microsystem Technologies}, publisher={Springer Science and Business Media LLC}, author={Komai, K. and Minoshima, K. and Inoue, S.}, year={1998}, month=oct, pages={30–37} }

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