DOI: 10.1007/s003390100989. Optical characterization of thin thermal oxide films on copper by ellipsometry

Optical characterization of thin thermal oxide films on copper by ellipsometry

10.1007/s003390100989

Crossref journal-article

Springer Science and Business Media LLC

Applied Physics A: Materials Science & Processing (297)

Bibliography

Derin, H., & Kantarli, K. (2002). Optical characterization of thin thermal oxide films on copper by ellipsometry. Applied Physics A: Materials Science & Processing, 75(3), 391â395.

Authors 2

H. Derin (first)
K. Kantarli (additional)

References 0 Referenced 68

None

Dates

Type	When
Created	21 years, 9 months ago (Nov. 24, 2003, 7:29 a.m.)
Deposited	6 years, 3 months ago (May 28, 2019, 5:01 a.m.)
Indexed	1 year, 1 month ago (July 20, 2024, 4:16 p.m.)
Issued	23 years ago (Sept. 1, 2002)
Published	23 years ago (Sept. 1, 2002)
Published Print	23 years ago (Sept. 1, 2002)

Funders 0

None

BibTeX

@article{Derin_2002, title={Optical characterization of thin thermal oxide films on copper by ellipsometry}, volume={75}, ISSN={1432-0630}, url={http://dx.doi.org/10.1007/s003390100989}, DOI={10.1007/s003390100989}, number={3}, journal={Applied Physics A: Materials Science & Processing}, publisher={Springer Science and Business Media LLC}, author={Derin, H. and Kantarli, K.}, year={2002}, month=sep, pages={391–395} }

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