DOI: 10.1007/s00339-004-3177-x. A novel interconnection technique for manufacturing nanowire devices

A novel interconnection technique for manufacturing nanowire devices

10.1007/s00339-004-3177-x

Crossref journal-article

Springer Science and Business Media LLC

Applied Physics A (297)

Bibliography

Saif Islam, M., Sharma, S., Kamins, T. I., & Stanley Williams, R. (2005). A novel interconnection technique for manufacturing nanowire devices. Applied Physics A, 80(6), 1133â1140.

Authors 4

M. Saif Islam (first)
S. Sharma (additional)
T.I. Kamins (additional)
R. Stanley Williams (additional)

References 31 Referenced 74

M. Yazawa, M. Koguchi, K. Hiruma: Appl. Phys. Lett. 58, 1080 (1991) (10.1063/1.104377) / Appl. Phys. Lett. by Yazawa (1991)
T.J. Trentler, K.M. Hickman, S.C. Coel, A.M. Viano, P.C. Gibbons, W.E. Buhro: Science 270, 1791 (1995) (10.1126/science.270.5243.1791) / Science by Trentler (1995)
Y. Cui, C.M. Lieber: Science 291, 851 (2001); X.F. Duan, Y. Huang, Y. Cui, J.F. Wang, C.M. Lieber: Nature 409, 66 (2001); J.F. Wang, M.S. Gudiksen, X.F. Duan, Y. Cui, C.M. Lieber: Science 293, 1455 (2001); A.M. Morales, C.M. Lieber: Science 279, 208 (1998) (10.1126/science.291.5505.851) / Science by Cui (2001)
Y. Wu, P. Yang: Chem. Mater. 12, 605 (2000); Y. Wu, B. Messer, P. Yang: Adv. Mater. 13, 1487 (2001) (10.1021/cm9907514) / Chem. Mater. by Wu (2000)
T.I. Kamins, X. Li, R.S. Williams, X. Liu: Nano Lett. 4, 503 (2004); T.I. Kamins, R.S. Williams, D.P. Basile, T. Hesjedal, J.S. Harris: J. Appl. Phys. 89, 1008 (2001) (10.1021/nl035166n) / Nano Lett. by Kamins (2004)
M. Saif Islam, S. Sharma, T.I. Kamins, R.S. Williams: Nanotechnology 15, L5 (2004) (10.1088/0957-4484/15/5/L01)
Z.W. Pan, Z.R. Dai, Z.L. Wang: Science 291, 1947 (2001) (10.1126/science.1058120) / Science by Pan (2001)
Y. Cui, X. Duan, J. Hu, C.M. Lieber: J. Phys. Chem. B 104, 5213 (2001) (10.1021/jp0009305) / J. Phys. Chem. B by Cui (2001)
M. Huang, S.S. Mao, H. Feich, H. Yan, Y. Wu, H. Kind, E.R. Weber, R.E. Russo, P. Yang: Science 292, 1897 (2001); S.S. Mao, R.E. Russo, P. Yang: Proc. SPIE 4608, 225 (2001) (10.1126/science.1060367) / Science by Huang (2001)
F. Seker, M. Meeker, T.F. Kuech, A.B. Ellis: Chem. Rev. 100, 2505 (2000) (10.1021/cr980093r) / Chem. Rev. by Seker (2000)
Y. Xia, P. Yang, Y. Sun, Y. Wu, B. Mayers, B. Gates, Y. Yin, F. Kim, H. Yan: Adv. Mater. 15, 353 (2003) (10.1002/adma.200390087) / Adv. Mater. by Xia (2003)
Y. Cui, Q.Q. Wei, H.K. Park, C.M. Lieber: Science 293, 1289 (2001) (10.1126/science.1062711) / Science by Cui (2001)
M. Law, H. Kind, F. Kim, B. Messer, P. Yang: Angew. Chem. Int. Ed. 41, 2405 (2002) (10.1002/1521-3773(20020703)41:13<2405::AID-ANIE2405>3.0.CO;2-3) / Angew. Chem. Int. Ed. by Law (2002)
C. Li, D.H. Zhang, X.L. Liu, S. Han, T. Tang, J. Han, C.W. Zhou: Appl. Phys. Lett. 82, 1613 (2003) (10.1063/1.1559438) / Appl. Phys. Lett. by Li (2003)
Z. Li, Y. Chen, X. Li, T.I. Kamins, K. Nauka, R.S. Williams: Nano Lett. 4, 245 (2004) (10.1021/nl034958e) / Nano Lett. by Li (2004)
S.S. Mao: Int. J. Nanotechnol. 1, 42 (2004) (10.1504/IJNT.2004.003712) / Int. J. Nanotechnol. by Mao (2004)
R.S. Wagner, W.C. Ellis: Appl. Phys. Lett. 4, 89 (1964) (10.1063/1.1753975) / Appl. Phys. Lett. by Wagner (1964)
B.J. Ohlsson, M.T. Bjork, M.H. Magnusson, K. Deppert, L. Samuelson, L.R. Wallenberg: Appl. Phys. Lett. 79, 3335 (2001) (10.1063/1.1418446) / Appl. Phys. Lett. by Ohlsson (2001)
M.T. Bjork, B.J. Ohlsson, T. Sass, A.I. Persson, C. Thelander, M.H. Magnusson, K. Deppert, L.R. Wallenberg: Nano Lett. 2, 87 (2002); M.T. Bjork, B.J. Ohlsson, C. Thelander, A.I. Persson, K. Deppert, L.R. Wallenberg, L. Samuelson: Appl. Phys. Lett. 81, 4458 (2002) (10.1021/nl010099n) / Nano Lett. by Bjork (2002)
C. Li, D. Zhang, S. Han, X. Liu, C. Zhou: J. Phys. Chem. B 107, 12451 (2003); D. Zhang, C. Li, X. Liu, S. Han, T. Tang, C. Zhou: Appl. Phys. Lett. 83, 1845 (2003) (10.1021/jp0361531) / J. Phys. Chem. B by Li (2003)
Y. Cui, X. Duan, Y. Huang, C.M. Lieber: in Nanowires and Nanobelts: Materials, Properties and Devices I, ed. by Z.L. Wang (Kluwer Academic, Boston, MA 2003) pp. 3–65 (10.1007/978-0-387-28745-4_1)
L. Samuelson, B.J. Ohlsson, M.T. Björk, H. Xu, B.J. Ohlsson: in Nanowires and Nanobelts: Materials, Properties and Devices I, ed. by Z.L. Wang (Kluwer Academic, Boston, MA 2003) pp. 69–87 (10.1007/978-0-387-28745-4_2)
A. Amma, T.E. Mallouk: in Nanowires and Nanobelts: Materials, Properties and Devices I, ed. by Z.L. Wang (Kluwer Academic, Boston, MA 2003) pp. 235–249 (10.1007/978-0-387-28745-4_8)
Z.L. Wang: in Nanowires and Nanobelts: Materials, Properties and Devices II, ed. by Z.L. Wang (Kluwer Academic, Boston, MA 2003) pp. 3–16 (10.1007/978-0-387-28747-8_1)
S.-W. Chung, J.-Y. Yu, J.R. Heath: Appl. Phys. Lett. 76, 2068 (2002) (10.1063/1.126257) / Appl. Phys. Lett. by Chung (2002)
J.E. Spainer, J.J. Urban, L. Ouyang, W. Soo, H. Park: in Nanowires and Nanobelts: Materials, Properties and Devices II, ed. by Z.L. Wang (Kluwer Academic, Boston, MA 2003) pp. 83–91 (10.1007/978-0-387-28747-8_5)
J. Westwater, D.P. Gosain, S. Tomiya, S. Usui, H. Ruda: J. Vac. Sci. Technol. B 15, 554 (1997) (10.1116/1.589291) / J. Vac. Sci. Technol. B by Westwater (1997)
D.L. Kendall: Annu. Rev. Mater. Sci. 9, 373 (1979) (10.1146/annurev.ms.09.080179.002105) / Annu. Rev. Mater. Sci. by Kendall (1979)
M.J. Madou: in Fundamentals of Microfabrication: The Science of Miniaturization, 2nd edn. (CRC, Boca Raton, FL 2002) pp. 209–210 (10.1201/9781482274004)
R.D. Cook, W.C. Young: in Advanced Mechanics of Materials, 2nd edn. (Prentice-Hall, Englewood Cliffs, NJ 1999) p. 112
M.J. Madou: in Fundamentals of Microfabrication: The Science of Miniaturization, 2nd edn. (CRC, Boca Raton, FL 2002) pp. 191–192 (10.1201/9781482274004)

Dates

Type	When
Created	20 years, 5 months ago (March 14, 2005, 1:06 p.m.)
Deposited	6 years, 2 months ago (May 28, 2019, 8:36 a.m.)
Indexed	1 year, 2 months ago (June 24, 2024, 10:40 a.m.)
Issued	20 years, 5 months ago (March 1, 2005)
Published	20 years, 5 months ago (March 1, 2005)
Published Online	20 years, 5 months ago (March 1, 2005)
Published Print	20 years, 5 months ago (March 1, 2005)

Funders 0

None

BibTeX

@article{Saif_Islam_2005, title={A novel interconnection technique for manufacturing nanowire devices}, volume={80}, ISSN={1432-0630}, url={http://dx.doi.org/10.1007/s00339-004-3177-x}, DOI={10.1007/s00339-004-3177-x}, number={6}, journal={Applied Physics A}, publisher={Springer Science and Business Media LLC}, author={Saif Islam, M. and Sharma, S. and Kamins, T.I. and Stanley Williams, R.}, year={2005}, month=mar, pages={1133–1140} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2024,
        6,
        24
      ]
    ],
    "date-time": "2024-06-24T14:40:55Z",
    "timestamp": 1719240055422
  },
  "reference-count": 31,
  "publisher": "Springer Science and Business Media LLC",
  "issue": "6",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            2005,
            3,
            1
          ]
        ],
        "date-time": "2005-03-01T00:00:00Z",
        "timestamp": 1109635200000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "http://www.springer.com/tdm"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        2005,
        3
      ]
    ]
  },
  "DOI": "10.1007/s00339-004-3177-x",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2005,
        3,
        14
      ]
    ],
    "date-time": "2005-03-14T18:06:08Z",
    "timestamp": 1110823568000
  },
  "page": "1133-1140",
  "source": "Crossref",
  "is-referenced-by-count": 74,
  "title": "A novel interconnection technique for manufacturing nanowire devices",
  "prefix": "10.1007",
  "volume": "80",
  "author": [
    {
      "given": "M.",
      "family": "Saif Islam",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "S.",
      "family": "Sharma",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "T.I.",
      "family": "Kamins",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "R.",
      "family": "Stanley Williams",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "297",
  "published-online": {
    "date-parts": [
      [
        2005,
        3,
        1
      ]
    ]
  },
  "reference": [
    {
      "key": "3177_CR1",
      "doi-asserted-by": "publisher",
      "first-page": "1080",
      "DOI": "10.1063/1.104377",
      "volume": "58",
      "author": "Yazawa",
      "year": "1991",
      "unstructured": "M. Yazawa, M. Koguchi, K. Hiruma: Appl. Phys. Lett. 58, 1080 (1991)",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "3177_CR2",
      "doi-asserted-by": "publisher",
      "first-page": "1791",
      "DOI": "10.1126/science.270.5243.1791",
      "volume": "270",
      "author": "Trentler",
      "year": "1995",
      "unstructured": "T.J. Trentler, K.M. Hickman, S.C. Coel, A.M. Viano, P.C. Gibbons, W.E. Buhro: Science 270, 1791 (1995)",
      "journal-title": "Science"
    },
    {
      "key": "3177_CR3",
      "doi-asserted-by": "publisher",
      "first-page": "851",
      "DOI": "10.1126/science.291.5505.851",
      "volume": "291",
      "author": "Cui",
      "year": "2001",
      "unstructured": "Y. Cui, C.M. Lieber: Science 291, 851 (2001); X.F. Duan, Y. Huang, Y. Cui, J.F. Wang, C.M. Lieber: Nature 409, 66 (2001); J.F. Wang, M.S. Gudiksen, X.F. Duan, Y. Cui, C.M. Lieber: Science 293, 1455 (2001); A.M. Morales, C.M. Lieber: Science 279, 208 (1998)",
      "journal-title": "Science"
    },
    {
      "key": "3177_CR4",
      "doi-asserted-by": "publisher",
      "first-page": "605",
      "DOI": "10.1021/cm9907514",
      "volume": "12",
      "author": "Wu",
      "year": "2000",
      "unstructured": "Y. Wu, P. Yang: Chem. Mater. 12, 605 (2000); Y. Wu, B. Messer, P. Yang: Adv. Mater. 13, 1487 (2001)",
      "journal-title": "Chem. Mater."
    },
    {
      "key": "3177_CR5",
      "doi-asserted-by": "publisher",
      "first-page": "503",
      "DOI": "10.1021/nl035166n",
      "volume": "4",
      "author": "Kamins",
      "year": "2004",
      "unstructured": "T.I. Kamins, X. Li, R.S. Williams, X. Liu: Nano Lett. 4, 503 (2004); T.I. Kamins, R.S. Williams, D.P. Basile, T. Hesjedal, J.S. Harris: J. Appl. Phys. 89, 1008 (2001)",
      "journal-title": "Nano Lett."
    },
    {
      "key": "3177_CR6",
      "doi-asserted-by": "crossref",
      "unstructured": "M. Saif Islam, S. Sharma, T.I. Kamins, R.S. Williams: Nanotechnology 15, L5 (2004)",
      "DOI": "10.1088/0957-4484/15/5/L01"
    },
    {
      "key": "3177_CR7",
      "doi-asserted-by": "publisher",
      "first-page": "1947",
      "DOI": "10.1126/science.1058120",
      "volume": "291",
      "author": "Pan",
      "year": "2001",
      "unstructured": "Z.W. Pan, Z.R. Dai, Z.L. Wang: Science 291, 1947 (2001)",
      "journal-title": "Science"
    },
    {
      "key": "3177_CR8",
      "doi-asserted-by": "publisher",
      "first-page": "5213",
      "DOI": "10.1021/jp0009305",
      "volume": "104",
      "author": "Cui",
      "year": "2001",
      "unstructured": "Y. Cui, X. Duan, J. Hu, C.M. Lieber: J. Phys. Chem. B 104, 5213 (2001)",
      "journal-title": "J. Phys. Chem. B"
    },
    {
      "key": "3177_CR9",
      "doi-asserted-by": "publisher",
      "first-page": "1897",
      "DOI": "10.1126/science.1060367",
      "volume": "292",
      "author": "Huang",
      "year": "2001",
      "unstructured": "M. Huang, S.S. Mao, H. Feich, H. Yan, Y. Wu, H. Kind, E.R. Weber, R.E. Russo, P. Yang: Science 292, 1897 (2001); S.S. Mao, R.E. Russo, P. Yang: Proc. SPIE 4608, 225 (2001)",
      "journal-title": "Science"
    },
    {
      "key": "3177_CR10",
      "doi-asserted-by": "publisher",
      "first-page": "2505",
      "DOI": "10.1021/cr980093r",
      "volume": "100",
      "author": "Seker",
      "year": "2000",
      "unstructured": "F. Seker, M. Meeker, T.F. Kuech, A.B. Ellis: Chem. Rev. 100, 2505 (2000)",
      "journal-title": "Chem. Rev."
    },
    {
      "key": "3177_CR11",
      "doi-asserted-by": "publisher",
      "first-page": "353",
      "DOI": "10.1002/adma.200390087",
      "volume": "15",
      "author": "Xia",
      "year": "2003",
      "unstructured": "Y. Xia, P. Yang, Y. Sun, Y. Wu, B. Mayers, B. Gates, Y. Yin, F. Kim, H. Yan: Adv. Mater. 15, 353 (2003)",
      "journal-title": "Adv. Mater."
    },
    {
      "key": "3177_CR12",
      "doi-asserted-by": "publisher",
      "first-page": "1289",
      "DOI": "10.1126/science.1062711",
      "volume": "293",
      "author": "Cui",
      "year": "2001",
      "unstructured": "Y. Cui, Q.Q. Wei, H.K. Park, C.M. Lieber: Science 293, 1289 (2001)",
      "journal-title": "Science"
    },
    {
      "key": "3177_CR13",
      "doi-asserted-by": "publisher",
      "first-page": "2405",
      "DOI": "10.1002/1521-3773(20020703)41:13<2405::AID-ANIE2405>3.0.CO;2-3",
      "volume": "41",
      "author": "Law",
      "year": "2002",
      "unstructured": "M. Law, H. Kind, F. Kim, B. Messer, P. Yang: Angew. Chem. Int. Ed. 41, 2405 (2002)",
      "journal-title": "Angew. Chem. Int. Ed."
    },
    {
      "key": "3177_CR14",
      "doi-asserted-by": "publisher",
      "first-page": "1613",
      "DOI": "10.1063/1.1559438",
      "volume": "82",
      "author": "Li",
      "year": "2003",
      "unstructured": "C. Li, D.H. Zhang, X.L. Liu, S. Han, T. Tang, J. Han, C.W. Zhou: Appl. Phys. Lett. 82, 1613 (2003)",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "3177_CR15",
      "doi-asserted-by": "publisher",
      "first-page": "245",
      "DOI": "10.1021/nl034958e",
      "volume": "4",
      "author": "Li",
      "year": "2004",
      "unstructured": "Z. Li, Y. Chen, X. Li, T.I. Kamins, K. Nauka, R.S. Williams: Nano Lett. 4, 245 (2004)",
      "journal-title": "Nano Lett."
    },
    {
      "key": "3177_CR16",
      "doi-asserted-by": "publisher",
      "first-page": "42",
      "DOI": "10.1504/IJNT.2004.003712",
      "volume": "1",
      "author": "Mao",
      "year": "2004",
      "unstructured": "S.S. Mao: Int. J. Nanotechnol. 1, 42 (2004)",
      "journal-title": "Int. J. Nanotechnol."
    },
    {
      "key": "3177_CR17",
      "doi-asserted-by": "publisher",
      "first-page": "89",
      "DOI": "10.1063/1.1753975",
      "volume": "4",
      "author": "Wagner",
      "year": "1964",
      "unstructured": "R.S. Wagner, W.C. Ellis: Appl. Phys. Lett. 4, 89 (1964)",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "3177_CR18",
      "doi-asserted-by": "publisher",
      "first-page": "3335",
      "DOI": "10.1063/1.1418446",
      "volume": "79",
      "author": "Ohlsson",
      "year": "2001",
      "unstructured": "B.J. Ohlsson, M.T. Bjork, M.H. Magnusson, K. Deppert, L. Samuelson, L.R. Wallenberg: Appl. Phys. Lett. 79, 3335 (2001)",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "3177_CR19",
      "doi-asserted-by": "publisher",
      "first-page": "87",
      "DOI": "10.1021/nl010099n",
      "volume": "2",
      "author": "Bjork",
      "year": "2002",
      "unstructured": "M.T. Bjork, B.J. Ohlsson, T. Sass, A.I. Persson, C. Thelander, M.H. Magnusson, K. Deppert, L.R. Wallenberg: Nano Lett. 2, 87 (2002); M.T. Bjork, B.J. Ohlsson, C. Thelander, A.I. Persson, K. Deppert, L.R. Wallenberg, L. Samuelson: Appl. Phys. Lett. 81, 4458 (2002)",
      "journal-title": "Nano Lett."
    },
    {
      "key": "3177_CR20",
      "doi-asserted-by": "publisher",
      "first-page": "12451",
      "DOI": "10.1021/jp0361531",
      "volume": "107",
      "author": "Li",
      "year": "2003",
      "unstructured": "C. Li, D. Zhang, S. Han, X. Liu, C. Zhou: J. Phys. Chem. B 107, 12451 (2003); D. Zhang, C. Li, X. Liu, S. Han, T. Tang, C. Zhou: Appl. Phys. Lett. 83, 1845 (2003)",
      "journal-title": "J. Phys. Chem. B"
    },
    {
      "key": "3177_CR21",
      "doi-asserted-by": "crossref",
      "unstructured": "Y. Cui, X. Duan, Y. Huang, C.M. Lieber: in Nanowires and Nanobelts: Materials, Properties and Devices I, ed. by Z.L. Wang (Kluwer Academic, Boston, MA 2003) pp. 3\u201365",
      "DOI": "10.1007/978-0-387-28745-4_1"
    },
    {
      "key": "3177_CR22",
      "doi-asserted-by": "crossref",
      "unstructured": "L. Samuelson, B.J. Ohlsson, M.T. Bj\u00f6rk, H. Xu, B.J. Ohlsson: in Nanowires and Nanobelts: Materials, Properties and Devices I, ed. by Z.L. Wang (Kluwer Academic, Boston, MA 2003) pp. 69\u201387",
      "DOI": "10.1007/978-0-387-28745-4_2"
    },
    {
      "key": "3177_CR23",
      "doi-asserted-by": "crossref",
      "unstructured": "A. Amma, T.E. Mallouk: in Nanowires and Nanobelts: Materials, Properties and Devices I, ed. by Z.L. Wang (Kluwer Academic, Boston, MA 2003) pp. 235\u2013249",
      "DOI": "10.1007/978-0-387-28745-4_8"
    },
    {
      "key": "3177_CR24",
      "doi-asserted-by": "crossref",
      "unstructured": "Z.L. Wang: in Nanowires and Nanobelts: Materials, Properties and Devices II, ed. by Z.L. Wang (Kluwer Academic, Boston, MA 2003) pp. 3\u201316",
      "DOI": "10.1007/978-0-387-28747-8_1"
    },
    {
      "key": "3177_CR25",
      "doi-asserted-by": "publisher",
      "first-page": "2068",
      "DOI": "10.1063/1.126257",
      "volume": "76",
      "author": "Chung",
      "year": "2002",
      "unstructured": "S.-W. Chung, J.-Y. Yu, J.R. Heath: Appl. Phys. Lett. 76, 2068 (2002)",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "3177_CR26",
      "doi-asserted-by": "crossref",
      "unstructured": "J.E. Spainer, J.J. Urban, L. Ouyang, W. Soo, H. Park: in Nanowires and Nanobelts: Materials, Properties and Devices II, ed. by Z.L. Wang (Kluwer Academic, Boston, MA 2003) pp. 83\u201391",
      "DOI": "10.1007/978-0-387-28747-8_5"
    },
    {
      "key": "3177_CR27",
      "doi-asserted-by": "publisher",
      "first-page": "554",
      "DOI": "10.1116/1.589291",
      "volume": "15",
      "author": "Westwater",
      "year": "1997",
      "unstructured": "J. Westwater, D.P. Gosain, S. Tomiya, S. Usui, H. Ruda: J. Vac. Sci. Technol. B 15, 554 (1997)",
      "journal-title": "J. Vac. Sci. Technol. B"
    },
    {
      "key": "3177_CR28",
      "doi-asserted-by": "publisher",
      "first-page": "373",
      "DOI": "10.1146/annurev.ms.09.080179.002105",
      "volume": "9",
      "author": "Kendall",
      "year": "1979",
      "unstructured": "D.L. Kendall: Annu. Rev. Mater. Sci. 9, 373 (1979)",
      "journal-title": "Annu. Rev. Mater. Sci."
    },
    {
      "key": "3177_CR29",
      "doi-asserted-by": "crossref",
      "unstructured": "M.J. Madou: in Fundamentals of Microfabrication: The Science of Miniaturization, 2nd edn. (CRC, Boca Raton, FL 2002) pp. 209\u2013210",
      "DOI": "10.1201/9781482274004"
    },
    {
      "key": "3177_CR30",
      "unstructured": "R.D. Cook, W.C. Young: in Advanced Mechanics of Materials, 2nd edn. (Prentice-Hall, Englewood Cliffs, NJ 1999) p.\u2009112"
    },
    {
      "key": "3177_CR31",
      "doi-asserted-by": "crossref",
      "unstructured": "M.J. Madou: in Fundamentals of Microfabrication: The Science of Miniaturization, 2nd edn. (CRC, Boca Raton, FL 2002) pp. 191\u2013192",
      "DOI": "10.1201/9781482274004"
    }
  ],
  "container-title": "Applied Physics A",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "http://link.springer.com/content/pdf/10.1007/s00339-004-3177-x.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "http://link.springer.com/article/10.1007/s00339-004-3177-x/fulltext.html",
      "content-type": "text/html",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "http://link.springer.com/content/pdf/10.1007/s00339-004-3177-x",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2019,
        5,
        28
      ]
    ],
    "date-time": "2019-05-28T12:36:17Z",
    "timestamp": 1559046977000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "http://link.springer.com/10.1007/s00339-004-3177-x"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2005,
        3
      ]
    ]
  },
  "references-count": 31,
  "journal-issue": {
    "issue": "6",
    "published-print": {
      "date-parts": [
        [
          2005,
          3
        ]
      ]
    }
  },
  "alternative-id": [
    "3177"
  ],
  "URL": "http://dx.doi.org/10.1007/s00339-004-3177-x",
  "relation": {},
  "ISSN": [
    "0947-8396",
    "1432-0630"
  ],
  "subject": [],
  "container-title-short": "Appl. Phys. A",
  "published": {
    "date-parts": [
      [
        2005,
        3
      ]
    ]
  }
}