DOI: 10.1007/s00170-011-3633-7. Anisotropy of machined surfaces involved in the ultra-precision turning of single-crystal silicon

Anisotropy of machined surfaces involved in the ultra-precision turning of single-crystal silicon—a simulation and experimental study

10.1007/s00170-011-3633-7

Crossref journal-article

Springer Science and Business Media LLC

The International Journal of Advanced Manufacturing Technology (297)

Bibliography

Wang, M., Wang, W., & Lu, Z. (2011). Anisotropy of machined surfaces involved in the ultra-precision turning of single-crystal siliconâa simulation and experimental study. The International Journal of Advanced Manufacturing Technology, 60(5â8), 473â485.

Authors 3

Minghai Wang (first)
Wei Wang (additional)
Zesheng Lu (additional)

References 33 Referenced 32

Leung TP, Lee WB, Lu XM (1998) Diamond turning of silicon substrates in ductile regime. J Mater Process Technol 73:42–48 (10.1016/S0924-0136(97)00210-0) / J Mater Process Technol by TP Leung (1998)
Jasinevicius RG, Pizani PS (2007) Annealing treatment of amorphous silicon generated by single point diamond turning. Int J Adv Manuf Technol 34:680–688 (10.1007/s00170-006-0650-z) / Int J Adv Manuf Technol by RG Jasinevicius (2007)
Yan J, Syoji K, Kuriyagawa T, Suzuki H (2002) Ductile regime turning at large tool feed. J Mater Process Technol 121:363–372 (10.1016/S0924-0136(01)01218-3) / J Mater Process Technol by J Yan (2002)
Fang FZ (1998) Nano-turning of single crystal silicon. J Mater Process Technol 82:95–101 (10.1016/S0924-0136(98)00024-7) / J Mater Process Technol by FZ Fang (1998)
Yan J, Syoji K, Kuriyagawa T (2002) Fabrication of large-diameter single-crystal silicon aspheric lens by straight-line enveloping diamond-turning method. J Jpn Soc Precis Eng 68(4):1561–1565 / J Jpn Soc Precis Eng by J Yan (2002)
Sharif UM, Seah KHW, Rahman M, Li XP, Liu K (2007) Performance of single crystal diamond tools in ductile mode cutting of silicon. J Mater Process Technol 185:24–30 (10.1016/j.jmatprotec.2006.03.138) / J Mater Process Technol by UM Sharif (2007)
Blackley WS, Scattergood RO (1991) Ductile regime model for diamond turning of brittle materials. Precis Eng 13:95–102 (10.1016/0141-6359(91)90500-I) / Precis Eng by WS Blackley (1991)
Fang FZ, Wu H, Liu YC (2005) Modeling and investigation on machining mechanism of nano-cutting monocrystalline silicon. Int J Mach Tools Manuf 45:1681–1686 (10.1016/j.ijmachtools.2005.03.010) / Int J Mach Tools Manuf by FZ Fang (2005)
Inamura T, Shimada S, Takezawa N, Nakahara N (1997) Brittle/ductile transition phenomena observed in computer simulations of machining defect-free monocrystalline silicon. Ann CIRP 46:31–34 (10.1016/S0007-8506(07)60769-0) / Ann CIRP by T Inamura (1997)
Yan J (2004) Laser micro-Raman spectroscopy of single-point diamond machined silicon substrates. J Appl Phys 95:2094–2101 (10.1063/1.1639953) / J Appl Phys by J Yan (2004)
Tanikella BV, Somasekhar AH, Sowers AT, Nemanich RJ, Scattergood RO (1996) Phase transformations during microcutting tests on silicon. Appl Phys Lett 69:2870–2872 (10.1063/1.117346) / Appl Phys Lett by BV Tanikella (1996)
Morris JC, Callahan DL, Kulik J, Patten JA, Scattergood RO (1995) Origins of the ductile regime in single-point diamond turning of semiconductors. J Am Ceram Soc 78:2015–2020 (10.1111/j.1151-2916.1995.tb08612.x) / J Am Ceram Soc by JC Morris (1995)
Fang FZ, Wu H, Zhou W, Hu XT (2007) A study on mechanism of nano-cutting single crystal silicon. J Mater Process Technol 184:407–410 (10.1016/j.jmatprotec.2006.12.007) / J Mater Process Technol by FZ Fang (2007)
Blake PN, Bifano T, Scattergood RO (1988) Precision machining of ceramic materials. Ceram Bull 67:1038–1044 / Ceram Bull by PN Blake (1988)
Blake PN, Scattergood RO (1990) Ductile-regime machining of germanium and silicon. J Am Ceram Soc 73:946–957 (10.1111/j.1151-2916.1990.tb05142.x) / J Am Ceram Soc by PN Blake (1990)
Blackley W, Scattergood RO (1990) Crystal orientation dependence of machining damage—a stress model. J Am Ceram Soc 73(10):3113–3115 (10.1111/j.1151-2916.1990.tb06730.x) / J Am Ceram Soc by W Blackley (1990)
Shibata T, Fujii S, Makino E (1996) Ductile-regime turning mechanism of single-crystal silicon. Precis Eng 18:129–137 (10.1016/0141-6359(95)00054-2) / Precis Eng by T Shibata (1996)
Gatzen HH, Beck M (2003) Investigations on the friction force anisotropy of the silicon lattice. Wear 254:1122–1126 (10.1016/S0043-1648(03)00323-5) / Wear by HH Gatzen (2003)
Komandurib R, Chandrasekaran N, Raff LM (1999) Orientation effects in nanometric cutting of single crystal materials: an MD simulation approach. Ann CIRP 48(1):67–72 (10.1016/S0007-8506(07)63133-3) / Ann CIRP by R Komandurib (1999)
Hung NP, Fu YQ (2000) Effect of crystalline orientation in the ductile-regime machining of silicon. Int J Adv Manuf Technol 16:871–876 (10.1007/s001700070004) / Int J Adv Manuf Technol by NP Hung (2000)
Cheung CF (2003) Influence of cutting friction on anisotropy of surface properties in ultra-precision machining of brittle single crystals. Scripta Mater 48:1213–1218 (10.1016/S1359-6462(02)00569-9) / Scripta Mater by CF Cheung (2003)
Connor BPO, Marsh ER, Couey JA (2005) On the effect of crystallographic orientation on ductile material removal in silicon. Precis Eng 29:124–132 (10.1016/j.precisioneng.2004.05.004) / Precis Eng by BPO Connor (2005)
Marsh ER, Sommer EJ, Deakyne TRS, Kim GA, Simonson JA (2010) Detection of orientation-dependent, single-crystal diamond tool edge wear using cutting force sensors, while spin-turning silicon. Precis Eng 34:253–258 (10.1016/j.precisioneng.2009.06.004) / Precis Eng by ER Marsh (2010)
Wang MH, Lu ZS (2007) The theoretical study on the mechanism of BDT in machined Si single crystal. Key Eng Mater 339:84–89 (10.4028/www.scientific.net/KEM.339.84) / Key Eng Mater by MH Wang (2007)
Wang MH, Lu ZS (2008) Study on brittle-ductile transition of ultra-precision turning of single crystal silicon. Key Eng Mater 375–376:11–16 (10.4028/www.scientific.net/KEM.375-376.11) / Key Eng Mater by MH Wang (2008)
Evans AG, Marshall DB (1980) Wear mechanisms in ceramics. In: Rigney DA (ed) Fundamentals of friction and wear of materials. American Society for Metals, Metals Park, pp 439–452 / Fundamentals of friction and wear of materials by AG Evans (1980)
Zhang Q, Cai CR, Zhou HF (2001) TEM observations of the dislocations from micro-indentation surface in single crystalline silicon at room temperature. J Fuzhou Univ (Natural Science) 29(2):55–58 / J Fuzhou Univ (Natural Science) by Q Zhang (2001)
Rice JR (1992) Dislocation nucleation from a crack tip: an analysis based on the peierls concept. J Mech Phys Solids 40(2):239–271 (10.1016/S0022-5096(05)80012-2) / J Mech Phys Solids by JR Rice (1992)
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Dates

Type	When
Created	13 years, 10 months ago (Oct. 16, 2011, 8:04 p.m.)
Deposited	6 years, 3 months ago (May 23, 2019, 9:53 a.m.)
Indexed	2 days, 19 hours ago (Aug. 22, 2025, 12:50 a.m.)
Issued	13 years, 10 months ago (Oct. 18, 2011)
Published	13 years, 10 months ago (Oct. 18, 2011)
Published Online	13 years, 10 months ago (Oct. 18, 2011)
Published Print	13 years, 3 months ago (May 1, 2012)

Funders 0

None

BibTeX

@article{Wang_2011, title={Anisotropy of machined surfaces involved in the ultra-precision turning of single-crystal silicon—a simulation and experimental study}, volume={60}, ISSN={1433-3015}, url={http://dx.doi.org/10.1007/s00170-011-3633-7}, DOI={10.1007/s00170-011-3633-7}, number={5–8}, journal={The International Journal of Advanced Manufacturing Technology}, publisher={Springer Science and Business Media LLC}, author={Wang, Minghai and Wang, Wei and Lu, Zesheng}, year={2011}, month=oct, pages={473–485} }

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