DOI: 10.1007/s100050010058. Advances in Atom Probe Specimen Fabrication from Planar Multilayer Thin Film Structures

Advances in Atom Probe Specimen Fabrication from Planar Multilayer Thin Film Structures

10.1007/s100050010058

Crossref journal-article

Oxford University Press (OUP)

Microscopy and Microanalysis (286)

Abstract

AbstractA sample preparation method has been developed whereby sharp needle-shaped specimens for atom probe analysis are fabricated from multilayer thin films deposited onto silicon substrates. The specimens are fabricated in an orientation such that atom probe composition profiles across the layer interfaces can be determined with atomic-layer spatial resolution, i.e., the layer normals are parallel to the needle axis. The method uses standard silicon etching techniques and focused ion-beam milling. The feasibility and utility of this technique are shown through its application to a NiFe/CoFe/Cu/CoFe-based thin film structure.

Bibliography

Larson, D. J., Wissman, B. D., Martens, R. L., Viellieux, R. J., Kelly, T. F., Gribb, T. T., Erskine, H. F., & Tabat, N. (2001). Advances in Atom Probe Specimen Fabrication from Planar Multilayer Thin Film Structures. Microscopy and Microanalysis, 7(1), 24â31.

Authors 8

D.J. Larson (first)
B.D. Wissman (additional)
R.L. Martens (additional)
R.J. Viellieux (additional)
T.F. Kelly (additional)
T.T. Gribb (additional)
H.F. Erskine (additional)
N. Tabat (additional)

References 0 Referenced 50

None

Dates

Type	When
Created	5 years, 2 months ago (June 22, 2020, 4:49 p.m.)
Deposited	2 years, 6 months ago (Feb. 14, 2023, 6:31 a.m.)
Indexed	1 month ago (July 23, 2025, 9:03 a.m.)
Issued	24 years, 7 months ago (Jan. 1, 2001)
Published	24 years, 7 months ago (Jan. 1, 2001)
Published Online	23 years, 6 months ago (Feb. 2, 2002)
Published Print	24 years, 7 months ago (Jan. 1, 2001)

Funders 0

None

BibTeX

@article{Larson_2001, title={Advances in Atom Probe Specimen Fabrication from Planar Multilayer Thin Film Structures}, volume={7}, ISSN={1435-8115}, url={http://dx.doi.org/10.1007/s100050010058}, DOI={10.1007/s100050010058}, number={1}, journal={Microscopy and Microanalysis}, publisher={Oxford University Press (OUP)}, author={Larson, D.J. and Wissman, B.D. and Martens, R.L. and Viellieux, R.J. and Kelly, T.F. and Gribb, T.T. and Erskine, H.F. and Tabat, N.}, year={2001}, month=jan, pages={24–31} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        7,
        23
      ]
    ],
    "date-time": "2025-07-23T13:03:46Z",
    "timestamp": 1753275826504
  },
  "reference-count": 0,
  "publisher": "Oxford University Press (OUP)",
  "issue": "1",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            2002,
            2,
            2
          ]
        ],
        "date-time": "2002-02-02T00:00:00Z",
        "timestamp": 1012608000000
      },
      "content-version": "unspecified",
      "delay-in-days": 397,
      "URL": "https://www.cambridge.org/core/terms"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        2001,
        1
      ]
    ]
  },
  "abstract": "<jats:title>Abstract</jats:title><jats:p>A sample preparation method has been developed whereby sharp needle-shaped specimens for atom probe analysis are fabricated from multilayer thin films deposited onto silicon substrates. The specimens are fabricated in an orientation such that atom probe composition profiles across the layer interfaces can be determined with atomic-layer spatial resolution, i.e., the layer normals are parallel to the needle axis. The method uses standard silicon etching techniques and focused ion-beam milling. The feasibility and utility of this technique are shown through its application to a NiFe/CoFe/Cu/CoFe-based thin film structure.</jats:p>",
  "DOI": "10.1007/s100050010058",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2020,
        6,
        22
      ]
    ],
    "date-time": "2020-06-22T20:49:51Z",
    "timestamp": 1592858991000
  },
  "page": "24-31",
  "source": "Crossref",
  "is-referenced-by-count": 50,
  "title": "Advances in Atom Probe Specimen Fabrication from Planar Multilayer Thin Film Structures",
  "prefix": "10.1093",
  "volume": "7",
  "author": [
    {
      "given": "D.J.",
      "family": "Larson",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "B.D.",
      "family": "Wissman",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "R.L.",
      "family": "Martens",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "R.J.",
      "family": "Viellieux",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "T.F.",
      "family": "Kelly",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "T.T.",
      "family": "Gribb",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "H.F.",
      "family": "Erskine",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "N.",
      "family": "Tabat",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "286",
  "published-online": {
    "date-parts": [
      [
        2002,
        2,
        2
      ]
    ]
  },
  "container-title": "Microscopy and Microanalysis",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://www.cambridge.org/core/services/aop-cambridge-core/content/view/S1431927601010017",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2023,
        2,
        14
      ]
    ],
    "date-time": "2023-02-14T11:31:43Z",
    "timestamp": 1676374303000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://academic.oup.com/mam/article/7/1/24/6905519"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2001,
        1
      ]
    ]
  },
  "references-count": 0,
  "journal-issue": {
    "issue": "1",
    "published-print": {
      "date-parts": [
        [
          2001,
          1
        ]
      ]
    }
  },
  "alternative-id": [
    "S1431927601010017"
  ],
  "URL": "http://dx.doi.org/10.1007/S100050010058",
  "relation": {},
  "ISSN": [
    "1431-9276",
    "1435-8115"
  ],
  "subject": [],
  "container-title-short": "Microsc Microanal",
  "published": {
    "date-parts": [
      [
        2001,
        1
      ]
    ]
  }
}