DOI: 10.1007/bf02918525. Microfabrication and microsensors

10.1007/bf02918525

Crossref journal-article

Springer Science and Business Media LLC

Applied Biochemistry and Biotechnology (297)

Bibliography

Shoji, S., & Esashi, M. (1993). Microfabrication and microsensors. Applied Biochemistry and Biotechnology, 41(1â2), 21â34.

Authors 2

Shuichi Shoji (first)
Masayoshi Esashi (additional)

References 20 Referenced 6

Fung, C. D., Cheung, P. W., Ko W. H. and Fleming, D. G. (1985),Micromachining and Micropackaging of Transducers, Elsevier, Amsterdam. / Micromachining and Micropackaging of Transducers by C. D. Fung (1985)
de Rooij, N. F. and Van den Vlekkert, H. H. (1991),Chemical Sensor Technology 3, 213. / Chemical Sensor Technology by N. F. Rooij de (1991)
Sakai, T., Amemiya, I., Uno, S., and Katsura, M. (1990),Sensors and Actuators B1, 341. (10.1016/0925-4005(90)80226-P) / Sensors and Actuators by T. Sakai (1990)
Kimura, J., Kuriyama, T., and Kawana, Y. (1986),Sensors and Actuators 9, 373. (10.1016/0250-6874(86)80069-5) / Sensors and Actuators by J. Kimura (1986)
Peterson, K. E. (1992),Proc. IEEE, vol. 70, 420. (10.1109/PROC.1982.12331) / Proc. IEEE by K. E. Peterson (1992)
Shoji, S., Esashi, M., and Matsuo, T. (1988),Sensors and Actuators 14, 101. (10.1016/0250-6874(88)80057-X) / Sensors and Actuators by S. Shoji (1988)
Seidel, H., Csepregi, L., and Heuberger, A. (1990),J. Electrochem. Soc. 137, 3612. (10.1149/1.2086277) / J. Electrochem. Soc. by H. Seidel (1990)
Siedel, H., Csepregi, L., and Heuberger, A. (1990),J. Electrochem. Soc. 137, 3626. (10.1149/1.2086278) / J. Electrochem. Soc. by H. Siedel (1990)
Mehregany, M. and Senturia, S. D. (1988),Sensors and Actuators 13, 375. (10.1016/0250-6874(88)80050-7) / Sensors and Actuators by M. Mehregany (1988)
Schnakenbeg, U., Benecke, W., and Lochel, B. (1990),Sensors and Actuators A21–A23, 1031. (10.1016/0924-4247(90)87084-V) / Sensors and Actuators by U. Schnakenbeg (1990)
Tabata, O., Asahi, R., Funabashi, H., and Sugiyama, S. (1991),Tech. Dig. Int. Conference on Solid-State Sensors and Actuators Transducers '91 pp. 811.
Linden, Y., Tenerz, L., Tiren, J., and Hok, B. (1989),Sensors and Actuators 16, 67. (10.1016/0250-6874(89)80006-X) / Sensors and Actuators by Y. Linden (1989)
Kloeck, B., Collins, S. D., de Rooij, N. F., Smith, R. L. (1989),IEEE Trans. Elect. Dev. ED-36, 663. (10.1109/16.22472) / IEEE Trans. Elect. Dev. by B. Kloeck (1989)
Shoji, S. and Esashi, M. (1990),Tech. Dig. 9th Sensor Symposium, pp. 27.
Esashi, M., Ura, N., and Matsumoto, Y. (1992),Proc. Micro Electro Mechanical Systems MEMS'92, Travemunde, pp. 43.
Kudoh, T., Shoji, S., and Esashi, M.Sensors and Actuators A,29, 185. (10.1016/0924-4247(91)80014-G)
Yoshimi, K., Minami, K., Wakabayashi, Y., and Esashi, M. (1992),Tech. Dig. 11th Sensor Symposium, Tokyo, pp. 35.
Shoji, S. and Esashi, M. (1992),Sensors and Actuators B,8, 205. (10.1016/0925-4005(92)80182-W) / Sensors and Actuators B by S. Shoji (1992)
Nakagawa, S., Shoji, S., and Esashi, M., (1990),Proc. of IEEE Workshop of Micro Electro Mechanical Systems, Napa Valley, CA, pp. 89.
Shoji, S., Nakagawa, S., and Esashi, M. (1990),Sensors and Actuators A21–A23, 189. (10.1016/0924-4247(90)85036-4) / Sensors and Actuators by S. Shoji (1990)

Dates

Type	When
Created	17 years, 2 months ago (June 13, 2008, 10:09 a.m.)
Deposited	6 years, 3 months ago (May 21, 2019, 3:33 p.m.)
Indexed	1 year, 9 months ago (Oct. 30, 2023, 8:03 p.m.)
Issued	32 years, 4 months ago (April 1, 1993)
Published	32 years, 4 months ago (April 1, 1993)
Published Print	32 years, 4 months ago (April 1, 1993)

Funders 0

None

BibTeX

@article{Shoji_1993, title={Microfabrication and microsensors}, volume={41}, ISSN={1559-0291}, url={http://dx.doi.org/10.1007/bf02918525}, DOI={10.1007/bf02918525}, number={1–2}, journal={Applied Biochemistry and Biotechnology}, publisher={Springer Science and Business Media LLC}, author={Shoji, Shuichi and Esashi, Masayoshi}, year={1993}, month=apr, pages={21–34} }

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