DOI: 10.1007/bf02739536. Light optical deformation measurements in microbars with nanometer resolution

Light optical deformation measurements in microbars with nanometer resolution

10.1007/bf02739536

Crossref journal-article

Springer Science and Business Media LLC

Microsystem Technologies (297)

Bibliography

Mazza, E., Danuser, G., & Dual, J. (1995). Light optical deformation measurements in microbars with nanometer resolution. Microsystem Technologies, 2(1), 83â91.

Authors 3

E. Mazza (first)
G. Danuser (additional)
J. Dual (additional)

References 19 Referenced 10

Baltsavias E (1991) Multiphoto Geometrically Constrained Matching. PhD Thesis ETH Zürich / Multiphoto Geometrically Constrained Matching by E Baltsavias (1991)
Born M; Wolf E (1964) Principles of Optics. Pergamon Press 419–424
Danuser G;Kuebler O (1995) A Calibration Procedure for Light-Optical-and Scanning Electron Stereo Microscopes in Micro- and Nanorobotics. SPIE Proceedings, 2412, Three-Dimensional Microscopy II, 174–185 / SPIE Proceedings, 2412, Three-Dimensional Microscopy by G Danuser (1995)
Ding X (1990) Mechanical properties of silicon films and capacitive microsensors. PhD Thesis Case Western Reserve University
Foerstner W; Guelch E (1987) A fast Operator for Detection and Precise Location of Distinct Points, Corners and Centres of Circular Features. In Proc. of ICFPPD, 281–305
Gruen A (1984) Adaptive Least Squares Correlation. Concept and first Results. Internal Report prepared for Helava Associates, Inc., Columbus, Ohio, March 1984
Gruen A (1985) Adaptive Least Squares Correlation: A powerful Image Matching Technique. South African Journal of Photogrammetry, Remote Sensing and Cartography. 14, 3: 175–187 / South African Journal of Photogrammetry, Remote Sensing and Cartography by A Gruen (1985)
Gruen A; Stallmann D (1991) High accuracy edge matching with an extension of the MPGC-matching algorithm. SPIE Proceedings, 1526, Industrial Vision Metrology, Winnipeg, 42–55
Hough PVC (1962) A method and means for recognizing complex patterns. U.S. Patent 3,069,654
Kieswetter L;Houdeau D;Löper G;Zhang JM (1992) Wie belastbar ist Silizium in mikromechanischen Strukturen? Mikromechanik und integrierte Optik, München / Wie belastbar ist Silizium in mikromechanischen Strukturen? by L Kieswetter (1992)
Koskinen J;Steinwall JE;Soave R;Johnson HH (1993) Microtensile test of free-standing polysilicon fibers of various grain sizes. J. Micromech. Microeng. 3: 13–17 (10.1088/0960-1317/3/1/004) / J. Micromech. Microeng. by J Koskinen (1993)
Maas H;Stefanidis A;Gruen A (1994) From Pixels to Voxels: Tracking volume elements in sequences of 3D digital images. Int. Arch. of Photogrammetry and Remote Sensing, 30, Part 3/2; 539–546 / Int. Arch. of Photogrammetry and Remote Sensing by H Maas (1994)
Mechels S;Young M (1991) Video microscope with submicrometer resolution. Applied optics, 30, 16: 2202–2211 (10.1364/AO.30.002202) / Applied optics by S Mechels (1991)
Najafi K; Suzuki K (1989) A novel technique and structure for the measurement of intrinsic stress and Young's modulus of thin film. Proc. IEEE Micro Electro Mechanical Systems, Salt Lake City, Utah, Febr. 20–22, 96–97 (10.1109/MEMSYS.1989.77969)
Pethica JB;Oliver WC (1989) Mechanical properties of nanometer volumes of material: use of small area indentation. Mat. Res. Soc. Symp. Proc. 130:13 (10.1557/PROC-130-13) / Mat. Res. Soc. Symp. Proc. by JB Pethica (1989)
Shortis MR;Clarke T;Short T (1994) A comparison of some techniques for the sub-pixel location of discrete target images. In Proc. Videometrics III, SPIE, 2350:239–250 (10.1117/12.189136) / In Proc. Videometrics III, SPIE by MR Shortis (1994)
Tabata O;Kawahata K;Sugiyama S;Igarashi I (1989) Mechanical properties measurements of thin films using load-deflection of composite rectangular membranes. Sensor and Actuators 20:135–141 (10.1016/0250-6874(89)87111-2) / Sensor and Actuators by O Tabata (1989)
Tai YC; Muller RS (1988) Fracture strain of LPCVD polysilicon. Technical Digest IEEE solid state sensor and actuators, South Carolina (10.1109/SOLSEN.1988.26440)
Weihs TP;Hong S;Bravman JC;Nix WD (1989) Measuring the strength and stiffness of thin film materials by mechanically deflecting cantilever microbeams. Mat. Res. Soc. Symp. Proc. 130:87 (10.1557/PROC-130-87) / Mat. Res. Soc. Symp. Proc. by TP Weihs (1989)

Dates

Type	When
Created	17 years, 9 months ago (Nov. 4, 2007, 4:37 a.m.)
Deposited	6 years, 3 months ago (May 19, 2019, 10:45 p.m.)
Indexed	2 years, 3 months ago (May 18, 2023, 2:33 a.m.)
Issued	30 years, 5 months ago (March 1, 1995)
Published	30 years, 5 months ago (March 1, 1995)
Published Print	30 years, 5 months ago (March 1, 1995)

Funders 0

None

BibTeX

@article{Mazza_1995, title={Light optical deformation measurements in microbars with nanometer resolution}, volume={2}, ISSN={1432-1858}, url={http://dx.doi.org/10.1007/bf02739536}, DOI={10.1007/bf02739536}, number={1}, journal={Microsystem Technologies}, publisher={Springer Science and Business Media LLC}, author={Mazza, E. and Danuser, G. and Dual, J.}, year={1995}, month=mar, pages={83–91} }

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