DOI: 10.1007/bf02665972. Strain relaxation in Ge0.09Si0.91 epitaxial thin films measured by wafer curvature

Strain relaxation in Ge0.09Si0.91 epitaxial thin films measured by wafer curvature

10.1007/bf02665972

Crossref journal-article

Springer Science and Business Media LLC

Journal of Electronic Materials (297)

Bibliography

Volkert, C. A., Fitzgerald, E. A., Hull, R., Xie, Y. H., & Mii, Y. J. (1991). Strain relaxation in Ge0.09Si0.91 epitaxial thin films measured by wafer curvature. Journal of Electronic Materials, 20(7), 833â837.

Authors 5

C. A. Volkert (first)
E. A. Fitzgerald (additional)
R. Hull (additional)
Y. H. Xie (additional)
Y. J. Mii (additional)

References 17 Referenced 11

There are many papers on this subject, several reviews are: J. H. van der Merwe and C. A. Ball (p. 491) and J. W. Matthews (p. 559), in “Epitaxial Growth,” ed. J. W. Matthews (Academic, NY, 1975); R. Hull and J. C. Bean, in “Semiconductors and Semimetals,” Vol. 33; E. A. Fitzgerald, submitted to Mat. Sci. Rep.
C. Truesdell, “The Elements of Continuum Mechanics,” (Springer-Verlag, NY, 1965). / “The Elements of Continuum Mechanics by C. Truesdell (1965)
W. A. Brantley, J. Appl. Phys.44, 534 (1973). (10.1063/1.1661935) / J. Appl. Phys. by W. A. Brantley (1973)
J. W. Matthews, A. E. Blakeslee and S. Mader, Thin Solid Films33, 253 (1976). (10.1016/0040-6090(76)90085-7) / Thin Solid Films by J. W. Matthews (1976)
L. B. Freund, A. Bower and J. C. Ramirez, MRS Symp. Proa, (1988).
H. Alexander and P. Haasen, in “Solid State Physics” (Academic, NY, 1968), Vol. 22. / Solid State Physics by H. Alexander (1968)
B. W. Dodson and J. Y. Tsao, Appl. Phys. Lett.51,1325 (1987). (10.1063/1.98667) / Appl. Phys. Lett. by B. W. Dodson (1987)
M. Imai and K. Sumino, Philos. Mag. A47, 599 (1983). (10.1080/01418618308245248) / Philos. Mag. A by M. Imai (1983)
J. P. Hirth and J. Lothe, “Theory of Dislocations” (McGraw-Hill, NY, 1968). / Theory of Dislocations by J. P. Hirth (1968)
B. W. Dodson and J. Y. Tsao, Appl. Phys. Lett.53, 2498 (1988). (10.1063/1.100223) / Appl. Phys. Lett. by B. W. Dodson (1988)
W. Hagen and H. Strunk, Appl. Phys.17, 85 (1978); H. Strunk, W. Hagen and E. Bauser, Appl. Phys.18, 67 (1979). (10.1007/BF00885035) / Appl. Phys. by W. Hagen (1978)
R. Hull and J. C. Bean, Appl. Phys. Lett.54, 925 (1989). (10.1063/1.100810) / Appl. Phys. Lett. by R. Hull (1989)
B. W. Dodson, Appl. Phys. Lett.53, 37 (1988). (10.1063/1.100115) / Appl. Phys. Lett. by B. W. Dodson (1988)
Wafers were obtained from Virginia Semiconductor, Inc., Po-whatan, VA.
C. A. Volkert, to be published in J. Appl. Phys.
J. W. Christian, “The Theory of Transformations in Metals and Alloys,” (Pergamon, Oxford, 1975). / The Theory of Transformations in Metals and Alloys by J. W. Christian (1975)
Y. Beers, “Theory of Error,” (Addison-Wesley, MA, 1953). / Theory of Error by Y. Beers (1953)

Dates

Type	When
Created	18 years, 1 month ago (July 16, 2007, 5:52 p.m.)
Deposited	6 years, 3 months ago (May 20, 2019, 9:36 p.m.)
Indexed	1 year, 7 months ago (Feb. 3, 2024, 2:08 p.m.)
Issued	34 years, 2 months ago (July 1, 1991)
Published	34 years, 2 months ago (July 1, 1991)
Published Print	34 years, 2 months ago (July 1, 1991)

Funders 0

None

BibTeX

@article{Volkert_1991, title={Strain relaxation in Ge0.09Si0.91 epitaxial thin films measured by wafer curvature}, volume={20}, ISSN={1543-186X}, url={http://dx.doi.org/10.1007/bf02665972}, DOI={10.1007/bf02665972}, number={7}, journal={Journal of Electronic Materials}, publisher={Springer Science and Business Media LLC}, author={Volkert, C. A. and Fitzgerald, E. A. and Hull, R. and Xie, Y. H. and Mii, Y. J.}, year={1991}, month=jul, pages={833–837} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2024,
        2,
        3
      ]
    ],
    "date-time": "2024-02-03T19:08:32Z",
    "timestamp": 1706987312143
  },
  "reference-count": 17,
  "publisher": "Springer Science and Business Media LLC",
  "issue": "7",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            1991,
            7,
            1
          ]
        ],
        "date-time": "1991-07-01T00:00:00Z",
        "timestamp": 678326400000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "http://www.springer.com/tdm"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        1991,
        7
      ]
    ]
  },
  "DOI": "10.1007/bf02665972",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2007,
        7,
        16
      ]
    ],
    "date-time": "2007-07-16T21:52:50Z",
    "timestamp": 1184622770000
  },
  "page": "833-837",
  "source": "Crossref",
  "is-referenced-by-count": 11,
  "title": "Strain relaxation in Ge0.09Si0.91 epitaxial thin films measured by wafer curvature",
  "prefix": "10.1007",
  "volume": "20",
  "author": [
    {
      "given": "C. A.",
      "family": "Volkert",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "E. A.",
      "family": "Fitzgerald",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "R.",
      "family": "Hull",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Y. H.",
      "family": "Xie",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Y. J.",
      "family": "Mii",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "297",
  "reference": [
    {
      "key": "BF02665972_CR1",
      "unstructured": "There are many papers on this subject, several reviews are: J. H. van der Merwe and C. A. Ball (p. 491) and J. W. Matthews (p. 559), in \u201cEpitaxial Growth,\u201d ed. J. W. Matthews (Academic, NY, 1975); R. Hull and J. C. Bean, in \u201cSemiconductors and Semimetals,\u201d Vol. 33; E. A. Fitzgerald, submitted to Mat. Sci. Rep."
    },
    {
      "key": "BF02665972_CR2",
      "volume-title": "\u201cThe Elements of Continuum Mechanics",
      "author": "C. Truesdell",
      "year": "1965",
      "unstructured": "C. Truesdell, \u201cThe Elements of Continuum Mechanics,\u201d (Springer-Verlag, NY, 1965)."
    },
    {
      "key": "BF02665972_CR3",
      "doi-asserted-by": "crossref",
      "first-page": "534",
      "DOI": "10.1063/1.1661935",
      "volume": "44",
      "author": "W. A. Brantley",
      "year": "1973",
      "unstructured": "W. A. Brantley, J. Appl. Phys.44, 534 (1973).",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "BF02665972_CR4",
      "doi-asserted-by": "crossref",
      "first-page": "253",
      "DOI": "10.1016/0040-6090(76)90085-7",
      "volume": "33",
      "author": "J. W. Matthews",
      "year": "1976",
      "unstructured": "J. W. Matthews, A. E. Blakeslee and S. Mader, Thin Solid Films33, 253 (1976).",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "BF02665972_CR5",
      "unstructured": "L. B. Freund, A. Bower and J. C. Ramirez, MRS Symp. Proa, (1988)."
    },
    {
      "key": "BF02665972_CR6",
      "volume-title": "Solid State Physics",
      "author": "H. Alexander",
      "year": "1968",
      "unstructured": "H. Alexander and P. Haasen, in \u201cSolid State Physics\u201d (Academic, NY, 1968), Vol. 22."
    },
    {
      "key": "BF02665972_CR7",
      "doi-asserted-by": "crossref",
      "first-page": "1325",
      "DOI": "10.1063/1.98667",
      "volume": "51",
      "author": "B. W. Dodson",
      "year": "1987",
      "unstructured": "B. W. Dodson and J. Y. Tsao, Appl. Phys. Lett.51,1325 (1987).",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "BF02665972_CR8",
      "doi-asserted-by": "crossref",
      "first-page": "599",
      "DOI": "10.1080/01418618308245248",
      "volume": "47",
      "author": "M. Imai",
      "year": "1983",
      "unstructured": "M. Imai and K. Sumino, Philos. Mag. A47, 599 (1983).",
      "journal-title": "Philos. Mag. A"
    },
    {
      "key": "BF02665972_CR9",
      "volume-title": "Theory of Dislocations",
      "author": "J. P. Hirth",
      "year": "1968",
      "unstructured": "J. P. Hirth and J. Lothe, \u201cTheory of Dislocations\u201d (McGraw-Hill, NY, 1968)."
    },
    {
      "key": "BF02665972_CR10",
      "doi-asserted-by": "crossref",
      "first-page": "2498",
      "DOI": "10.1063/1.100223",
      "volume": "53",
      "author": "B. W. Dodson",
      "year": "1988",
      "unstructured": "B. W. Dodson and J. Y. Tsao, Appl. Phys. Lett.53, 2498 (1988).",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "BF02665972_CR11",
      "doi-asserted-by": "crossref",
      "first-page": "85",
      "DOI": "10.1007/BF00885035",
      "volume": "17",
      "author": "W. Hagen",
      "year": "1978",
      "unstructured": "W. Hagen and H. Strunk, Appl. Phys.17, 85 (1978); H. Strunk, W. Hagen and E. Bauser, Appl. Phys.18, 67 (1979).",
      "journal-title": "Appl. Phys."
    },
    {
      "key": "BF02665972_CR12",
      "doi-asserted-by": "crossref",
      "first-page": "925",
      "DOI": "10.1063/1.100810",
      "volume": "54",
      "author": "R. Hull",
      "year": "1989",
      "unstructured": "R. Hull and J. C. Bean, Appl. Phys. Lett.54, 925 (1989).",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "BF02665972_CR13",
      "doi-asserted-by": "crossref",
      "first-page": "37",
      "DOI": "10.1063/1.100115",
      "volume": "53",
      "author": "B. W. Dodson",
      "year": "1988",
      "unstructured": "B. W. Dodson, Appl. Phys. Lett.53, 37 (1988).",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "BF02665972_CR14",
      "unstructured": "Wafers were obtained from Virginia Semiconductor, Inc., Po-whatan, VA."
    },
    {
      "key": "BF02665972_CR15",
      "unstructured": "C. A. Volkert, to be published in J. Appl. Phys."
    },
    {
      "key": "BF02665972_CR16",
      "volume-title": "The Theory of Transformations in Metals and Alloys",
      "author": "J. W. Christian",
      "year": "1975",
      "unstructured": "J. W. Christian, \u201cThe Theory of Transformations in Metals and Alloys,\u201d (Pergamon, Oxford, 1975)."
    },
    {
      "key": "BF02665972_CR17",
      "volume-title": "Theory of Error",
      "author": "Y. Beers",
      "year": "1953",
      "unstructured": "Y. Beers, \u201cTheory of Error,\u201d (Addison-Wesley, MA, 1953)."
    }
  ],
  "container-title": "Journal of Electronic Materials",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "http://link.springer.com/content/pdf/10.1007/BF02665972.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "http://link.springer.com/article/10.1007/BF02665972/fulltext.html",
      "content-type": "text/html",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "http://link.springer.com/content/pdf/10.1007/BF02665972",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2019,
        5,
        21
      ]
    ],
    "date-time": "2019-05-21T01:36:06Z",
    "timestamp": 1558402566000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "http://link.springer.com/10.1007/BF02665972"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1991,
        7
      ]
    ]
  },
  "references-count": 17,
  "journal-issue": {
    "issue": "7",
    "published-print": {
      "date-parts": [
        [
          1991,
          7
        ]
      ]
    }
  },
  "alternative-id": [
    "BF02665972"
  ],
  "URL": "http://dx.doi.org/10.1007/BF02665972",
  "relation": {},
  "ISSN": [
    "0361-5235",
    "1543-186X"
  ],
  "subject": [],
  "container-title-short": "JEM",
  "published": {
    "date-parts": [
      [
        1991,
        7
      ]
    ]
  }
}