DOI: 10.1007/bf02665029. Preparation and characterization of thin films of MgO, Al2O3 and MgAl2O4 by atomic layer deposition

Preparation and characterization of thin films of MgO, Al2O3 and MgAl2O4 by atomic layer deposition

10.1007/bf02665029

Crossref journal-article

Springer Science and Business Media LLC

Journal of Electronic Materials (297)

Bibliography

Huang, R., & Kitai, A. H. (1993). Preparation and characterization of thin films of MgO, Al2O3 and MgAl2O4 by atomic layer deposition. Journal of Electronic Materials, 22(2), 215â220.

Authors 2

Ron Huang (first)
Adrian H. Kitai (additional)

References 29 Referenced 38

D.K. Fork, D.B. Fenner, G.A.N. Connell, Julia M. Phillips and T.H. Geballe,Appl. Phys. Lett. 57, 1137 (1990). (10.1063/1.104220) / Appl. Phys. Lett. by D.K. Fork (1990)
M. Mikami, Y. Hokari, E. Egami, H. Tsuya and M. Kanamori,Ext. Abst. 15th Conf. on Solid State Devices and Mater., Tokyo, 31 (1983).
H. Fukumoto, T. Imura and Y. Osaka,Appl. Phys. Lett. 55, 360 (1989). (10.1063/1.102420) / Appl. Phys. Lett. by H. Fukumoto (1989)
T. Inoue, Y. Yamamoto, S. Koyama, S. Suzuki and Y. Ueda,Appl. Phys. Lett. 56, 1332 (1990). (10.1063/1.103202) / Appl. Phys. Lett. by T. Inoue (1990)
D.K. Fork, D.B. Fenner and T.H. Geballe,J. Appl. Phys. 68, 4316 (1990). (10.1063/1.346228) / J. Appl. Phys. by D.K. Fork (1990)
M. Ishida, K. Sawada, S. Yamagushi, T. Nakamura and T. Suzaki,Appl. Phys. Lett. 55, 556 (1989). (10.1063/1.102434) / Appl. Phys. Lett. by M. Ishida (1989)
W.J. DeSisto and R. L. Henry,J. Cryst. Growth 109, 314(1991). (10.1016/0022-0248(91)90196-C) / J. Cryst. Growth by W.J. DeSisto (1991)
J.A. Aboaf,J. Electrochem. Soc. 114, 948 (1967). (10.1149/1.2426787) / J. Electrochem. Soc. by J.A. Aboaf (1967)
J. Saraie, J. Kwon and Y. Yodogawa,J. Electrochem. Soc. 132, 890 (1985). (10.1149/1.2113979) / J. Electrochem. Soc. by J. Saraie (1985)
J. Saraie, K. Ono and S. Takeuchi,J. Electrochem. Soc. 136, 3139 (1989). (10.1149/1.2096415) / J. Electrochem. Soc. by J. Saraie (1989)
T.H. Hua and M. Armgarth,J. Electron. Mater. 16, 27 (1987). (10.1007/BF02667787) / J. Electron. Mater. by T.H. Hua (1987)
M.O. Aboelfotoh,J. Vac. Sci. Technol. 12, 67 (1975). (10.1116/1.568622) / J. Vac. Sci. Technol. by M.O. Aboelfotoh (1975)
H.Z. Durusoy,J. Mat. Sci. Lett. 10, 1023 (1991). (10.1007/BF00721834) / J. Mat. Sci. Lett. by H.Z. Durusoy (1991)
B.S. Kwak, E.P. Boyd, K. Zhang, and A. Erbil,Appl. Phys. Lett. 54, 2542 (1989). (10.1063/1.101044) / Appl. Phys. Lett. by B.S. Kwak (1989)
T. Saburo, N. Hidenori and H. Kenjiro,Jpn. J. Appl. Phys. 29, 1059 (1990). (10.1143/JJAP.29.1059) / Jpn. J. Appl. Phys. by T. Saburo (1990)
M. Toshiro and S. Jun,Jpn. J. Appl. Phys. 29, L810 (1990). (10.1143/JJAP.29.L810) / Jpn. J. Appl. Phys. by M. Toshiro (1990)
N. Dalacu, A.H. Kitai, B.W. Sanders and R. Huang,Thin Solid Films 209, 207 (1992). (10.1016/0040-6090(92)90676-3) / Thin Solid Films by N. Dalacu (1992)
M. Ihara, Y. Arimoto, M. Jifuku, T. Kodama, H. Yamawak and T. Yamaoka,J. Electrochem. Soc. 129, 2569 (1982). (10.1149/1.2123611) / J. Electrochem. Soc. by M. Ihara (1982)
T. Suntola and M. J. Antson, U.S. Patent No. 4,058,430 (1977).
R. Clausen, K. Petermann,IEEE J. Quantum Electron 24, 1114(1988). (10.1109/3.234) / IEEE J. Quantum Electron by R. Clausen (1988)
D.K. Fork, F.A. Ponce, J.C. Tramontana and T.H. Geballe,Appl. Phys. Lett. 58, 2295 (1991). / Appl. Phys. Lett. by D.K. Fork (1991)
W. Hsu and R. Raj,Appl. Phys. Lett. 60, 3105 (1992). (10.1063/1.106766) / Appl. Phys. Lett. by W. Hsu (1992)
T. Suntola,Mat. Sci. Report 4, 261 (1989). (10.1016/S0920-2307(89)80006-4) / Mat. Sci. Report by T. Suntola (1989)
M. Ozeki,Mat. Sci. Report 8, 97 (1992). (10.1016/0920-2307(92)90008-O) / Mat. Sci. Report by M. Ozeki (1992)
G. Oya, M. Yoshida and Y. Sawada,Appl. Phys. Lett. 51, 1143 (1987). (10.1063/1.98765) / Appl. Phys. Lett. by G. Oya (1987)
G. Oya and Y. Sawada,J. Cryst. Growth 99, 572 (1990). (10.1016/0022-0248(90)90585-9) / J. Cryst. Growth by G. Oya (1990)
R. Huang and A Kitai,Appl. Phys. Lett. 61, 1450 (1992). (10.1063/1.107514) / Appl. Phys. Lett. by R. Huang (1992)
R. Huang and A. Kitai, to be published.
R. Kelly,Surf. Sci. 100, 85 (1980). (10.1016/0039-6028(80)90446-X) / Surf. Sci. by R. Kelly (1980)

Dates

Type	When
Created	18 years, 1 month ago (July 16, 2007, 6:17 p.m.)
Deposited	3 years, 3 months ago (May 15, 2022, 2:17 p.m.)
Indexed	1 month ago (Aug. 3, 2025, 7:06 p.m.)
Issued	32 years, 7 months ago (Feb. 1, 1993)
Published	32 years, 7 months ago (Feb. 1, 1993)
Published Print	32 years, 7 months ago (Feb. 1, 1993)

Funders 0

None

BibTeX

@article{Huang_1993, title={Preparation and characterization of thin films of MgO, Al2O3 and MgAl2O4 by atomic layer deposition}, volume={22}, ISSN={1543-186X}, url={http://dx.doi.org/10.1007/bf02665029}, DOI={10.1007/bf02665029}, number={2}, journal={Journal of Electronic Materials}, publisher={Springer Science and Business Media LLC}, author={Huang, Ron and Kitai, Adrian H.}, year={1993}, month=feb, pages={215–220} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        8,
        3
      ]
    ],
    "date-time": "2025-08-03T23:06:05Z",
    "timestamp": 1754262365457
  },
  "reference-count": 29,
  "publisher": "Springer Science and Business Media LLC",
  "issue": "2",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            1993,
            2,
            1
          ]
        ],
        "date-time": "1993-02-01T00:00:00Z",
        "timestamp": 728524800000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "https://www.springer.com/tdm"
    },
    {
      "start": {
        "date-parts": [
          [
            1993,
            2,
            1
          ]
        ],
        "date-time": "1993-02-01T00:00:00Z",
        "timestamp": 728524800000
      },
      "content-version": "vor",
      "delay-in-days": 0,
      "URL": "https://www.springer.com/tdm"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        1993,
        2
      ]
    ]
  },
  "DOI": "10.1007/bf02665029",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2007,
        7,
        16
      ]
    ],
    "date-time": "2007-07-16T22:17:30Z",
    "timestamp": 1184624250000
  },
  "page": "215-220",
  "source": "Crossref",
  "is-referenced-by-count": 38,
  "title": "Preparation and characterization of thin films of MgO, Al2O3 and MgAl2O4 by atomic layer deposition",
  "prefix": "10.1007",
  "volume": "22",
  "author": [
    {
      "given": "Ron",
      "family": "Huang",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "Adrian H.",
      "family": "Kitai",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "297",
  "reference": [
    {
      "key": "BF02665029_CR1",
      "doi-asserted-by": "publisher",
      "first-page": "1137",
      "DOI": "10.1063/1.104220",
      "volume": "57",
      "author": "D.K. Fork",
      "year": "1990",
      "unstructured": "D.K. Fork, D.B. Fenner, G.A.N. Connell, Julia M. Phillips and T.H. Geballe,Appl. Phys. Lett. 57, 1137 (1990).",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "BF02665029_CR2",
      "unstructured": "M. Mikami, Y. Hokari, E. Egami, H. Tsuya and M. Kanamori,Ext. Abst. 15th Conf. on Solid State Devices and Mater., Tokyo, 31 (1983)."
    },
    {
      "key": "BF02665029_CR3",
      "doi-asserted-by": "publisher",
      "first-page": "360",
      "DOI": "10.1063/1.102420",
      "volume": "55",
      "author": "H. Fukumoto",
      "year": "1989",
      "unstructured": "H. Fukumoto, T. Imura and Y. Osaka,Appl. Phys. Lett. 55, 360 (1989).",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "BF02665029_CR4",
      "doi-asserted-by": "publisher",
      "first-page": "1332",
      "DOI": "10.1063/1.103202",
      "volume": "56",
      "author": "T. Inoue",
      "year": "1990",
      "unstructured": "T. Inoue, Y. Yamamoto, S. Koyama, S. Suzuki and Y. Ueda,Appl. Phys. Lett. 56, 1332 (1990).",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "BF02665029_CR5",
      "doi-asserted-by": "publisher",
      "first-page": "4316",
      "DOI": "10.1063/1.346228",
      "volume": "68",
      "author": "D.K. Fork",
      "year": "1990",
      "unstructured": "D.K. Fork, D.B. Fenner and T.H. Geballe,J. Appl. Phys. 68, 4316 (1990).",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "BF02665029_CR6",
      "doi-asserted-by": "publisher",
      "first-page": "556",
      "DOI": "10.1063/1.102434",
      "volume": "55",
      "author": "M. Ishida",
      "year": "1989",
      "unstructured": "M. Ishida, K. Sawada, S. Yamagushi, T. Nakamura and T. Suzaki,Appl. Phys. Lett. 55, 556 (1989).",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "BF02665029_CR7",
      "doi-asserted-by": "publisher",
      "first-page": "314",
      "DOI": "10.1016/0022-0248(91)90196-C",
      "volume": "109",
      "author": "W.J. DeSisto",
      "year": "1991",
      "unstructured": "W.J. DeSisto and R. L. Henry,J. Cryst. Growth 109, 314(1991).",
      "journal-title": "J. Cryst. Growth"
    },
    {
      "key": "BF02665029_CR8",
      "doi-asserted-by": "publisher",
      "first-page": "948",
      "DOI": "10.1149/1.2426787",
      "volume": "114",
      "author": "J.A. Aboaf",
      "year": "1967",
      "unstructured": "J.A. Aboaf,J. Electrochem. Soc. 114, 948 (1967).",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "BF02665029_CR9",
      "doi-asserted-by": "publisher",
      "first-page": "890",
      "DOI": "10.1149/1.2113979",
      "volume": "132",
      "author": "J. Saraie",
      "year": "1985",
      "unstructured": "J. Saraie, J. Kwon and Y. Yodogawa,J. Electrochem. Soc. 132, 890 (1985).",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "BF02665029_CR10",
      "doi-asserted-by": "publisher",
      "first-page": "3139",
      "DOI": "10.1149/1.2096415",
      "volume": "136",
      "author": "J. Saraie",
      "year": "1989",
      "unstructured": "J. Saraie, K. Ono and S. Takeuchi,J. Electrochem. Soc. 136, 3139 (1989).",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "BF02665029_CR11",
      "doi-asserted-by": "crossref",
      "first-page": "27",
      "DOI": "10.1007/BF02667787",
      "volume": "16",
      "author": "T.H. Hua",
      "year": "1987",
      "unstructured": "T.H. Hua and M. Armgarth,J. Electron. Mater. 16, 27 (1987).",
      "journal-title": "J. Electron. Mater."
    },
    {
      "key": "BF02665029_CR12",
      "doi-asserted-by": "publisher",
      "first-page": "67",
      "DOI": "10.1116/1.568622",
      "volume": "12",
      "author": "M.O. Aboelfotoh",
      "year": "1975",
      "unstructured": "M.O. Aboelfotoh,J. Vac. Sci. Technol. 12, 67 (1975).",
      "journal-title": "J. Vac. Sci. Technol."
    },
    {
      "key": "BF02665029_CR13",
      "doi-asserted-by": "publisher",
      "first-page": "1023",
      "DOI": "10.1007/BF00721834",
      "volume": "10",
      "author": "H.Z. Durusoy",
      "year": "1991",
      "unstructured": "H.Z. Durusoy,J. Mat. Sci. Lett. 10, 1023 (1991).",
      "journal-title": "J. Mat. Sci. Lett."
    },
    {
      "key": "BF02665029_CR14",
      "doi-asserted-by": "publisher",
      "first-page": "2542",
      "DOI": "10.1063/1.101044",
      "volume": "54",
      "author": "B.S. Kwak",
      "year": "1989",
      "unstructured": "B.S. Kwak, E.P. Boyd, K. Zhang, and A. Erbil,Appl. Phys. Lett. 54, 2542 (1989).",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "BF02665029_CR15",
      "doi-asserted-by": "publisher",
      "first-page": "1059",
      "DOI": "10.1143/JJAP.29.1059",
      "volume": "29",
      "author": "T. Saburo",
      "year": "1990",
      "unstructured": "T. Saburo, N. Hidenori and H. Kenjiro,Jpn. J. Appl. Phys. 29, 1059 (1990).",
      "journal-title": "Jpn. J. Appl. Phys."
    },
    {
      "key": "BF02665029_CR16",
      "doi-asserted-by": "publisher",
      "first-page": "L810",
      "DOI": "10.1143/JJAP.29.L810",
      "volume": "29",
      "author": "M. Toshiro",
      "year": "1990",
      "unstructured": "M. Toshiro and S. Jun,Jpn. J. Appl. Phys. 29, L810 (1990).",
      "journal-title": "Jpn. J. Appl. Phys."
    },
    {
      "key": "BF02665029_CR17",
      "doi-asserted-by": "publisher",
      "first-page": "207",
      "DOI": "10.1016/0040-6090(92)90676-3",
      "volume": "209",
      "author": "N. Dalacu",
      "year": "1992",
      "unstructured": "N. Dalacu, A.H. Kitai, B.W. Sanders and R. Huang,Thin Solid Films 209, 207 (1992).",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "BF02665029_CR18",
      "doi-asserted-by": "publisher",
      "first-page": "2569",
      "DOI": "10.1149/1.2123611",
      "volume": "129",
      "author": "M. Ihara",
      "year": "1982",
      "unstructured": "M. Ihara, Y. Arimoto, M. Jifuku, T. Kodama, H. Yamawak and T. Yamaoka,J. Electrochem. Soc. 129, 2569 (1982).",
      "journal-title": "J. Electrochem. Soc."
    },
    {
      "key": "BF02665029_CR19",
      "unstructured": "T. Suntola and M. J. Antson, U.S. Patent No. 4,058,430 (1977)."
    },
    {
      "key": "BF02665029_CR20",
      "doi-asserted-by": "publisher",
      "first-page": "1114",
      "DOI": "10.1109/3.234",
      "volume": "24",
      "author": "R. Clausen",
      "year": "1988",
      "unstructured": "R. Clausen, K. Petermann,IEEE J. Quantum Electron 24, 1114(1988).",
      "journal-title": "IEEE J. Quantum Electron"
    },
    {
      "key": "BF02665029_CR21",
      "first-page": "2295",
      "volume": "58",
      "author": "D.K. Fork",
      "year": "1991",
      "unstructured": "D.K. Fork, F.A. Ponce, J.C. Tramontana and T.H. Geballe,Appl. Phys. Lett. 58, 2295 (1991).",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "BF02665029_CR22",
      "doi-asserted-by": "publisher",
      "first-page": "3105",
      "DOI": "10.1063/1.106766",
      "volume": "60",
      "author": "W. Hsu",
      "year": "1992",
      "unstructured": "W. Hsu and R. Raj,Appl. Phys. Lett. 60, 3105 (1992).",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "BF02665029_CR23",
      "doi-asserted-by": "publisher",
      "first-page": "261",
      "DOI": "10.1016/S0920-2307(89)80006-4",
      "volume": "4",
      "author": "T. Suntola",
      "year": "1989",
      "unstructured": "T. Suntola,Mat. Sci. Report 4, 261 (1989).",
      "journal-title": "Mat. Sci. Report"
    },
    {
      "key": "BF02665029_CR24",
      "doi-asserted-by": "publisher",
      "first-page": "97",
      "DOI": "10.1016/0920-2307(92)90008-O",
      "volume": "8",
      "author": "M. Ozeki",
      "year": "1992",
      "unstructured": "M. Ozeki,Mat. Sci. Report 8, 97 (1992).",
      "journal-title": "Mat. Sci. Report"
    },
    {
      "key": "BF02665029_CR25",
      "doi-asserted-by": "publisher",
      "first-page": "1143",
      "DOI": "10.1063/1.98765",
      "volume": "51",
      "author": "G. Oya",
      "year": "1987",
      "unstructured": "G. Oya, M. Yoshida and Y. Sawada,Appl. Phys. Lett. 51, 1143 (1987).",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "BF02665029_CR26",
      "doi-asserted-by": "publisher",
      "first-page": "572",
      "DOI": "10.1016/0022-0248(90)90585-9",
      "volume": "99",
      "author": "G. Oya",
      "year": "1990",
      "unstructured": "G. Oya and Y. Sawada,J. Cryst. Growth 99, 572 (1990).",
      "journal-title": "J. Cryst. Growth"
    },
    {
      "key": "BF02665029_CR27",
      "doi-asserted-by": "publisher",
      "first-page": "1450",
      "DOI": "10.1063/1.107514",
      "volume": "61",
      "author": "R. Huang",
      "year": "1992",
      "unstructured": "R. Huang and A Kitai,Appl. Phys. Lett. 61, 1450 (1992).",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "BF02665029_CR28",
      "unstructured": "R. Huang and A. Kitai, to be published."
    },
    {
      "key": "BF02665029_CR29",
      "doi-asserted-by": "publisher",
      "first-page": "85",
      "DOI": "10.1016/0039-6028(80)90446-X",
      "volume": "100",
      "author": "R. Kelly",
      "year": "1980",
      "unstructured": "R. Kelly,Surf. Sci. 100, 85 (1980).",
      "journal-title": "Surf. Sci."
    }
  ],
  "container-title": "Journal of Electronic Materials",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://link.springer.com/content/pdf/10.1007/BF02665029.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://link.springer.com/article/10.1007/BF02665029/fulltext.html",
      "content-type": "text/html",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "http://link.springer.com/content/pdf/10.1007/BF02665029",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    },
    {
      "URL": "https://link.springer.com/content/pdf/10.1007/BF02665029.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2022,
        5,
        15
      ]
    ],
    "date-time": "2022-05-15T18:17:25Z",
    "timestamp": 1652638645000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://link.springer.com/10.1007/BF02665029"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1993,
        2
      ]
    ]
  },
  "references-count": 29,
  "journal-issue": {
    "issue": "2",
    "published-print": {
      "date-parts": [
        [
          1993,
          2
        ]
      ]
    }
  },
  "alternative-id": [
    "BF02665029"
  ],
  "URL": "http://dx.doi.org/10.1007/BF02665029",
  "relation": {},
  "ISSN": [
    "0361-5235",
    "1543-186X"
  ],
  "subject": [],
  "container-title-short": "J. Electron. Mater.",
  "published": {
    "date-parts": [
      [
        1993,
        2
      ]
    ]
  }
}