DOI: 10.1007/bf01132928. The influence of environmental fluids and temperature on the cut-surface morphology of single-crystal silicon

The influence of environmental fluids and temperature on the cut-surface morphology of single-crystal silicon

10.1007/bf01132928

Crossref journal-article

Springer Science and Business Media LLC

Journal of Materials Science (297)

Bibliography

Kim, J.-M., & Danyluk, S. (1987). The influence of environmental fluids and temperature on the cut-surface morphology of single-crystal silicon. Journal of Materials Science, 22(6), 1987â1992.

Authors 2

Jae-Mook Kim (first)
S. Danyluk (additional)

References 13 Referenced 3

S. J. Schneider andR. W. Rice (eds),NBS Special Publication (U.S. Government Printing Office, Washington, D.C.)348 (1973) pp. 178?212. / NBS Special Publication (1973)
R. W. Rice, ?Ceramics for High Performance Applications?, (Brook Hill Publishing Co., Chestnut Hill, Massachusetts, 1974) pp. 287?343. / Ceramics for High Performance Applications by R. W. Rice (1974)
M. L. Joshi andJ. K. Howard, ?Silicon Device Processing? (NBS Special Publication, U.S. Government Printing Office, Washington, D.C., 1970) pp. 313?364. / Silicon Device Processing by M. L. Joshi (1970)
T. M. Buck andR. L. Meek,ibid.?, 1970) pp. 419?430. / Silicon Device Processing by T. M. Buck (1970)
R. L. Meek andM. C. Huffstutler Jr,J. Electrochem. Soc. 116 (6) (1980) 893. (10.1149/1.2412121) / J. Electrochem. Soc. by R. L. Meek (1980)
D. S. Lim, PhD. thesis, University of Illinois, Chicago (1986).
S. W. Lee, PhD. thesis, University of Illinois, Chicago (1986).
K. E. Puttick andM. A. Shahid,Phys. Status Solidi (a) 59 (1980) k5. (10.1002/pssa.2210590155) / Phys. Status Solidi (a) by K. E. Puttick (1980)
G. L. Pearson, W. T. Read Jr andW. L. Feldmann,Acta Metall. 5 (1957) 181. (10.1016/0001-6160(57)90164-5) / Acta Metall. by G. L. Pearson (1957)
R. Stickler andG. R. Booker,Phil. Mag. 8 (1963) 859. (10.1080/14786436308213842) / Phil. Mag. by R. Stickler (1963)
S. W. Lee, D. S. Lim andS. Danyluk,J. Mater. Sci. Lett. 3 (1984) 651. (10.1007/BF00719638) / J. Mater. Sci. Lett. by S. W. Lee (1984)
S. W. Lee andS. Danyluk, private communication (1986).
C. J. Gallagher,Phys. Rev. 88 (4) (1952) 721. (10.1103/PhysRev.88.721) / Phys. Rev. by C. J. Gallagher (1952)

Dates

Type	When
Created	20 years, 6 months ago (Feb. 7, 2005, 12:49 a.m.)
Deposited	6 years, 3 months ago (May 1, 2019, 6:21 a.m.)
Indexed	2 years, 2 months ago (June 16, 2023, 9:14 p.m.)
Issued	38 years, 2 months ago (June 1, 1987)
Published	38 years, 2 months ago (June 1, 1987)
Published Print	38 years, 2 months ago (June 1, 1987)

Funders 0

None

BibTeX

@article{Kim_1987, title={The influence of environmental fluids and temperature on the cut-surface morphology of single-crystal silicon}, volume={22}, ISSN={1573-4803}, url={http://dx.doi.org/10.1007/bf01132928}, DOI={10.1007/bf01132928}, number={6}, journal={Journal of Materials Science}, publisher={Springer Science and Business Media LLC}, author={Kim, Jae-Mook and Danyluk, S.}, year={1987}, month=jun, pages={1987–1992} }

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