DOI: 10.1007/bf00618859. Computer simulation of two-component target sputtering

Computer simulation of two-component target sputtering

10.1007/bf00618859

Crossref journal-article

Springer Science and Business Media LLC

Applied Physics A Solids and Surfaces (297)

Bibliography

Eckstein, W., & Biersack, J. P. (1985). Computer simulation of two-component target sputtering. Applied Physics A Solids and Surfaces, 37(2), 95â108.

Authors 2

W. Eckstein (first)
J. P. Biersack (additional)

References 28 Referenced 111

Sputtering by Particle Bombardment I, ed. by R. Behrisch, Topics Appl. Phys.47 (Springer Berlin, Heidelberg 1981) / Sputtering by Particle Bombardment I / 47 (1981)
J.P. Biersack, W. Eckstein: Appl. Phys.34, 73 (1984) (10.1007/BF00614759) / Appl. Phys. by J.P. Biersack (1984)
M.L. Roush, T.D. Andreadis, O.F. Goktepe: Radiat. Eff.55, 119 (1981) (10.1080/00337578108225473) / Radiat. Eff. by M.L. Roush (1981)
W. Möller, W. Eckstein: NIM B2, 814 (1984) (10.1016/0168-583X(84)90321-5) / NIM by W. Möller (1984)
G. Betz, G.K. Wehner: InSputtering by Particle Bombardment II ed. by R. Behrisch, Topics Appl. Phys.52 (Springer, Berlin, Heidelberg 1983) p. 11 / Topics Appl. Phys.52 by G. Betz (1983)
H.H. Andersen: InIon Implantation and Beam Processing, ed. by J.S. Williams, J.M. Poate (Academic, Sydney 1984) p. 128 / Ion Implantation and Beam Processing by H.H. Andersen (1984)
P. Sigmund: J. Vac. Sci. Technol.17, 396 (1980) (10.1116/1.570399) / J. Vac. Sci. Technol. by P. Sigmund (1980)
P. Sigmund, A. Oliva, G. Falcone: Nucl. Instrum. Methods194, 541 (1982) (10.1016/0029-554X(82)90578-X) / Nucl. Instrum. Methods by P. Sigmund (1982)
G. Falcone, A. Oliva: Appl. Phys. A33, 175 (1984) (10.1007/BF00618751) / Appl. Phys. by G. Falcone (1984)
Secondary Ion Mass Spectrometry SIMS II?IV, ed. by A. Benninghoven et al., Springer Ser. Chem. Phys.9, 19, 36 (Springer, Berlin, Heidelberg 1979, 1982, 1984) / Secondary Ion Mass Spectrometry SIMS II?IV / 9, 19, 36 (1979)
E. Hechtl, J. Bohdansky, J. Roth, J. Nucl. Mat.103, 104, 333 (1981) (10.1016/0022-3115(82)90619-5) / J. Nucl. Mat. by E. Hechtl (1981)
M. Kaminsky, R. Nielsen: Thin Solid Films83, 107 (1981) (10.1016/0040-6090(81)90592-7) / Thin Solid Films by M. Kaminsky (1981)
W. Möller, W. Eckstein: NIM B2 in press)
E. Taglauer, W. Heiland: Proc. Symp. on Sputtering, ed. by P. Varga, G. Betz, F.P. Viehböck, Vienna (1980) p. 423
P. Varga, E. Taglauer: J. Nucl. Mat.111, 112, 726 (1982) (10.1016/0022-3115(82)90296-3) / J. Nucl. Mat. by P. Varga (1982)
R. Hultgren, R.L. Orr, P.D. Andersen, K.K. Kelly:Selected Values for the Thermodynamic Properties of Metals and Alloys (Wiley, New York 1963) / Selected Values for the Thermodynamic Properties of Metals and Alloys by R. Hultgren (1963)
E. Taglauer: Private communication
W. Eckstein, W. Möller: NIM B2 (1985) (in press)
J. Roth, J. Bohdansky, A.P. Martinelli: Radiat. Eff.48, 213 (1980) (10.1080/00337578008209256) / Radiat. Eff. by J. Roth (1980)
M. Kaminsky, R. Nielsen, P. Zschack: J. Vac. Sci. Technol.20, 1304 (1982) (10.1116/1.571567) / J. Vac. Sci. Technol. by M. Kaminsky (1982)
J.P. Biersack: Fusion Technol.6, 475 (1984) (10.13182/FST84-A23224) / Fusion Technol. by J.P. Biersack (1984)
R.R. Olson, M.E. King, G.K. Wehner: J. Appl. Phys.50, 3677 (1979) (10.1063/1.326321) / J. Appl. Phys. by R.R. Olson (1979)
G.K. Wehner, R.R. Olson, M.E. King: Proc. 7th Intern. Vac. Congr. and 3rd Intern. Conf. Solid Surfaces, Vienna (1977) p. 1461
J. Roth: Private communication
J. Roth, J. Bohdansky, W. Eckstein: Nucl. Instrum. Methods128, 751 (1983) (10.1016/0167-5087(83)91077-3) / Nucl. Instrum. Methods by J. Roth (1983)
W. Eckstein: IPP-Report 9/41 (1983) (10.1007/BF02608105)
J. Roth, W. Eckstein, J. Bohdansky: Radiat. Eff.48, 231 (1980) (10.1080/00337578008209259) / Radiat. Eff. by J. Roth (1980)
O.S. Oen, M.T. Robinson: J. Nucl. Mat.76, 77, 370 (1978) (10.1016/0022-3115(78)90174-5) / J. Nucl. Mat. by O.S. Oen (1978)

Dates

Type	When
Created	20 years, 9 months ago (Nov. 25, 2004, 10:14 p.m.)
Deposited	5 years, 4 months ago (April 4, 2020, 5:08 a.m.)
Indexed	3 months, 4 weeks ago (May 3, 2025, 2:03 p.m.)
Issued	40 years, 3 months ago (June 1, 1985)
Published	40 years, 3 months ago (June 1, 1985)
Published Print	40 years, 3 months ago (June 1, 1985)

Funders 0

None

BibTeX

@article{Eckstein_1985, title={Computer simulation of two-component target sputtering}, volume={37}, ISSN={1432-0630}, url={http://dx.doi.org/10.1007/bf00618859}, DOI={10.1007/bf00618859}, number={2}, journal={Applied Physics A Solids and Surfaces}, publisher={Springer Science and Business Media LLC}, author={Eckstein, W. and Biersack, J. P.}, year={1985}, month=jun, pages={95–108} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        5,
        3
      ]
    ],
    "date-time": "2025-05-03T18:03:51Z",
    "timestamp": 1746295431250
  },
  "reference-count": 28,
  "publisher": "Springer Science and Business Media LLC",
  "issue": "2",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            1985,
            6,
            1
          ]
        ],
        "date-time": "1985-06-01T00:00:00Z",
        "timestamp": 486432000000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "http://www.springer.com/tdm"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        1985,
        6
      ]
    ]
  },
  "DOI": "10.1007/bf00618859",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2004,
        11,
        26
      ]
    ],
    "date-time": "2004-11-26T03:14:34Z",
    "timestamp": 1101438874000
  },
  "page": "95-108",
  "source": "Crossref",
  "is-referenced-by-count": 111,
  "title": "Computer simulation of two-component target sputtering",
  "prefix": "10.1007",
  "volume": "37",
  "author": [
    {
      "given": "W.",
      "family": "Eckstein",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "J. P.",
      "family": "Biersack",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "297",
  "reference": [
    {
      "key": "CR1",
      "series-title": "47",
      "volume-title": "Sputtering by Particle Bombardment I",
      "year": "1981",
      "unstructured": "Sputtering by Particle Bombardment I, ed. by R. Behrisch, Topics Appl. Phys.47 (Springer Berlin, Heidelberg 1981)"
    },
    {
      "key": "CR2",
      "doi-asserted-by": "crossref",
      "first-page": "73",
      "DOI": "10.1007/BF00614759",
      "volume": "34",
      "author": "J.P. Biersack",
      "year": "1984",
      "unstructured": "J.P. Biersack, W. Eckstein: Appl. Phys.34, 73 (1984)",
      "journal-title": "Appl. Phys."
    },
    {
      "key": "CR3",
      "doi-asserted-by": "crossref",
      "first-page": "119",
      "DOI": "10.1080/00337578108225473",
      "volume": "55",
      "author": "M.L. Roush",
      "year": "1981",
      "unstructured": "M.L. Roush, T.D. Andreadis, O.F. Goktepe: Radiat. Eff.55, 119 (1981)",
      "journal-title": "Radiat. Eff."
    },
    {
      "key": "CR4",
      "doi-asserted-by": "crossref",
      "first-page": "814",
      "DOI": "10.1016/0168-583X(84)90321-5",
      "volume": "B 2",
      "author": "W. M\u00f6ller",
      "year": "1984",
      "unstructured": "W. M\u00f6ller, W. Eckstein: NIM B2, 814 (1984)",
      "journal-title": "NIM"
    },
    {
      "key": "CR5",
      "first-page": "11",
      "volume-title": "Topics Appl. Phys.52",
      "author": "G. Betz",
      "year": "1983",
      "unstructured": "G. Betz, G.K. Wehner: InSputtering by Particle Bombardment II ed. by R. Behrisch, Topics Appl. Phys.52 (Springer, Berlin, Heidelberg 1983) p. 11"
    },
    {
      "key": "CR6",
      "first-page": "128",
      "volume-title": "Ion Implantation and Beam Processing",
      "author": "H.H. Andersen",
      "year": "1984",
      "unstructured": "H.H. Andersen: InIon Implantation and Beam Processing, ed. by J.S. Williams, J.M. Poate (Academic, Sydney 1984) p. 128"
    },
    {
      "key": "CR7",
      "doi-asserted-by": "crossref",
      "first-page": "396",
      "DOI": "10.1116/1.570399",
      "volume": "17",
      "author": "P. Sigmund",
      "year": "1980",
      "unstructured": "P. Sigmund: J. Vac. Sci. Technol.17, 396 (1980)",
      "journal-title": "J. Vac. Sci. Technol."
    },
    {
      "key": "CR8",
      "doi-asserted-by": "crossref",
      "first-page": "541",
      "DOI": "10.1016/0029-554X(82)90578-X",
      "volume": "194",
      "author": "P. Sigmund",
      "year": "1982",
      "unstructured": "P. Sigmund, A. Oliva, G. Falcone: Nucl. Instrum. Methods194, 541 (1982)",
      "journal-title": "Nucl. Instrum. Methods"
    },
    {
      "key": "CR9",
      "doi-asserted-by": "crossref",
      "first-page": "175",
      "DOI": "10.1007/BF00618751",
      "volume": "A 33",
      "author": "G. Falcone",
      "year": "1984",
      "unstructured": "G. Falcone, A. Oliva: Appl. Phys. A33, 175 (1984)",
      "journal-title": "Appl. Phys."
    },
    {
      "key": "CR10",
      "series-title": "9, 19, 36",
      "volume-title": "Secondary Ion Mass Spectrometry SIMS II?IV",
      "year": "1979",
      "unstructured": "Secondary Ion Mass Spectrometry SIMS II?IV, ed. by A. Benninghoven et al., Springer Ser. Chem. Phys.9, 19, 36 (Springer, Berlin, Heidelberg 1979, 1982, 1984)"
    },
    {
      "key": "CR11",
      "doi-asserted-by": "crossref",
      "first-page": "333",
      "DOI": "10.1016/0022-3115(82)90619-5",
      "volume": "103",
      "author": "E. Hechtl",
      "year": "1981",
      "unstructured": "E. Hechtl, J. Bohdansky, J. Roth, J. Nucl. Mat.103, 104, 333 (1981)",
      "journal-title": "J. Nucl. Mat."
    },
    {
      "key": "CR12",
      "doi-asserted-by": "crossref",
      "first-page": "107",
      "DOI": "10.1016/0040-6090(81)90592-7",
      "volume": "83",
      "author": "M. Kaminsky",
      "year": "1981",
      "unstructured": "M. Kaminsky, R. Nielsen: Thin Solid Films83, 107 (1981)",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "CR13",
      "unstructured": "W. M\u00f6ller, W. Eckstein: NIM B2 in press)"
    },
    {
      "key": "CR14",
      "unstructured": "E. Taglauer, W. Heiland: Proc. Symp. on Sputtering, ed. by P. Varga, G. Betz, F.P. Viehb\u00f6ck, Vienna (1980) p. 423"
    },
    {
      "key": "CR15",
      "doi-asserted-by": "crossref",
      "first-page": "726",
      "DOI": "10.1016/0022-3115(82)90296-3",
      "volume": "111",
      "author": "P. Varga",
      "year": "1982",
      "unstructured": "P. Varga, E. Taglauer: J. Nucl. Mat.111, 112, 726 (1982)",
      "journal-title": "J. Nucl. Mat."
    },
    {
      "key": "CR16",
      "volume-title": "Selected Values for the Thermodynamic Properties of Metals and Alloys",
      "author": "R. Hultgren",
      "year": "1963",
      "unstructured": "R. Hultgren, R.L. Orr, P.D. Andersen, K.K. Kelly:Selected Values for the Thermodynamic Properties of Metals and Alloys (Wiley, New York 1963)"
    },
    {
      "key": "CR17",
      "unstructured": "E. Taglauer: Private communication"
    },
    {
      "key": "CR18",
      "unstructured": "W. Eckstein, W. M\u00f6ller: NIM B2 (1985) (in press)"
    },
    {
      "key": "CR19",
      "doi-asserted-by": "crossref",
      "first-page": "213",
      "DOI": "10.1080/00337578008209256",
      "volume": "48",
      "author": "J. Roth",
      "year": "1980",
      "unstructured": "J. Roth, J. Bohdansky, A.P. Martinelli: Radiat. Eff.48, 213 (1980)",
      "journal-title": "Radiat. Eff."
    },
    {
      "key": "CR20",
      "doi-asserted-by": "crossref",
      "first-page": "1304",
      "DOI": "10.1116/1.571567",
      "volume": "20",
      "author": "M. Kaminsky",
      "year": "1982",
      "unstructured": "M. Kaminsky, R. Nielsen, P. Zschack: J. Vac. Sci. Technol.20, 1304 (1982)",
      "journal-title": "J. Vac. Sci. Technol."
    },
    {
      "key": "CR21",
      "doi-asserted-by": "crossref",
      "first-page": "475",
      "DOI": "10.13182/FST84-A23224",
      "volume": "6",
      "author": "J.P. Biersack",
      "year": "1984",
      "unstructured": "J.P. Biersack: Fusion Technol.6, 475 (1984)",
      "journal-title": "Fusion Technol."
    },
    {
      "key": "CR22",
      "doi-asserted-by": "crossref",
      "first-page": "3677",
      "DOI": "10.1063/1.326321",
      "volume": "50",
      "author": "R.R. Olson",
      "year": "1979",
      "unstructured": "R.R. Olson, M.E. King, G.K. Wehner: J. Appl. Phys.50, 3677 (1979)",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "CR23",
      "unstructured": "G.K. Wehner, R.R. Olson, M.E. King: Proc. 7th Intern. Vac. Congr. and 3rd Intern. Conf. Solid Surfaces, Vienna (1977) p. 1461"
    },
    {
      "key": "CR24",
      "unstructured": "J. Roth: Private communication"
    },
    {
      "key": "CR25",
      "doi-asserted-by": "crossref",
      "first-page": "751",
      "DOI": "10.1016/0167-5087(83)91077-3",
      "volume": "128",
      "author": "J. Roth",
      "year": "1983",
      "unstructured": "J. Roth, J. Bohdansky, W. Eckstein: Nucl. Instrum. Methods128, 751 (1983)",
      "journal-title": "Nucl. Instrum. Methods"
    },
    {
      "key": "CR26",
      "doi-asserted-by": "crossref",
      "unstructured": "W. Eckstein: IPP-Report 9/41 (1983)",
      "DOI": "10.1007/BF02608105"
    },
    {
      "key": "CR27",
      "doi-asserted-by": "crossref",
      "first-page": "231",
      "DOI": "10.1080/00337578008209259",
      "volume": "48",
      "author": "J. Roth",
      "year": "1980",
      "unstructured": "J. Roth, W. Eckstein, J. Bohdansky: Radiat. Eff.48, 231 (1980)",
      "journal-title": "Radiat. Eff."
    },
    {
      "key": "CR28",
      "doi-asserted-by": "crossref",
      "first-page": "370",
      "DOI": "10.1016/0022-3115(78)90174-5",
      "volume": "76",
      "author": "O.S. Oen",
      "year": "1978",
      "unstructured": "O.S. Oen, M.T. Robinson: J. Nucl. Mat.76, 77, 370 (1978)",
      "journal-title": "J. Nucl. Mat."
    }
  ],
  "container-title": "Applied Physics A Solids and Surfaces",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "http://link.springer.com/content/pdf/10.1007/BF00618859.pdf",
      "content-type": "application/pdf",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "http://link.springer.com/article/10.1007/BF00618859/fulltext.html",
      "content-type": "text/html",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "http://link.springer.com/content/pdf/10.1007/BF00618859",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2020,
        4,
        4
      ]
    ],
    "date-time": "2020-04-04T09:08:56Z",
    "timestamp": 1585991336000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "http://link.springer.com/10.1007/BF00618859"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1985,
        6
      ]
    ]
  },
  "references-count": 28,
  "journal-issue": {
    "issue": "2",
    "published-print": {
      "date-parts": [
        [
          1985,
          6
        ]
      ]
    }
  },
  "alternative-id": [
    "BF00618859"
  ],
  "URL": "http://dx.doi.org/10.1007/BF00618859",
  "relation": {},
  "ISSN": [
    "0721-7250",
    "1432-0630"
  ],
  "subject": [],
  "container-title-short": "Appl. Phys. A",
  "published": {
    "date-parts": [
      [
        1985,
        6
      ]
    ]
  }
}