DOI: 10.1007/bf00614759. Sputtering studies with the Monte Carlo Program TRIM.SP

Sputtering studies with the Monte Carlo Program TRIM.SP

10.1007/bf00614759

Crossref journal-article

Springer Science and Business Media LLC

Applied Physics A Solids and Surfaces (297)

Bibliography

Biersack, J. P., & Eckstein, W. (1984). Sputtering studies with the Monte Carlo Program TRIM.SP. Applied Physics A Solids and Surfaces, 34(2), 73â94.

Authors 2

J. P. Biersack (first)
W. Eckstein (additional)

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Dates

Type	When
Created	20 years, 8 months ago (Nov. 25, 2004, 12:47 p.m.)
Deposited	5 years, 4 months ago (April 4, 2020, 4:53 a.m.)
Indexed	2 weeks ago (Aug. 6, 2025, 9:35 a.m.)
Issued	41 years, 2 months ago (June 1, 1984)
Published	41 years, 2 months ago (June 1, 1984)
Published Print	41 years, 2 months ago (June 1, 1984)

Funders 0

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BibTeX

@article{Biersack_1984, title={Sputtering studies with the Monte Carlo Program TRIM.SP}, volume={34}, ISSN={1432-0630}, url={http://dx.doi.org/10.1007/bf00614759}, DOI={10.1007/bf00614759}, number={2}, journal={Applied Physics A Solids and Surfaces}, publisher={Springer Science and Business Media LLC}, author={Biersack, J. P. and Eckstein, W.}, year={1984}, month=jun, pages={73–94} }

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