DOI: 10.1007/bf00331444. Aluminium diffusion in titanium nitride films. Efficiency of TiN barrier layers

Aluminium diffusion in titanium nitride films. Efficiency of TiN barrier layers

10.1007/bf00331444

Crossref journal-article

Springer Science and Business Media LLC

Applied Physics A Solids and Surfaces (297)

Bibliography

Grigorov, G. I., Grigorov, K. G., Stoyanova, M., Vignes, J. L., Langeron, J. P., & Denjean, P. (1993). Aluminium diffusion in titanium nitride films. Efficiency of TiN barrier layers. Applied Physics A Solids and Surfaces, 57(2), 195â197.

Authors 6

G. I. Grigorov (first)
K. G. Grigorov (additional)
M. Stoyanova (additional)
J. L. Vignes (additional)
J. P. Langeron (additional)
P. Denjean (additional)

References 27 Referenced 49

M.A. Nicolet: Thin Solid Films 52, 415 (1978) (10.1016/0040-6090(78)90184-0) / Thin Solid Films by M.A. Nicolet (1978)
C.I. Ting: J. Vac. Sci. Technol. 21 (1), 14 (1978) (10.1116/1.571700) / J. Vac. Sci. Technol. by C.I. Ting (1978)
J.P. Noel, D.C. Houghton, G. Este, F.R. Shepher: J. Vac. Sci. Technol. A 2 (2), 284 (1984) (10.1116/1.572582) / J. Vac. Sci. Technol. by J.P. Noel (1984)
M.F. Zhu, A.H. Hamdi, M.A. Nicolet: Thin Solid Films 119, 5 (1984) (10.1016/0040-6090(84)90152-4) / Thin Solid Films by M.F. Zhu (1984)
C.Y. Ting: Thin Solid Films 119, 11 (1984) (10.1016/0040-6090(84)90153-6) / Thin Solid Films by C.Y. Ting (1984)
S. Kanamori: Thin Solid Films 136, 195 (1986) (10.1016/0040-6090(86)90280-4) / Thin Solid Films by S. Kanamori (1986)
J. Ding, Z. Liliental-Weber, E.R. Weber, J. Washburn, R.M. Fourkas, N.W. Chang: Appl. Phys. Lett. 52 (25), 2160 (1988) (10.1063/1.99564) / Appl. Phys. Lett. by J. Ding (1988)
M. Wittmer: Appl. Phys. Lett. 37, 540 (1980) (10.1063/1.91978) / Appl. Phys. Lett. by M. Wittmer (1980)
M. Mori, S. Kanamori, T. Ueki: IEEE Trans. CHMT-6, 159 (1983) / IEEE Trans. by M. Mori (1983)
W.J. Garceau, P.R. Fournier, G.K. Herb: Thin Solid Films 60, 237 (1979) (10.1016/0040-6090(79)90194-9) / Thin Solid Films by W.J. Garceau (1979)
N.W. Cheung, H. von Seefeld, M.A. Nicolet, F. Ho, P. Iles: J. Appl. Phys. 52, 4297 (1981) (10.1063/1.329283) / J. Appl. Phys. by N.W. Cheung (1981)
M. Mäenpää, M.A. Nicolet, I. Suni, E.G. Colgan: Sol. Energy 27, 283 (1981) (10.1016/0038-092X(81)90060-8) / Sol. Energy by M. Mäenpää (1981)
H. von Seefeld, N.W. Cheung, M. Maenpaa, M.A. Nicolet: IEEE Trans. ED-27, 873 (1980) (10.1109/T-ED.1980.19949) / IEEE Trans. by H. Seefeld von (1980)
M. Witmer: J. Vac. Sci. Technol. A 3 (2), 273 (1984) (10.1116/1.572580) / J. Vac. Sci. Technol. by M. Witmer (1984)
M. Witmer: ibid, A 3 (4), 1797 (1985) (10.1116/1.573382) / J. Vac. Sci. by M. Witmer (1985)
R.C. Ellwanger, J.M. Towner: Thin Solid Films 161, 289 (1988) (10.1016/0040-6090(88)90261-1) / Thin Solid Films by R.C. Ellwanger (1988)
N. Fujimura, N. Nishida, T. Ito, Y. Nakayama: Mater. Sci. Eng. A 108, 153 (1989) (10.1016/0921-5093(89)90416-4) / Mater. Sci. Eng. by N. Fujimura (1989)
I.N. Martev, G.I. Grigorov, I.G. Petrov, E. Dynowska: Thin Solid Films 131, 303 (1985) (10.1016/0040-6090(85)90151-8) / Thin Solid Films by I.N. Martev (1985)
J.L. Vignes, J.P. Langeron, G.I. Grigorov, I.N. Martev, M. Stoyanova: Vacuum 42, 151 (1991) (10.1016/0042-207X(91)90099-5) / Vacuum by J.L. Vignes (1991)
L.R. Doolitle: Nucl. Instrum. Methods B 9, 344 (1985) (10.1016/0168-583X(85)90762-1) / Nucl. Instrum. Methods by L.R. Doolitle (1985)
K.G. Grigorov, G.I. Grigorov, M. Stoyanova, J.L. Vignes, J.P. Langeron, P. Denjean, J. Perriere: Appl. Phys. A 55, 502 (1992) (10.1007/BF00348340) / Appl. Phys. by K.G. Grigorov (1992)
N.W. Cheung, H. von Seefeld, M.A. Nicolet: In Proc. of the Symposium on Thin Film Interfaces and Interactions, ed. by J.E.E. Baglin, J.M. Poate (The Electrochem. Soc., Princeton, NJ 1980) p. 323 / Proc. of the Symposium on Thin Film Interfaces and Interactions by N.W. Cheung (1980)
I. Suni, M. Maenpaa, M.A. Nicolet, M. Luomajarvi: J. Electrochem. Soc. 130, 1215 (1983) (10.1149/1.2119920) / J. Electrochem. Soc. by I. Suni (1983)
M. Finetti, I. Suni, M.A. Nicolet: J. Electron. Mater. 13, 327 (1984) (10.1007/BF02656683) / J. Electron. Mater. by M. Finetti (1984)
W. Sinke, G.P.A. Frijlink, F.W. Saris: Appl. Phys. Lett. 47 (5), 471 (1985) (10.1063/1.96151) / Appl. Phys. Lett. by W. Sinke (1985)
N. Kumar, K. Pourrezaei: Thin Solid Films 184, 417 (1990) / Thin Solid Films by N. Kumar (1990)
K.G. Grigorov, G.I. Grigorov, M.V. Stoyanova, R.A. Chakalov, J.L. Vignes, J.P. Langeron, J. Perriere, P. Denjean: Vacuum (in press)

Dates

Type	When
Created	20 years, 10 months ago (Oct. 23, 2004, 11:23 p.m.)
Deposited	6 years, 4 months ago (April 8, 2019, 7:23 p.m.)
Indexed	2 months ago (June 30, 2025, 4:22 p.m.)
Issued	32 years, 1 month ago (Aug. 1, 1993)
Published	32 years, 1 month ago (Aug. 1, 1993)
Published Print	32 years, 1 month ago (Aug. 1, 1993)

Funders 0

None

BibTeX

@article{Grigorov_1993, title={Aluminium diffusion in titanium nitride films. Efficiency of TiN barrier layers}, volume={57}, ISSN={1432-0630}, url={http://dx.doi.org/10.1007/bf00331444}, DOI={10.1007/bf00331444}, number={2}, journal={Applied Physics A Solids and Surfaces}, publisher={Springer Science and Business Media LLC}, author={Grigorov, G. I. and Grigorov, K. G. and Stoyanova, M. and Vignes, J. L. and Langeron, J. P. and Denjean, P.}, year={1993}, month=aug, pages={195–197} }

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