DOI: 10.1007/978-1-4684-2169-9_2. Material Analysis by Nuclear Backscattering

Material Analysis by Nuclear Backscattering

10.1007/978-1-4684-2169-9_2

Crossref book-chapter

Springer US

New Uses of Ion Accelerators (297)

Bibliography

Ziegler, J. F., Mayer, J. W., Ullrich, B. M., & Chu, W.-K. (1975). Material Analysis by Nuclear Backscattering. New Uses of Ion Accelerators, 73â158.

Authors 4

James F. Ziegler (first)
J. W. Mayer (additional)
B. M. Ullrich (additional)
Wei-Kan Chu (additional)

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Dates

Type	When
Created	13 years, 5 months ago (March 5, 2012, 4:14 p.m.)
Deposited	2 years, 6 months ago (Jan. 27, 2023, 12:59 p.m.)
Indexed	4 months, 4 weeks ago (March 25, 2025, 10:13 a.m.)
Issued	50 years, 7 months ago (Jan. 1, 1975)
Published	50 years, 7 months ago (Jan. 1, 1975)
Published Print	50 years, 7 months ago (Jan. 1, 1975)

Funders 0

None

BibTeX

@inbook{Ziegler_1975, title={Material Analysis by Nuclear Backscattering}, ISBN={9781468421699}, url={http://dx.doi.org/10.1007/978-1-4684-2169-9_2}, DOI={10.1007/978-1-4684-2169-9_2}, booktitle={New Uses of Ion Accelerators}, publisher={Springer US}, author={Ziegler, James F. and Mayer, J. W. and Ullrich, B. M. and Chu, Wei-Kan}, year={1975}, pages={73–158} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        3,
        25
      ]
    ],
    "date-time": "2025-03-25T14:13:32Z",
    "timestamp": 1742912012124,
    "version": "3.40.3"
  },
  "publisher-location": "Boston, MA",
  "reference-count": 79,
  "publisher": "Springer US",
  "isbn-type": [
    {
      "type": "print",
      "value": "9781468421712"
    },
    {
      "type": "electronic",
      "value": "9781468421699"
    }
  ],
  "license": [
    {
      "start": {
        "date-parts": [
          [
            1975,
            1,
            1
          ]
        ],
        "date-time": "1975-01-01T00:00:00Z",
        "timestamp": 157766400000
      },
      "content-version": "tdm",
      "delay-in-days": 0,
      "URL": "https://www.springernature.com/gp/researchers/text-and-data-mining"
    },
    {
      "start": {
        "date-parts": [
          [
            1975,
            1,
            1
          ]
        ],
        "date-time": "1975-01-01T00:00:00Z",
        "timestamp": 157766400000
      },
      "content-version": "vor",
      "delay-in-days": 0,
      "URL": "https://www.springernature.com/gp/researchers/text-and-data-mining"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        1975
      ]
    ]
  },
  "DOI": "10.1007/978-1-4684-2169-9_2",
  "type": "book-chapter",
  "created": {
    "date-parts": [
      [
        2012,
        3,
        5
      ]
    ],
    "date-time": "2012-03-05T21:14:00Z",
    "timestamp": 1330982040000
  },
  "page": "73-158",
  "source": "Crossref",
  "is-referenced-by-count": 6,
  "title": "Material Analysis by Nuclear Backscattering",
  "prefix": "10.1007",
  "author": [
    {
      "given": "James F.",
      "family": "Ziegler",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "J. W.",
      "family": "Mayer",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "B. M.",
      "family": "Ullrich",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "Wei-Kan",
      "family": "Chu",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "297",
  "reference": [
    {
      "key": "2_CR1",
      "doi-asserted-by": "publisher",
      "first-page": "495",
      "DOI": "10.1098/rspa.1909.0054",
      "volume": "82",
      "author": "H Geiger",
      "year": "1909",
      "unstructured": "H. Geiger and E. Marsden, Proc. Roy. Soc, 82, 495 (1909).",
      "journal-title": "Proc. Roy. Soc"
    },
    {
      "key": "2_CR2",
      "doi-asserted-by": "crossref",
      "first-page": "669",
      "DOI": "10.1080/14786440508637080",
      "volume": "21",
      "author": "E Rutherford",
      "year": "1911",
      "unstructured": "E. Rutherford, Phil. Mag., 21, 669 (1911).",
      "journal-title": "Phil. Mag."
    },
    {
      "key": "2_CR3",
      "doi-asserted-by": "publisher",
      "first-page": "921",
      "DOI": "10.1002/andp.19123431003",
      "volume": "38",
      "author": "J Stark",
      "year": "1912",
      "unstructured": "J. Stark and G. Wendt, Ann. d. Phys., 38, 921 (1912).",
      "journal-title": "Ann. d. Phys."
    },
    {
      "key": "2_CR4",
      "doi-asserted-by": "publisher",
      "first-page": "1681",
      "DOI": "10.1063/1.1720084",
      "volume": "37",
      "author": "A Turkevich",
      "year": "1966",
      "unstructured": "A. Turkevich, K. Knolle, R. A. Emmert, W. A. Anderson, J. H. Patterson, and E. Franzgrote, Rev. of Sci. Inst., 37, 1681 (1966).",
      "journal-title": "Rev. of Sci. Inst."
    },
    {
      "key": "2_CR5",
      "doi-asserted-by": "publisher",
      "first-page": "635",
      "DOI": "10.1126/science.158.3801.635",
      "volume": "158",
      "author": "A Turkevich",
      "year": "1967",
      "unstructured": "A. Turkevich, E. Franzgrote, and J. Patterson, Science, 158, 635 (1967).",
      "journal-title": "Science"
    },
    {
      "key": "2_CR6",
      "doi-asserted-by": "publisher",
      "first-page": "81",
      "DOI": "10.1063/1.1654565",
      "volume": "22",
      "author": "CJ Kircher",
      "year": "1973",
      "unstructured": "C. J. Kircher, J. W. Mayer, K. N. Tu, and J. F. Ziegler, Appl. Phys. Lett., 22, 81 (1973).",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2_CR7",
      "doi-asserted-by": "publisher",
      "first-page": "3851",
      "DOI": "10.1063/1.1662861",
      "volume": "44",
      "author": "JF Ziegler",
      "year": "1973",
      "unstructured": "J. F. Ziegler, J. W. Mayer, C. J. Kircher, and K. N. Tu, J. Appl. Phys., 44, 3851 (1973).",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2_CR8",
      "doi-asserted-by": "publisher",
      "first-page": "36",
      "DOI": "10.1063/1.1655000",
      "volume": "24",
      "author": "JF Ziegler",
      "year": "1974",
      "unstructured": "J. F. Ziegler, J. E. E. Baglin, and A. Gangulee, Appl. Phys. Lett., 24, 36 (1974).",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "volume-title": "Ion Beam Surface Layer Analysis",
      "year": "1974",
      "key": "2_CR9",
      "unstructured": "\u201cIon Beam Surface Layer Analysis\u201d, Ed. by J. W. Mayer and J. F. Ziegler, Elsevier Sequoia Co., Laussane, Switzerland (1974)."
    },
    {
      "key": "2_CR10",
      "doi-asserted-by": "publisher",
      "first-page": "463",
      "DOI": "10.1016/0092-640X(74)90009-6",
      "volume": "13",
      "author": "JF Ziegler",
      "year": "1974",
      "unstructured": "J. F. Ziegler and W. K. Chu, Atomic Data and Nuclear Data Tables, 13, 463 (1974).",
      "journal-title": "Atomic Data and Nuclear Data Tables"
    },
    {
      "key": "2_CR11",
      "doi-asserted-by": "publisher",
      "first-page": "2031",
      "DOI": "10.1063/1.1660483",
      "volume": "42",
      "author": "JF Ziegler",
      "year": "1971",
      "unstructured": "J. F. Ziegler and J.E.E. Baglin, J. Appl. Phys., 42, 2031 (1971).",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2_CR12",
      "doi-asserted-by": "publisher",
      "first-page": "1888",
      "DOI": "10.1063/1.1663510",
      "volume": "45",
      "author": "JF Ziegler",
      "year": "1974",
      "unstructured": "J. F. Ziegler and J.E.E. Baglin, J. Appl. Phys., 45, 1888 (1974).",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2_CR13",
      "doi-asserted-by": "publisher",
      "first-page": "2440",
      "DOI": "10.1139/p71-293",
      "volume": "49",
      "author": "A van Wijngaarden",
      "year": "1971",
      "unstructured": "A. van Wijngaarden, B. Miremadi, and W. E. Baylis, Can. Jour. of Phys., 49, 2440 (1971).",
      "journal-title": "Can. Jour. of Phys."
    },
    {
      "key": "2_CR14",
      "doi-asserted-by": "publisher",
      "first-page": "43",
      "DOI": "10.1016/0040-6090(73)90023-0",
      "volume": "19",
      "author": "RE Honig",
      "year": "1973",
      "unstructured": "See references cited in the review article: R. E. Honig and W. L. Harrington, Thin Solid Films, 19, 43 (1973).",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "2_CR15",
      "doi-asserted-by": "publisher",
      "first-page": "157",
      "DOI": "10.1016/0040-6090(73)90032-1",
      "volume": "19",
      "author": "S Peterson",
      "year": "1973",
      "unstructured": "S. Peterson, P. A. Tore, O. Meyer, B. Sundquist, and A. Johansson, Thin Solid Films, 19, 157 (1973).",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "2_CR16",
      "doi-asserted-by": "publisher",
      "first-page": "137",
      "DOI": "10.1016/0040-6090(73)90030-8",
      "volume": "19",
      "author": "RR Hart",
      "year": "1973",
      "unstructured": "R. R. Hart, H. L. Dunlap, A. J. Mohr, and O. J. Marsh, Thin Solid Films, 19, 137 (1973).",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "2_CR17",
      "unstructured": "J. F. Ziegler, W. K. Chu, J.S.-Y. Feng (to be published in 1975 in Appl. Phys. Lett.)."
    },
    {
      "key": "2_CR18",
      "doi-asserted-by": "publisher",
      "first-page": "247",
      "DOI": "10.1016/0040-6090(73)90060-6",
      "volume": "19",
      "author": "R Behrisch",
      "year": "1973",
      "unstructured": "R. Behrisch and B.M.U. Scherzer, Thin Solid Films, 19, 247 (1973).",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "2_CR19",
      "unstructured": "M. K. Leung, Ph.D. Thesis, University of Kentucky, 1972 (unpublished)."
    },
    {
      "key": "2_CR20",
      "first-page": "975",
      "volume": "13",
      "author": "A Turos",
      "year": "1968",
      "unstructured": "A. Turos and Z. Wilhelmi, Nukleonika, 13, 975 (1968).",
      "journal-title": "Nukleonika"
    },
    {
      "key": "2_CR21",
      "doi-asserted-by": "publisher",
      "first-page": "1",
      "DOI": "10.1016/0040-6090(73)90020-5",
      "volume": "19",
      "author": "Y Heights",
      "year": "1973",
      "unstructured": "Proceedings of the conference on Ion Beam Surface Layer Analysis, Yorktown Heights, N.Y., June 1973; Thin Solid Films 19, 1\u2013406 (1973).",
      "journal-title": "Thin Solid Films"
    },
    {
      "volume-title": "Proceedings of the conference on Applications of Ion Beams to Metals",
      "year": "1974",
      "key": "2_CR22",
      "unstructured": "Proceedings of the conference on Applications of Ion Beams to Metals, Albuquerque, N.M., October 1973;(Plenum Press, New York) 1974. Eds. S.T. Picraux, E.P. EerNisse and F.L. Vook."
    },
    {
      "volume-title": "Proceedings of the conference on Ion Implantation in Semiconductors and Other Materials",
      "year": "1973",
      "key": "2_CR23",
      "unstructured": "Proceedings of the conference on Ion Implantation in Semiconductors and Other Materials, Yorktown Heights, N.Y., December 1972; Ed. B.L. Crowder, (Plenum Press, New York) 1973."
    },
    {
      "volume-title": "Channeling",
      "year": "1974",
      "key": "2_CR24",
      "unstructured": "\u201cChanneling\u201d, Edited by D.V. Morgan (J. Wiley and Sons, New York) 1974."
    },
    {
      "key": "2_CR25",
      "doi-asserted-by": "publisher",
      "first-page": "277",
      "DOI": "10.1126/science.165.3890.277",
      "volume": "165",
      "author": "AL Turkevich",
      "year": "1969",
      "unstructured": "A.L. Turkevich, E.J. Franzgrote and J.H. Patterson, Science 165, 277 (1969).",
      "journal-title": "Science"
    },
    {
      "key": "2_CR26",
      "volume-title": "Electron and Ion Beam Technology",
      "author": "M Peisach",
      "year": "1969",
      "unstructured": "M. Peisach and D.O. Poole, in \u201cElectron and Ion Beam Technology,\u201d Edited by R. Bakish, AIME (Gordon and Breach, New York) Vol. 2, 1195 (1969)."
    },
    {
      "key": "2_CR27",
      "volume-title": "Chemical Analysis by Charged Particle Bombardment",
      "author": "L Eriksson",
      "year": "1971",
      "unstructured": "L. Eriksson, G. Fladda and P.A. Johansson, International Meeting, \u201cChemical Analysis by Charged Particle Bombardment,\u201d Namur, Sept. (1971)."
    },
    {
      "key": "2_CR28",
      "unstructured": "P.A. Tove and W.K. Chu, private communication."
    },
    {
      "key": "2_CR29",
      "doi-asserted-by": "publisher",
      "first-page": "479",
      "DOI": "10.1016/0036-9748(71)90095-0",
      "volume": "5",
      "author": "M Guttmann",
      "year": "1971",
      "unstructured": "M. Guttmann, P.R. Krahe, F. Abel, G. Amsel, M. Bruneaux and C. Cohen, Scripta Metallurgica 5, 479 (1971).",
      "journal-title": "Scripta Metallurgica"
    },
    {
      "key": "2_CR30",
      "doi-asserted-by": "publisher",
      "first-page": "736",
      "DOI": "10.1021/ac60125a001",
      "volume": "29",
      "author": "S Rubin",
      "year": "1957",
      "unstructured": "S. Rubin, T.O. Passell and L.E. Bailey, Anal. Chem. 29, 736 (1957).",
      "journal-title": "Anal. Chem"
    },
    {
      "key": "2_CR31",
      "doi-asserted-by": "publisher",
      "first-page": "2777",
      "DOI": "10.1063/1.1663667",
      "volume": "45",
      "author": "A Turos",
      "year": "1974",
      "unstructured": "A. Turos, W.F. van der Weg, D. Sigurd and J.W. Mayer, J. Appl. Phys. 45, 2777 (1974).",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2_CR32",
      "doi-asserted-by": "crossref",
      "first-page": "2136",
      "DOI": "10.1021/ac60350a039",
      "volume": "46",
      "author": "WK Chu",
      "year": "1974",
      "unstructured": "W.K. Chu, M-A. Nicolet, J.W. Mayer and C. A. Evans, Jr., Anal. Chem. 46, 2136 (1974).",
      "journal-title": "Jr., Anal. Chem."
    },
    {
      "key": "2_CR33",
      "volume-title": "Proc. Conf. on Low Temperature Diffusion and Applications to Thin Films",
      "author": "SU Campisano",
      "year": "1974",
      "unstructured": "S.U. Campisano, G. Foti, F. Grasso and E. Rimini, Proc. Conf. on Low Temperature Diffusion and Applications to Thin Films, Yorktown Heights, N.Y., August 1974 (to be published, Plenum Press)."
    },
    {
      "key": "2_CR34",
      "doi-asserted-by": "publisher",
      "first-page": "1730",
      "DOI": "10.1063/1.1663483",
      "volume": "45",
      "author": "G Ottaviani",
      "year": "1974",
      "unstructured": "G. Ottaviani, D. Sigurd, V. Marrello and J.O. McCaldin, J. Appl. Phys. 45, 1730 (1974).",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2_CR35",
      "doi-asserted-by": "publisher",
      "first-page": "1",
      "DOI": "10.1016/0040-6090(73)90002-3",
      "volume": "17",
      "author": "WK Chu",
      "year": "1973",
      "unstructured": "W.K. Chu, J.W. Mayer, M-A. Nicolet, T.M. Buck, G. Amsel and F. Eisen, Thin Solid Films 17, 1 (1973).",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "2_CR36",
      "doi-asserted-by": "crossref",
      "first-page": "531",
      "DOI": "10.1002/pssa.2210130223",
      "volume": "a13",
      "author": "V Marrello",
      "year": "1972",
      "unstructured": "V. Marrello, J.M. Caywood, J.W. Mayer and M-A. Nicolet, Phys. Status Solidi a13, 531 (1972).",
      "journal-title": "Phys. Status Solidi"
    },
    {
      "key": "2_CR37",
      "unstructured": "T.W. Sigmon, W.K. Chu, H. Muller and J.W. Mayer, Appl. Phys. (in press)."
    },
    {
      "key": "2_CR38",
      "unstructured": "W.K. Chu, B.L. Crowder, J.W. Mayer and J.F. Ziegler, in Ref. 3, p. 225."
    },
    {
      "key": "2_CR39",
      "doi-asserted-by": "publisher",
      "first-page": "61",
      "DOI": "10.1103/PhysRev.126.61",
      "volume": "126",
      "author": "D Powers",
      "year": "1962",
      "unstructured": "D. Powers and W. Whaling, Phys. Rev. 126, 61 (1962).",
      "journal-title": "Phys. Rev."
    },
    {
      "key": "2_CR40",
      "doi-asserted-by": "publisher",
      "first-page": "52",
      "DOI": "10.1063/1.321368",
      "volume": "46",
      "author": "JA Moore",
      "year": "1975",
      "unstructured": "J.A. Moore, I.V. Mitchell, M.J. Hollis, J.A. Davies and L.M. Howe, J. Appl. Phys. 46, 52 (1975).",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2_CR41",
      "unstructured": "R.S. Blewer, in Ref. 2, p. 557."
    },
    {
      "key": "2_CR42",
      "unstructured": "W.K. Chu and B.M. Ullrich, private communication."
    },
    {
      "key": "2_CR43",
      "unstructured": "J.M. Harris, private communication."
    },
    {
      "key": "2_CR44",
      "doi-asserted-by": "publisher",
      "first-page": "86",
      "DOI": "10.1116/1.1318668",
      "volume": "11",
      "author": "JW Mayer",
      "year": "1974",
      "unstructured": "J.W. Mayer and K.N. Tu, J. Vac. Sci. Technol. 11, 86 (1974).",
      "journal-title": "J. Vac. Sci. Technol."
    },
    {
      "key": "2_CR45",
      "doi-asserted-by": "publisher",
      "first-page": "3283",
      "DOI": "10.1063/1.1661708",
      "volume": "43",
      "author": "KN Tu",
      "year": "1972",
      "unstructured": "K.N. Tu and B.S. Berry, J. Appl. Phys. 43, 3283 (1972).",
      "journal-title": "J. Appl. Phys."
    },
    {
      "key": "2_CR46",
      "doi-asserted-by": "publisher",
      "first-page": "205",
      "DOI": "10.1016/0040-6090(74)90241-7",
      "volume": "23",
      "author": "SS Lau",
      "year": "1974",
      "unstructured": "S.S. Lau, W.K. Chu, J.W. Mayer and K.N. Tu, Thin Solid Films 23, 205 (1974).",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "2_CR47",
      "doi-asserted-by": "publisher",
      "first-page": "1224",
      "DOI": "10.1109/PROC.1974.9600",
      "volume": "62",
      "author": "JA Borders",
      "year": "1974",
      "unstructured": "J.A. Borders and S.T. Picraux, Proc. IEEE 62, 1224 (1974).",
      "journal-title": "Proc. IEEE"
    },
    {
      "key": "2_CR48",
      "first-page": "18",
      "volume": "25",
      "author": "WK Chu",
      "year": "1974",
      "unstructured": "W.K. Chu, H. Krau\u0165le, J.W. Mayer, H. Muller, M-A. Nicolet and K.N. Tu, Appl. Phys. Lett. 25, 18 (1974).",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2_CR49",
      "doi-asserted-by": "publisher",
      "first-page": "524",
      "DOI": "10.1063/1.1653799",
      "volume": "19",
      "author": "JO McCaldin",
      "year": "1971",
      "unstructured": "J.O. McCaldin and H. Sankur, Appl. Phys. Lett. 19, 524 (1971).",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2_CR50",
      "doi-asserted-by": "publisher",
      "first-page": "735",
      "DOI": "10.1007/BF02643082",
      "volume": "4",
      "author": "JM Caywood",
      "year": "1973",
      "unstructured": "J.M. Caywood, Metall. Trans. 4, 735 (1973).",
      "journal-title": "Metall. Trans."
    },
    {
      "key": "2_CR51",
      "doi-asserted-by": "publisher",
      "first-page": "93",
      "DOI": "10.1016/0029-554X(73)90640-X",
      "volume": "108",
      "author": "V Marrello",
      "year": "1973",
      "unstructured": "V. Marrello, T.A. McMath, J.W. Mayer and I.L. Fowler, Nuc. Inst, and Meth. 108, 93 (1973).",
      "journal-title": "Nuc. Inst, and Meth."
    },
    {
      "key": "2_CR52",
      "doi-asserted-by": "publisher",
      "first-page": "1018",
      "DOI": "10.1109/PROC.1972.8846",
      "volume": "60",
      "author": "JO McCaldin",
      "year": "1972",
      "unstructured": "J.O. McCaldin and A. Fern, Proc. IEEE 60, 1018 (1972).",
      "journal-title": "Proc. IEEE"
    },
    {
      "key": "2_CR53",
      "doi-asserted-by": "publisher",
      "first-page": "593",
      "DOI": "10.1103/PhysRevLett.31.593",
      "volume": "31",
      "author": "V Marrello",
      "year": "1974",
      "unstructured": "V. Marrello, T.F. Lee, R.N. Silver, T.C. McGill and J.W. Mayer, Phys. Rev. Lett. 31, 593 (1974).",
      "journal-title": "Phys. Rev. Lett."
    },
    {
      "key": "2_CR54",
      "doi-asserted-by": "publisher",
      "first-page": "3",
      "DOI": "10.1063/1.1655265",
      "volume": "25",
      "author": "C Canal",
      "year": "1974",
      "unstructured": "C. Canal i, J.W. Mayer, G. Ottaviani, D. Sigurd and W. van der Weg, Appl. Phys. Lett. 25, 3 (1974).",
      "journal-title": "Appl. Phys. Lett."
    },
    {
      "key": "2_CR55",
      "unstructured": "W.J. De Bonte, J.M. Poate, C M. Melliar-Smith and R.A. Levesque, in Ref. 2, p. 147."
    },
    {
      "key": "2_CR56",
      "doi-asserted-by": "publisher",
      "first-page": "135",
      "DOI": "10.1080/00337577308234728",
      "volume": "18",
      "author": "W Eckstein",
      "year": "1973",
      "unstructured": "W. Eckstein, B.M.U. Scherzer and H. Verbeck, Rad. Effects 18, 135 (1973).",
      "journal-title": "Rad. Effects"
    },
    {
      "key": "2_CR57",
      "doi-asserted-by": "crossref",
      "first-page": "113",
      "DOI": "10.1002/pssa.2210150113",
      "volume": "a15",
      "author": "A Fontell",
      "year": "1973",
      "unstructured": "A. Fontell, E. Arminen and M. Turunen, Phys. Stat. Solidi a15, 113 (1973).",
      "journal-title": "Phys. Stat. Solidi"
    },
    {
      "key": "2_CR58",
      "doi-asserted-by": "crossref",
      "first-page": "3953",
      "DOI": "10.1103/PhysRevB.9.3953",
      "volume": "B9",
      "author": "SM Myers",
      "year": "1974",
      "unstructured": "S.M. Myers, S.T. Picraux and T.S. Prevender, Phys. Rev. B9, 3953 (1974).",
      "journal-title": "Phys. Rev"
    },
    {
      "key": "2_CR59",
      "doi-asserted-by": "publisher",
      "first-page": "1919",
      "DOI": "10.1016/0038-1098(74)90117-3",
      "volume": "15",
      "author": "W Akutagawa",
      "year": "1974",
      "unstructured": "W. Akutagawa, D. Turnbull, W.K. Chu and J.W. Mayer, Solid State Comm. 15, 1919 (1974).",
      "journal-title": "Solid State Comm"
    },
    {
      "key": "2_CR60",
      "doi-asserted-by": "publisher",
      "first-page": "3982",
      "DOI": "10.1063/1.1659714",
      "volume": "42",
      "author": "IV Mitchell",
      "year": "1971",
      "unstructured": "I.V. Mitchell, J.W. Mayer, J.K. Kung and W.G. Spitzer, J. Appl. Phys. 42, 3982 (1971).",
      "journal-title": "J. Appl. Phys"
    },
    {
      "key": "2_CR61",
      "unstructured": "M-A. Nicolet, private communication."
    },
    {
      "key": "2_CR62",
      "doi-asserted-by": "publisher",
      "first-page": "297",
      "DOI": "10.1016/0040-6090(73)90066-7",
      "volume": "19",
      "author": "M Peisach",
      "year": "1973",
      "unstructured": "M. Peisach, Thin Solid Films 19, 297 (1973).",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "2_CR63",
      "doi-asserted-by": "publisher",
      "first-page": "1",
      "DOI": "10.1016/0040-6090(73)90002-3",
      "volume": "17",
      "author": "WK Chu",
      "year": "1973",
      "unstructured": "W.K. Chu, J.W. Mayer, M-A. Nicolet, T.M. Buck, G. Amsel and F. Eisen, Thin Solid Films 17, 1 (1973).",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "2_CR64",
      "volume-title": "Foundation of Nuclear Physics",
      "author": "RT Beyer",
      "year": "1949",
      "unstructured": "Rutherford, Phil. Mag. 21, 669 (1911). This and other famous papers are published in R.T. Beyer, \u201cFoundation of Nuclear Physics,\u201d Dover Publications, New York, 1949."
    },
    {
      "key": "2_CR65",
      "unstructured": "W.K. Chu and J.F. Ziegler (to be published)."
    },
    {
      "key": "2_CR66",
      "volume-title": "Ph.D. Thesis, California Institute of Technology",
      "author": "WA Wenzel",
      "year": "1952",
      "unstructured": "W.A. Wenzel, Ph.D. Thesis, California Institute of Technology, 1952."
    },
    {
      "key": "2_CR67",
      "doi-asserted-by": "publisher",
      "first-page": "449",
      "DOI": "10.1103/PhysRev.87.499",
      "volume": "87",
      "author": "WA Wenzel",
      "year": "1952",
      "unstructured": "W.A. Wenzel and W. Whaling, Phys. Rev. 87, 449 (1952).",
      "journal-title": "Phys. Rev"
    },
    {
      "key": "2_CR68",
      "doi-asserted-by": "publisher",
      "first-page": "61",
      "DOI": "10.1103/PhysRev.126.61",
      "volume": "126",
      "author": "D Powers",
      "year": "1962",
      "unstructured": "D. Powers and W. Whaling, Phys. Rev. 126, 61 (1962).",
      "journal-title": "Phys. Rev"
    },
    {
      "key": "2_CR69",
      "doi-asserted-by": "publisher",
      "first-page": "149",
      "DOI": "10.1080/00337577208234688",
      "volume": "15",
      "author": "EI Siritonin",
      "year": "1972",
      "unstructured": "E.I. Siritonin, A.F. Tulinov, A. Fiderkevich and K.S. Shyskin, Vestnik MGU (Ser. Fiz. Astr.), 12 (1971) 541. Also see Rad. Effects 15, 149 (1972).",
      "journal-title": "Rad. Effects"
    },
    {
      "key": "2_CR70",
      "doi-asserted-by": "publisher",
      "first-page": "121",
      "DOI": "10.1016/0040-6090(73)90029-1",
      "volume": "19",
      "author": "DK Brice",
      "year": "1973",
      "unstructured": "D.K. Brice, Thin Solid Films 19, 121 (1973).",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "2_CR71",
      "doi-asserted-by": "publisher",
      "first-page": "195",
      "DOI": "10.1016/0040-6090(73)90055-2",
      "volume": "19",
      "author": "JS-Y Feng",
      "year": "1973",
      "unstructured": "J.S.-Y. Feng, W.K. Chu, M-A. Nicolet and J.W. Mayer, Thin Solid Films 19, 195 (1973).",
      "journal-title": "Thin Solid Films"
    },
    {
      "key": "2_CR72",
      "unstructured": "W.K. Lin, S. Matteson and D. Powers (to be published)."
    },
    {
      "key": "2_CR73",
      "doi-asserted-by": "publisher",
      "first-page": "437",
      "DOI": "10.1063/1.1654703",
      "volume": "22",
      "author": "WK Chu",
      "year": "1973",
      "unstructured": "W.K. Chu, J.F. Ziegler, I.V. Mitchell and W.K. Mackintosh, Appl. Phys. Lett. 22, 437 (1973).",
      "journal-title": "Appl. Phys. Lett"
    },
    {
      "key": "2_CR74",
      "doi-asserted-by": "publisher",
      "first-page": "247",
      "DOI": "10.1016/0040-6090(73)90060-6",
      "volume": "19",
      "author": "R Behrisch",
      "year": "1973",
      "unstructured": "R. Behrisch and B.M.U. Scherzer, Thin Solid Film 19, 247 (1973).",
      "journal-title": "Thin Solid Film"
    },
    {
      "key": "2_CR75",
      "first-page": "386",
      "volume": "V1",
      "author": "E Leminen",
      "year": "1972",
      "unstructured": "E. Leminen, Ann. Acad. Sci. Fennicae A V1 386 (1972).",
      "journal-title": "Ann. Acad. Sci. Fennicae A"
    },
    {
      "key": "2_CR76",
      "doi-asserted-by": "publisher",
      "first-page": "39",
      "DOI": "10.1080/00337577408232143",
      "volume": "22",
      "author": "E Leminen",
      "year": "1974",
      "unstructured": "E. Leminen and A. Fontell, Rad. Eff. 22, 39 (1974).",
      "journal-title": "Rad. Eff"
    },
    {
      "key": "2_CR77",
      "volume-title": "Report C00\u2013712\u201389",
      "author": "RA Semmler",
      "year": "1964",
      "unstructured": "R.A. Semmler, J.F. Tribby and J.E. Brugger, Report C00\u2013712\u201389, US Atomic Energy Commission, Div. of Technical Information (Oct. 1964)."
    },
    {
      "key": "2_CR78",
      "unstructured": "F. Ajzenberg-Selove and T. Lauritsen, Nuclear Physics."
    },
    {
      "key": "2_CR79",
      "doi-asserted-by": "publisher",
      "first-page": "159",
      "DOI": "10.1007/978-1-4684-2079-1_13",
      "volume-title": "Application of Ion Beam to Metal",
      "author": "SJ Campisano",
      "year": "1974",
      "unstructured": "S.J. Campisano, G. Foti, F. Grasso, J.W. Mayer and E. Rimini, Application of Ion Beam to Metal, by S.T. Picraux, ErNisse and F.L. Vook (Plenum Press, New York 1974) p. 159."
    }
  ],
  "container-title": "New Uses of Ion Accelerators",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://link.springer.com/content/pdf/10.1007/978-1-4684-2169-9_2",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2023,
        1,
        27
      ]
    ],
    "date-time": "2023-01-27T17:59:23Z",
    "timestamp": 1674842363000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://link.springer.com/10.1007/978-1-4684-2169-9_2"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1975
      ]
    ]
  },
  "ISBN": [
    "9781468421712",
    "9781468421699"
  ],
  "references-count": 79,
  "URL": "http://dx.doi.org/10.1007/978-1-4684-2169-9_2",
  "relation": {},
  "subject": [],
  "published": {
    "date-parts": [
      [
        1975
      ]
    ]
  }
}