DOI: 10.1007/3-540-08462-2_9. X-ray lithography

X-ray lithography

10.1007/3-540-08462-2_9

Crossref book-chapter

Springer Berlin Heidelberg

Topics in Applied Physics (297)

Bibliography

Spille, E., & Feder, R. (1977). X-ray lithography. X-Ray Optics, 35â92.

Authors 2

E. Spille (first)
R. Feder (additional)

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H. N. Yu, R. H. Dennard, T. H. P. Chang, C. M. Osburn, V. Dilonardo, H. E. Luhn: J. Vac. Sci. Technol. 12, 1297 (1975) (10.1116/1.568521) / J. Vac. Sci. Technol. by H. N. Yu (1975)
D. Sayre, J. Kirz, R. Feder, D. M. Kim, E. Spiller: Science (to be published)
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H. Bräuninger, H.J. Einighammer, H. H. Fink: X-Ray Optics and Microanalysis (University of Tokyo Press 1972), p. 17
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J. Kirz: J. Opt. Soc. Am. 64, 301 (1974) (10.1364/JOSA.64.000301) / J. Opt. Soc. Am. by J. Kirz (1974)
B. Niemann, D. Rudolph, G. Schmahl: Appl. Opt. 15, 1882 (1976) (10.1364/AO.15.001883) / Appl. Opt. by B. Niemann (1976)
J. H. Underwood, J. E. Milligan, A. C. deLoach, R. B. Hoover: Appl. Opt. 16, 859 (1977) (10.1364/AO.16.000858) / Appl. Opt. by J. H. Underwood (1977)
H. Wolter: Ann. Physik 6, 94 (1952); 6, 286 (1952) (10.1002/andp.19524450108) / Ann. Physik by H. Wolter (1952)
E. Spiller: Appl. Opt. 15, 2333 (1976) (10.1364/AO.15.002333) / Appl. Opt. by E. Spiller (1976)
A. V. Vinogradov, B. Ya. Zeldovich: Appl. Opt. 16, 89 (1977) (10.1364/AO.16.000089) / Appl. Opt. by A. V. Vinogradov (1977)
E. Spiller: Optik 39, 118 (1973) / Optik by E. Spiller (1973)
R.-P. Haelbich, C. Kunz: Opt. Commun. 17, 187 (1976) (10.1016/0030-4018(76)90262-5) / Opt. Commun. by R.-P. Haelbich (1976)
P. J. Mallozi, H. M. Epstein, R. G. Jung, D. C. Appelbaum, B. P. Fairand, W. J. Gallagher, R. L. Uecker, M. C. Muckerheide: J. Appl. Phys. 45, 1891 (1974) (10.1063/1.1663511) / J. Appl. Phys. by P. J. Mallozi (1974)
P.J. Mallozi, B.P. Fairand, M.J. Gollis: Laser Produced X-Rays, Neutrons and Ultrasound, in Research Techniques and Nondestructive Testing, ed. by R.S. Sharpe (Academic Press, London 1977) / Laser Produced X-Rays, Neutrons and Ultrasound, in Research Techniques and Nondestructive Testing by P.J. Mallozi (1977)
R.I. Mallozi (private communications)

Dates

Type	When
Created	13 years, 6 months ago (Feb. 23, 2012, 8:37 p.m.)
Deposited	4 years, 4 months ago (April 27, 2021, 4:52 p.m.)
Indexed	2 months ago (June 25, 2025, 5:07 p.m.)
Issued	48 years, 7 months ago (Jan. 1, 1977)
Published	48 years, 7 months ago (Jan. 1, 1977)
Published Online	20 years, 1 month ago (July 13, 2005)
Published Print	48 years, 7 months ago (Jan. 1, 1977)

Funders 0

None

BibTeX

@inbook{Spille_1977, title={X-ray lithography}, ISBN={9783540370420}, ISSN={1437-0859}, url={http://dx.doi.org/10.1007/3-540-08462-2_9}, DOI={10.1007/3-540-08462-2_9}, booktitle={X-Ray Optics}, publisher={Springer Berlin Heidelberg}, author={Spille, E. and Feder, R.}, year={1977}, pages={35–92} }

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