DOI: 10.1007/0-387-23313-x_11. A FIB Micro-Sampling Technique and a Site Specific TEM Specimen Preparation Method

A FIB Micro-Sampling Technique and a Site Specific TEM Specimen Preparation Method

10.1007/0-387-23313-x_11

Crossref book-chapter

Springer US

Introduction to Focused Ion Beams (297)

Bibliography

Kamino, T., Yaguchi, T., Hashimoto, T., Ohnishi, T., & Umemura, K. (2005). A FIB Micro-Sampling Technique and a Site Specific TEM Specimen Preparation Method. Introduction to Focused Ion Beams, 229â245.

Authors 5

T. Kamino (first)
T. Yaguchi (additional)
T. Hashimoto (additional)
T. Ohnishi (additional)
K. Umemura (additional)

References 15 Referenced 21

Basile, DP, Boylan R, Baker B, Hayes K, Soza D, “FIBXTEM — Focused ion beam milling for TEM sample preparation”, In: Anderson, R., Tracy, R., Bravman, B. (Eds.). Materials Research Society Symposium Proceedings, 254. MRS, Pittsburgh, pp. 23–41 (1992). / Materials Research Society Symposium Proceedings by D.P. Basile (1992)
Bender H, Roussel P, Cross-sectional transmission electron microscopy and focused ion beam study of advanced silicon devices. In: Inst. Phys. Conf. Ser. Proc. Microscopy of Semiconducting Materials X. (1997).
Giannuzzi LA, Drown JL, Brown SR, Irwin RB, Stevie FA, “Specimen preparation for Transmission Electron Microscopy of Materials”, Mater. Res. Soc. Symp. Proc. Vol.480: 19 (1997). (10.1557/PROC-480-19) / Mater. Res. Soc. Symp. Proc. by L.A. Giannuzzi (1997)
Giannuzzi LA, Drown JL, Brown SR, Irwin RB, Stevie FA, “Applications of the FIB lift-out technique for TEM specimen preparation”, Microsc. Res. Tech. 41:285–290 (1998). (10.1002/(SICI)1097-0029(19980515)41:4<285::AID-JEMT1>3.0.CO;2-Q) / Microsc. Res. Tech. by L.A. Giannuzzi (1998)
Giannuzzi LA, Prenitzer BI, Drown-Macdonald JL, Brown SR, Irwin RB, Stevie FA, Shofner TL, “Advances in the FIB lift-out technique for TEM specimen preparation: HREM lattice imaging”. Microstructural Science 26:26–29 (1998). / Microstructural Science by L.A. Giannuzzi (1998)
Kirk ECG, Williams DA, Ahmed H, “Cross-sectional transmission electron microscopy of precisely selected regions from semiconductor devices”, Inst. Phys. Ser. 100, 501–506 (1989). / Inst. Phys. Ser. by E.C.G. Kirk (1989)
Kitano Y, Fujikawa Y, Kamino T, Yaguchi T, Saka H, “TEM observation of micrometer-sized Ni powder Particles thinned by FIB cutting technique”, J. Electron Microsc. 44, 410–413 (1995). / J. Electron Microsc. by Y. Kitano (1995)
Kitano Y, Fujikawa Y, Takeshita H, Kamino T, Yaguchi T, Matsumoto H, Koike H, “TEM observation of micrometer-sized Ni powder particles thinned by FIB cutting technique”, J. Electron Microsc. 44,376–383 (1995). / J. Electron Microsc. by Y. Kitano (1995)
Overwijk MHF, van den Heuvel FC, Bulle-Lieuwma CWT, “Novel scheme for the preparation of transmission electron microscopy specimens with a focused ion beam”, J. Vac. Sci. Technol. B 11(6), 2021–2024 (1993). (10.1116/1.586537) / J. Vac. Sci. Technol. B by M.H.F. Overwijk (1993)
Park K, “Cross-sectional TEM specimen preparation of semiconductor devices by focused ion beam etching”, In: Anderson, R. (Ed.), Materials Research Society Symposium Proceedings, MRS, Pittsburgh, 199, pp. 271–280 (1990). / Materials Research Society Symposium Proceedings by K. “. Park (1990)
Stevie FA, Irwin RB, Shofner TL, Brown SR, Drown JL, Giannuzzi LA, “Plan view TEM sample preparation using the focused ion beam technique”, Proc. Int. Conf. American Institute. of Physics, Gaithersburg (Woodbury, New York), Chap.449: 868–871 (1998). / Proc. Int. Conf. American Institute. of Physics by F.A. Stevie (1998)
Yaguchi T, Matsumoto H, Kamino T, Ishitani T and Urao R, “A method for cross sectional thin specimen preparation from specific site using combination of focused ion beam system and intermediate voltage electron microscope and its application to the characterization of a precipitate in a steel”, Microscopy and Microanalysis 7 (1998). (10.1017/S1431927601010297)
Yaguchi T, Kamino T, Ishitani T and Urao R, “Method for cross sectional TEM specimen preparation of composite materials using a dedicated FIB system”, Microscopy and Microanalysis 5: 363–370 (1999). (10.1017/S1431927699000203) / Microscopy and Microanalysis by T. Yaguchi (1999)
Yaguchi T, Kamino T, Sasaki M, Barbezat G and Urao R, “Cross sectional specimen preparation and observation of a plasma sprayed coating using an FIB/TEM system,” Microscopy and Microanalysis 6: 218–223 (2000). (10.1017/S1431927600000362) / Microscopy and Microanalysis by T. Yaguchi (2000)
Young RJ, Kirk ECG, Williams DA, Ahmed H, “Fabrication of planar and cross-sectional TEM specimens using a focused ion beam”, In: Anderson, R. (ed.), Material Research Society Symposium Proceedings, MRS Pittsburgh, 199, pp. 205–216 (1990). / Material Research Society Symposium Proceedings by R.J. Young (1990)

Dates

Type	When
Created	19 years, 3 months ago (May 17, 2006, 4:46 a.m.)
Deposited	5 years, 4 months ago (April 14, 2020, 2:23 p.m.)
Indexed	11 months, 2 weeks ago (Sept. 4, 2024, 11:46 a.m.)
Issued	20 years, 7 months ago (Jan. 1, 2005)
Published	20 years, 7 months ago (Jan. 1, 2005)
Published Print	20 years, 7 months ago (Jan. 1, 2005)

Funders 0

None

BibTeX

@inbook{Kamino_2005, title={A FIB Micro-Sampling Technique and a Site Specific TEM Specimen Preparation Method}, ISBN={9780387233130}, url={http://dx.doi.org/10.1007/0-387-23313-x_11}, DOI={10.1007/0-387-23313-x_11}, booktitle={Introduction to Focused Ion Beams}, publisher={Springer US}, author={Kamino, T. and Yaguchi, T. and Hashimoto, T. and Ohnishi, T. and Umemura, K.}, year={2005}, pages={229–245} }

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