DOI: 10.1002/sia.955. XPS, Raman spectroscopy, X‐ray diffraction, specular X‐ray reflectivity, transmission electron microscopy and elastic recoil detection analysis of emissive carbon film characterization

XPS, Raman spectroscopy, X‐ray diffraction, specular X‐ray reflectivity, transmission electron microscopy and elastic recoil detection analysis of emissive carbon film characterization

10.1002/sia.955

Crossref journal-article

Wiley

Surface and Interface Analysis (311)

Abstract

AbstractFor a better understanding of the physical and electronic properties of emissive carbon films, one of the best ways is to compare the results obtained with several surface and structural analysis techniques. In this article, different types of carbon film depositions for developing large flat panel displays by field emission displays are analysed and the results are correlated with their emissivity. Pulse laser ablation films, high‐temperature plasma‐enhanced chemical vapour deposition (PECVD) films and low‐temperature PECVD films are characterized by XPS, Raman spectroscopy, X‐ray diffraction (XRD), specular X‐ray reflectivity, transmission electron microscopy (TEM) and elastic recoil detection analysis (ERDA). The analyses lead us to conclude that the sp2/sp3 ratio is not a crucial parameter for carbon film emissivity. Crystalline structure seems more important. The presence of graphite grains is essential for good and uniform emission. Combination of XPS, TEM, XRD, Raman spectroscopy and ERDA is necessary for the study of carbon film emission. Copyright © 2001 John Wiley & Sons, Ltd.

Bibliography

Ermolieff, A., Chabli, A., Pierre, F., Rolland, G., Rouchon, D., Vannuffel, C., Vergnaud, C., Baylet, J., & SÃ©mÃ©ria, M. N. (2001). XPS, Raman spectroscopy, Xâray diffraction, specular Xâray reflectivity, transmission electron microscopy and elastic recoil detection analysis of emissive carbon film characterization. Surface and Interface Analysis, 31(3), 185â190. Portico.

Authors 9

A. Ermolieff (first)
A. Chabli (additional)
F. Pierre (additional)
G. Rolland (additional)
D. Rouchon (additional)
C. Vannuffel (additional)
C. Vergnaud (additional)
J. Baylet (additional)
M. N. Séméria (additional)

References 15 Referenced 63

10.1049/el:19910914
{'key': 'e_1_2_1_3_2', 'author': 'Bonnot AM', 'journal-title': 'Diamond Relat. Mater.'} / Diamond Relat. Mater. by Bonnot AM
10.1007/s003390050998
10.1016/0169-4332(93)90534-I
10.1063/1.1148938
BayletJ.PhD Thesis Université Joseph Fourier Grenoble France 28 January2000.
10.1016/0169-4332(95)00079-8
{'key': 'e_1_2_1_9_2', 'author': 'Ferrari AC', 'journal-title': 'Phys. Rev. B'} / Phys. Rev. B by Ferrari AC
10.1063/1.1674108
10.1103/PhysRevB.29.3482
10.1016/0925-9635(95)00363-0
10.1002/andp.19314020702
10.1103/PhysRev.95.359
10.1051/rphysap:01980001503076100
{'key': 'e_1_2_1_16_2', 'volume': '317', 'author': 'Silva SRP', 'year': '1996', 'journal-title': 'Thin Solid Films'} / Thin Solid Films by Silva SRP (1996)

Dates

Type	When
Created	23 years ago (Aug. 25, 2002, 5:28 p.m.)
Deposited	1 year, 9 months ago (Nov. 18, 2023, 7:34 a.m.)
Indexed	2 months, 3 weeks ago (June 17, 2025, 3:46 a.m.)
Issued	24 years, 6 months ago (March 1, 2001)
Published	24 years, 6 months ago (March 1, 2001)
Published Online	24 years, 5 months ago (March 28, 2001)
Published Print	24 years, 6 months ago (March 1, 2001)

Funders 0

None

BibTeX

@article{Ermolieff_2001, title={XPS, Raman spectroscopy, X‐ray diffraction, specular X‐ray reflectivity, transmission electron microscopy and elastic recoil detection analysis of emissive carbon film characterization}, volume={31}, ISSN={1096-9918}, url={http://dx.doi.org/10.1002/sia.955}, DOI={10.1002/sia.955}, number={3}, journal={Surface and Interface Analysis}, publisher={Wiley}, author={Ermolieff, A. and Chabli, A. and Pierre, F. and Rolland, G. and Rouchon, D. and Vannuffel, C. and Vergnaud, C. and Baylet, J. and Séméria, M. N.}, year={2001}, month=mar, pages={185–190} }

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