DOI: 10.1002/sia.740100406. Suppression of surface topography development in ion‐milling of semiconductors

Suppression of surface topography development in ion‐milling of semiconductors

10.1002/sia.740100406

Crossref journal-article

Wiley

Surface and Interface Analysis (311)

Abstract

AbstractThe occurrence and growth of hummocks on semiconductor surfaces rotated during ion bombardment have been studied. A simple geometrical is proposed which explains why such topographical features may be observed at incident angles of about 65° with respect to the surface normal, whereas they disappear or do not develop at angles of about 80°. It is argued that even microscopic surface undulations with dimensions of the order of 10 nm initiate hummock formation. Finally it is shown that a smooth surface, which can be produced by ion‐milling at grazing incidence, effectively prevents surface tropography development at any angle of incidence.

Bibliography

BulleâLieuwma, C. W. T., & Zalm, P. C. (1987). Suppression of surface topography development in ionâmilling of semiconductors. Surface and Interface Analysis, 10(4), 210â215. Portico.

Authors 2

C. W. T. Bulle‐Lieuwma (first)
P. C. Zalm (additional)

References 12 Referenced 41

P. R.Boudewijn M. R.LeysandF.Roozeboom Surf. Interface Anal. to be published.
{'key': 'e_1_2_1_3_2', 'first-page': '123', 'volume': '76', 'author': 'Bulle‐Lieuwma C. W. T.', 'year': '1985', 'journal-title': 'Inst. Phys. Conf. Series'} / Inst. Phys. Conf. Series by Bulle‐Lieuwma C. W. T. (1985)
10.1016/0584-8547(85)80136-1
10.1007/BF00549381
10.1002/sia.740070110
10.1063/1.332340
10.1016/0378-5963(81)90084-2
10.1143/JJAP.18.1717
10.1016/0375-9601(72)90059-X
10.1063/1.89170
{'key': 'e_1_2_1_10_2', 'first-page': '163', 'volume-title': 'Ion Bombardment Modification of Surfaces', 'author': 'Carter G.', 'year': '1984'} / Ion Bombardment Modification of Surfaces by Carter G. (1984)
{'key': 'e_1_2_1_10_3', 'first-page': '225', 'volume-title': 'Ion Bombardment Modification of Surfaces', 'author': 'Wilson I. H.'} / Ion Bombardment Modification of Surfaces by Wilson I. H.

Dates

Type	When
Created	20 years, 3 months ago (May 28, 2005, 6:44 a.m.)
Deposited	1 year, 10 months ago (Oct. 21, 2023, 2:08 p.m.)
Indexed	1 year, 6 months ago (Feb. 4, 2024, 12:01 p.m.)
Issued	38 years, 4 months ago (April 1, 1987)
Published	38 years, 4 months ago (April 1, 1987)
Published Online	20 years, 11 months ago (Sept. 15, 2004)
Published Print	38 years, 4 months ago (April 1, 1987)

Funders 0

None

BibTeX

@article{Bulle_Lieuwma_1987, title={Suppression of surface topography development in ion‐milling of semiconductors}, volume={10}, ISSN={1096-9918}, url={http://dx.doi.org/10.1002/sia.740100406}, DOI={10.1002/sia.740100406}, number={4}, journal={Surface and Interface Analysis}, publisher={Wiley}, author={Bulle‐Lieuwma, C. W. T. and Zalm, P. C.}, year={1987}, month=apr, pages={210–215} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2024,
        2,
        4
      ]
    ],
    "date-time": "2024-02-04T17:01:01Z",
    "timestamp": 1707066061821
  },
  "reference-count": 12,
  "publisher": "Wiley",
  "issue": "4",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            2004,
            9,
            15
          ]
        ],
        "date-time": "2004-09-15T00:00:00Z",
        "timestamp": 1095206400000
      },
      "content-version": "vor",
      "delay-in-days": 6377,
      "URL": "http://onlinelibrary.wiley.com/termsAndConditions#vor"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        1987,
        4
      ]
    ]
  },
  "abstract": "<jats:title>Abstract</jats:title><jats:p>The occurrence and growth of hummocks on semiconductor surfaces rotated during ion bombardment have been studied. A simple geometrical is proposed which explains why such topographical features may be observed at incident angles of about 65\u00b0 with respect to the surface normal, whereas they disappear or do not develop at angles of about 80\u00b0. It is argued that even microscopic surface undulations with dimensions of the order of 10 nm initiate hummock formation. Finally it is shown that a smooth surface, which can be produced by ion\u2010milling at grazing incidence, effectively prevents surface tropography development at any angle of incidence.</jats:p>",
  "DOI": "10.1002/sia.740100406",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2005,
        5,
        28
      ]
    ],
    "date-time": "2005-05-28T10:44:40Z",
    "timestamp": 1117277080000
  },
  "page": "210-215",
  "source": "Crossref",
  "is-referenced-by-count": 41,
  "title": "Suppression of surface topography development in ion\u2010milling of semiconductors",
  "prefix": "10.1002",
  "volume": "10",
  "author": [
    {
      "given": "C. W. T.",
      "family": "Bulle\u2010Lieuwma",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "P. C.",
      "family": "Zalm",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "311",
  "published-online": {
    "date-parts": [
      [
        2004,
        9,
        15
      ]
    ]
  },
  "reference": [
    {
      "key": "e_1_2_1_2_2",
      "unstructured": "P. R.Boudewijn M. R.LeysandF.Roozeboom Surf. Interface Anal. to be published."
    },
    {
      "key": "e_1_2_1_3_2",
      "first-page": "123",
      "volume": "76",
      "author": "Bulle\u2010Lieuwma C. W. T.",
      "year": "1985",
      "journal-title": "Inst. Phys. Conf. Series"
    },
    {
      "key": "e_1_2_1_4_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/0584-8547(85)80136-1"
    },
    {
      "key": "e_1_2_1_5_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1007/BF00549381"
    },
    {
      "key": "e_1_2_1_6_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1002/sia.740070110"
    },
    {
      "key": "e_1_2_1_7_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.332340"
    },
    {
      "key": "e_1_2_1_8_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/0378-5963(81)90084-2"
    },
    {
      "key": "e_1_2_1_8_3",
      "doi-asserted-by": "publisher",
      "DOI": "10.1143/JJAP.18.1717"
    },
    {
      "key": "e_1_2_1_8_4",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/0375-9601(72)90059-X"
    },
    {
      "key": "e_1_2_1_9_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.89170"
    },
    {
      "key": "e_1_2_1_10_2",
      "first-page": "163",
      "volume-title": "Ion Bombardment Modification of Surfaces",
      "author": "Carter G.",
      "year": "1984"
    },
    {
      "key": "e_1_2_1_10_3",
      "first-page": "225",
      "volume-title": "Ion Bombardment Modification of Surfaces",
      "author": "Wilson I. H."
    }
  ],
  "container-title": "Surface and Interface Analysis",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://api.wiley.com/onlinelibrary/tdm/v1/articles/10.1002%2Fsia.740100406",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://onlinelibrary.wiley.com/doi/full/10.1002/sia.740100406",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2023,
        10,
        21
      ]
    ],
    "date-time": "2023-10-21T18:08:04Z",
    "timestamp": 1697911684000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://analyticalsciencejournals.onlinelibrary.wiley.com/doi/10.1002/sia.740100406"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        1987,
        4
      ]
    ]
  },
  "references-count": 12,
  "journal-issue": {
    "issue": "4",
    "published-print": {
      "date-parts": [
        [
          1987,
          4
        ]
      ]
    }
  },
  "alternative-id": [
    "10.1002/sia.740100406"
  ],
  "URL": "http://dx.doi.org/10.1002/sia.740100406",
  "relation": {},
  "ISSN": [
    "0142-2421",
    "1096-9918"
  ],
  "subject": [],
  "container-title-short": "Surface &amp; Interface Analysis",
  "published": {
    "date-parts": [
      [
        1987,
        4
      ]
    ]
  }
}