DOI: 10.1002/sia.2204. ToF‐SIMS analysis of organic impurities in UPW

ToF‐SIMS analysis of organic impurities in UPW

10.1002/sia.2204

Crossref journal-article

Wiley

Surface and Interface Analysis (311)

Abstract

AbstractWe have investigated adsorption of organic impurities in ultrapure water (UPW) on hydrophilic silicon wafer surface. The primary and tertiary amine molecules used as model compounds of organic impurities were adsorbed on the clean wafer surface during soaking in UPW. It was found that adsorbed quantities of relatively large tertiary amines among water‐soluble amines, such as (C3H7)3N and (C4H9)3N, were higher at relatively short soak time (two h in this experiment) than at longer one (24 h). Time‐of‐flight secondary‐ion mass spectrometry (ToF‐SIMS) is a very powerful tool for identification of trace organic contamination on wafer surface after UPW rinse from the studies of adsorption of the molecules present in UPW. Copyright © 2006 John Wiley & Sons, Ltd.

Bibliography

Kobayashi, J., & Owari, M. (2006). ToFâSIMS analysis of organic impurities in UPW. Surface and Interface Analysis, 38(4), 305â308. Portico.

Authors 2

Junji Kobayashi (first)
Masanori Owari (additional)

References 4 Referenced 5

10.1143/JJAP.37.2468
ImaokaT UmekaA FutatsukiT. Identification of trace organic impurities in ultrapure water and influence on silicon wafer surface.Semiconductor Pure Water and Chemicals Conference Water session 1993 CONF 12//WAT 1993;93–116.
{'key': 'e_1_2_1_4_2', 'first-page': '229', 'volume-title': 'SIMS XI', 'author': 'Karen A', 'year': '1998'} / SIMS XI by Karen A (1998)
{'key': 'e_1_2_1_5_2', 'first-page': '203', 'volume': '541', 'author': 'Karen A', 'year': '2003', 'journal-title': 'Appl. Surf. Sci.'} / Appl. Surf. Sci. by Karen A (2003)

Dates

Type	When
Created	19 years, 5 months ago (March 29, 2006, 6:29 a.m.)
Deposited	1 year, 10 months ago (Oct. 17, 2023, 10:58 a.m.)
Indexed	1 year, 10 months ago (Oct. 18, 2023, 1:24 a.m.)
Issued	19 years, 5 months ago (March 29, 2006)
Published	19 years, 5 months ago (March 29, 2006)
Published Online	19 years, 5 months ago (March 29, 2006)
Published Print	19 years, 5 months ago (April 1, 2006)

Funders 0

None

BibTeX

@article{Kobayashi_2006, title={ToF‐SIMS analysis of organic impurities in UPW}, volume={38}, ISSN={1096-9918}, url={http://dx.doi.org/10.1002/sia.2204}, DOI={10.1002/sia.2204}, number={4}, journal={Surface and Interface Analysis}, publisher={Wiley}, author={Kobayashi, Junji and Owari, Masanori}, year={2006}, month=mar, pages={305–308} }

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