DOI: 10.1002/sia.1063. Application of focused ion beam lift‐out specimen preparation to TEM, SEM, STEM, AES and SIMS analysis

Application of focused ion beam lift‐out specimen preparation to TEM, SEM, STEM, AES and SIMS analysis

10.1002/sia.1063

Crossref journal-article

Wiley

Surface and Interface Analysis (311)

Abstract

AbstractCommercially available focused ion beam (FIB) workstations with spatial resolution of 5–7 nm can prepare specimens with excellent lateral resolution. This capability has been utilized extensively by the semiconductor industry to obtain materials characterization from continually smaller areas. The FIB has been adopted generally as a preparation tool for scanning electron microscopy (SEM) and transmission electron microscopy (TEM). The ability to prepare site‐specific specimens that can be removed from the bulk of a sample provides enhanced SEM and TEM analyses and new approaches for other analytical tools. Dedicated scanning transmission electron microscopy (STEM) can provide images through samples several micrometers thick. Auger electron spectroscopy (AES) can analyze with improved ability to identify a small particle. Secondary ion mass spectrometry (SIMS) can provide trace analysis at high mass resolution. Automatic operation of FIB workstations permits the creation of multiple lift‐out samples without the presence of an operator. Copyright © 2001 John Wiley & Sons, Ltd.

Bibliography

Stevie, F. A., Vartuli, C. B., Giannuzzi, L. A., Shofner, T. L., Brown, S. R., Rossie, B., Hillion, F., Mills, R. H., Antonell, M., Irwin, R. B., & Purcell, B. M. (2001). Application of focused ion beam liftâout specimen preparation to TEM, SEM, STEM, AES and SIMS analysis. Surface and Interface Analysis, 31(5), 345â351. Portico.

Authors 11

F. A. Stevie (first)
C. B. Vartuli (additional)
L. A. Giannuzzi (additional)
T. L. Shofner (additional)
S. R. Brown (additional)
B. Rossie (additional)
F. Hillion (additional)
R. H. Mills (additional)
M. Antonell (additional)
R. B. Irwin (additional)
B. M. Purcell (additional)

References 23 Referenced 94

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HerlingerLR ChevacharoenkulS ErwinDC.22 ISTFA Proceedings1996;199 Los Angels CA.
10.1017/S1431927600017761 / Microsc. Microanal. by Stevie FA (1999)
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10.1116/1.581795
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{'key': 'e_1_2_1_13_2', 'first-page': '162', 'volume': '4', 'author': 'Giannuzzi LA', 'year': '1999', 'journal-title': 'J. Process Anal. Chem.'} / J. Process Anal. Chem. by Giannuzzi LA (1999)
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{'key': 'e_1_2_1_21_2', 'first-page': '163', 'volume-title': 'Secondary Ion Mass Spectrometry, SIMS XI', 'author': 'Downey SW', 'year': '1998'} / Secondary Ion Mass Spectrometry, SIMS XI by Downey SW (1998)
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Dates

Type	When
Created	22 years, 11 months ago (Sept. 10, 2002, 7:06 p.m.)
Deposited	1 year, 9 months ago (Nov. 19, 2023, 8:58 a.m.)
Indexed	1 month, 1 week ago (July 11, 2025, 6:51 a.m.)
Issued	24 years, 3 months ago (May 1, 2001)
Published	24 years, 3 months ago (May 1, 2001)
Published Online	24 years, 3 months ago (May 3, 2001)
Published Print	24 years, 3 months ago (May 1, 2001)

Funders 0

None

BibTeX

@article{Stevie_2001, title={Application of focused ion beam lift‐out specimen preparation to TEM, SEM, STEM, AES and SIMS analysis}, volume={31}, ISSN={1096-9918}, url={http://dx.doi.org/10.1002/sia.1063}, DOI={10.1002/sia.1063}, number={5}, journal={Surface and Interface Analysis}, publisher={Wiley}, author={Stevie, F. A. and Vartuli, C. B. and Giannuzzi, L. A. and Shofner, T. L. and Brown, S. R. and Rossie, B. and Hillion, F. and Mills, R. H. and Antonell, M. and Irwin, R. B. and Purcell, B. M.}, year={2001}, month=may, pages={345–351} }

JSON

{
  "indexed": {
    "date-parts": [
      [
        2025,
        7,
        11
      ]
    ],
    "date-time": "2025-07-11T10:51:52Z",
    "timestamp": 1752231112797
  },
  "reference-count": 23,
  "publisher": "Wiley",
  "issue": "5",
  "license": [
    {
      "start": {
        "date-parts": [
          [
            2001,
            5,
            3
          ]
        ],
        "date-time": "2001-05-03T00:00:00Z",
        "timestamp": 988848000000
      },
      "content-version": "vor",
      "delay-in-days": 2,
      "URL": "http://onlinelibrary.wiley.com/termsAndConditions#vor"
    }
  ],
  "content-domain": {
    "domain": [],
    "crossmark-restriction": false
  },
  "published-print": {
    "date-parts": [
      [
        2001,
        5
      ]
    ]
  },
  "abstract": "<jats:title>Abstract</jats:title><jats:p>Commercially available focused ion beam (FIB) workstations with spatial resolution of 5\u20137 nm can prepare specimens with excellent lateral resolution. This capability has been utilized extensively by the semiconductor industry to obtain materials characterization from continually smaller areas. The FIB has been adopted generally as a preparation tool for scanning electron microscopy (SEM) and transmission electron microscopy (TEM). The ability to prepare site\u2010specific specimens that can be removed from the bulk of a sample provides enhanced SEM and TEM analyses and new approaches for other analytical tools. Dedicated scanning transmission electron microscopy (STEM) can provide images through samples several micrometers thick. Auger electron spectroscopy (AES) can analyze with improved ability to identify a small particle. Secondary ion mass spectrometry (SIMS) can provide trace analysis at high mass resolution. Automatic operation of FIB workstations permits the creation of multiple lift\u2010out samples without the presence of an operator. Copyright \u00a9 2001 John Wiley &amp; Sons, Ltd.</jats:p>",
  "DOI": "10.1002/sia.1063",
  "type": "journal-article",
  "created": {
    "date-parts": [
      [
        2002,
        9,
        10
      ]
    ],
    "date-time": "2002-09-10T23:06:08Z",
    "timestamp": 1031699168000
  },
  "page": "345-351",
  "source": "Crossref",
  "is-referenced-by-count": 94,
  "title": "Application of focused ion beam lift\u2010out specimen preparation to TEM, SEM, STEM, AES and SIMS analysis",
  "prefix": "10.1002",
  "volume": "31",
  "author": [
    {
      "given": "F. A.",
      "family": "Stevie",
      "sequence": "first",
      "affiliation": []
    },
    {
      "given": "C. B.",
      "family": "Vartuli",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "L. A.",
      "family": "Giannuzzi",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "T. L.",
      "family": "Shofner",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "S. R.",
      "family": "Brown",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "B.",
      "family": "Rossie",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "F.",
      "family": "Hillion",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "R. H.",
      "family": "Mills",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "M.",
      "family": "Antonell",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "R. B.",
      "family": "Irwin",
      "sequence": "additional",
      "affiliation": []
    },
    {
      "given": "B. M.",
      "family": "Purcell",
      "sequence": "additional",
      "affiliation": []
    }
  ],
  "member": "311",
  "published-online": {
    "date-parts": [
      [
        2001,
        5,
        3
      ]
    ]
  },
  "reference": [
    {
      "key": "e_1_2_1_2_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1002/sia.740230204"
    },
    {
      "key": "e_1_2_1_3_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1016/S0968-4328(99)00005-0"
    },
    {
      "key": "e_1_2_1_4_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1116/1.586537"
    },
    {
      "key": "e_1_2_1_5_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1557/PROC-480-19"
    },
    {
      "key": "e_1_2_1_6_2",
      "unstructured": "HerlingerLR ChevacharoenkulS ErwinDC.22 ISTFA Proceedings1996;199 Los Angels CA."
    },
    {
      "issue": "2",
      "key": "e_1_2_1_7_2",
      "doi-asserted-by": "crossref",
      "first-page": "888",
      "DOI": "10.1017/S1431927600017761",
      "volume": "5",
      "author": "Stevie FA",
      "year": "1999",
      "journal-title": "Microsc. Microanal."
    },
    {
      "issue": "2",
      "key": "e_1_2_1_8_2",
      "doi-asserted-by": "crossref",
      "first-page": "740",
      "DOI": "10.1017/S1431927600017025",
      "volume": "5",
      "author": "Urbanik CA",
      "year": "1999",
      "journal-title": "Microsc. Microanal."
    },
    {
      "key": "e_1_2_1_9_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1116/1.581795"
    },
    {
      "issue": "2",
      "key": "e_1_2_1_10_2",
      "doi-asserted-by": "crossref",
      "first-page": "347",
      "DOI": "10.1017/S143192760000862X",
      "volume": "3",
      "author": "Giannuzzi LA",
      "year": "1997",
      "journal-title": "Microsc. Microanal."
    },
    {
      "key": "e_1_2_1_11_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1002/(SICI)1097-0029(19980515)41:4<285::AID-JEMT1>3.0.CO;2-Q"
    },
    {
      "key": "e_1_2_1_12_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1002/9780470294574.ch14"
    },
    {
      "key": "e_1_2_1_13_2",
      "first-page": "162",
      "volume": "4",
      "author": "Giannuzzi LA",
      "year": "1999",
      "journal-title": "J. Process Anal. Chem."
    },
    {
      "key": "e_1_2_1_14_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1007/s11661-998-0116-z"
    },
    {
      "issue": "2",
      "key": "e_1_2_1_15_2",
      "doi-asserted-by": "crossref",
      "first-page": "908",
      "DOI": "10.1017/S1431927600017864",
      "volume": "5",
      "author": "Drown\u2010MacDonald JL",
      "year": "1999",
      "journal-title": "Microsc. Microanal."
    },
    {
      "key": "e_1_2_1_16_2",
      "first-page": "249",
      "volume": "26",
      "author": "Giannuzzi LA",
      "year": "1999",
      "journal-title": "Microstruct. Sci."
    },
    {
      "key": "e_1_2_1_17_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1063/1.56881"
    },
    {
      "issue": "2",
      "key": "e_1_2_1_18_2",
      "doi-asserted-by": "crossref",
      "first-page": "906",
      "DOI": "10.1017/S1431927600017852",
      "volume": "5",
      "author": "Vartuli CB",
      "year": "1999",
      "journal-title": "Microsc. Microanal."
    },
    {
      "issue": "2",
      "key": "e_1_2_1_19_2",
      "doi-asserted-by": "crossref",
      "first-page": "896",
      "DOI": "10.1017/S1431927600017803",
      "volume": "5",
      "author": "Vartuli CA",
      "year": "1999",
      "journal-title": "Microsc. Microanal."
    },
    {
      "key": "e_1_2_1_20_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1111/j.1365-2818.1993.tb03396.x"
    },
    {
      "key": "e_1_2_1_21_2",
      "first-page": "163",
      "volume-title": "Secondary Ion Mass Spectrometry, SIMS XI",
      "author": "Downey SW",
      "year": "1998"
    },
    {
      "issue": "2",
      "key": "e_1_2_1_22_2",
      "doi-asserted-by": "crossref",
      "first-page": "650",
      "DOI": "10.1017/S1431927600023370",
      "volume": "4",
      "author": "Stevie FA",
      "year": "1998",
      "journal-title": "Microsc. Microanal."
    },
    {
      "key": "e_1_2_1_23_2",
      "doi-asserted-by": "publisher",
      "DOI": "10.1116/1.591115"
    },
    {
      "key": "e_1_2_1_24_2",
      "unstructured": "YoungR CarlesonPD DaX HuntT Walker YoungJF.24th ISTFA Proceedings1998;329 Dallas Texas."
    }
  ],
  "container-title": "Surface and Interface Analysis",
  "original-title": [],
  "language": "en",
  "link": [
    {
      "URL": "https://api.wiley.com/onlinelibrary/tdm/v1/articles/10.1002%2Fsia.1063",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "text-mining"
    },
    {
      "URL": "https://onlinelibrary.wiley.com/doi/full/10.1002/sia.1063",
      "content-type": "unspecified",
      "content-version": "vor",
      "intended-application": "similarity-checking"
    }
  ],
  "deposited": {
    "date-parts": [
      [
        2023,
        11,
        19
      ]
    ],
    "date-time": "2023-11-19T13:58:54Z",
    "timestamp": 1700402334000
  },
  "score": 1,
  "resource": {
    "primary": {
      "URL": "https://analyticalsciencejournals.onlinelibrary.wiley.com/doi/10.1002/sia.1063"
    }
  },
  "subtitle": [],
  "short-title": [],
  "issued": {
    "date-parts": [
      [
        2001,
        5
      ]
    ]
  },
  "references-count": 23,
  "journal-issue": {
    "issue": "5",
    "published-print": {
      "date-parts": [
        [
          2001,
          5
        ]
      ]
    }
  },
  "alternative-id": [
    "10.1002/sia.1063"
  ],
  "URL": "http://dx.doi.org/10.1002/sia.1063",
  "relation": {},
  "ISSN": [
    "0142-2421",
    "1096-9918"
  ],
  "subject": [],
  "container-title-short": "Surface &amp; Interface Analysis",
  "published": {
    "date-parts": [
      [
        2001,
        5
      ]
    ]
  }
}