DOI: 10.1002/sca.4950210602. Comparison of different models for the generation of electron backscattering patterns in the scanning electron microscope

Comparison of different models for the generation of electron backscattering patterns in the scanning electron microscope

10.1002/sca.4950210602

Crossref journal-article

Wiley

Scanning (311)

Abstract

AbstractAn electron backscattering pattern (EBSP) is formed on a fluorescent (or other) screen from the faster scattered electrons when a single‐crystal region of a solid sample is illuminated by a finely focused electron beam (EB). The EBSP is very similar in appearance to the electron channeling pattern (ECP) that is obtained in the scanning electron microscope (SEM) by rocking the beam about a point on the surface of a single crystal. It has been suggested that the mechanisms that give rise to EBSP and ECP are related by reciprocity. If this is indeed the case, then the models that are used to explain them should be the same except for the direction in which the electrons travel through the specimen. The two‐event “diffraction model” for EBSP (diffuse scattering followed by diffraction) fails this condition, leading to the conclusion that the “channeling in and channeling out” model for EBSP is more likely to be correct. This has been described rigorously by Reimer (1979, 1985). It is named after the title used by Joy (1994). An attempt is made here to describe this model in a simple way.

Bibliography

Wells, O. C. (1999). Comparison of different models for the generation of electron backscattering patterns in the scanning electron microscope. Scanning, 21(6), 368â371. Portico.

Authors 1

Oliver C. Wells (first)

References 18 Referenced 34

AlamMN BlackmanM PashleyDW:High‐angle Kikuchi patterns.Proc Roy Soc LondonSeries A 221 224–242(1954) (10.1098/rspa.1954.0017)
BatsonPE: Private communication (1999)
BookerGR:Electron channeling effects using the SEM.Scan Electron Microsc Proc. 3rd Ann. SEM Symposium 489–496(1970)
10.1080/14786436708229969
10.1080/14786436708229968
{'key': 'e_1_2_1_7_1', 'volume-title': 'Microscopy in Material Science Series', 'author': 'Dingley DJ', 'year': '1995'} / Microscopy in Material Science Series by Dingley DJ (1995)
10.1080/14786436208214479
10.1098/rspa.1962.0164
10.1080/14786436208214478
JoyDC:Channeling in and channeling out: The origins of electron backscattering and electron channeling contrast.Proc EMSA592–593(1994) (10.1017/S0424820100170694)
10.1063/1.331668
{'key': 'e_1_2_1_13_1', 'first-page': '404', 'article-title': 'Observation of Ga/AlAs superlattice structures in both secondary and backscattered electron imaging modes with an ultrahigh resolution scanning electron microscope', 'volume': '1', 'author': 'Ogura K', 'year': '1990', 'journal-title': 'Proc 48th Ann Conf EMSA'} / Proc 48th Ann Conf EMSA / Observation of Ga/AlAs superlattice structures in both secondary and backscattered electron imaging modes with an ultrahigh resolution scanning electron microscope by Ogura K (1990)
10.1002/sca.4950020101
ReimerL: Private communication (1994)
10.1007/978-3-662-13562-4
10.1002/sca.4950080303
{'key': 'e_1_2_1_18_1', 'first-page': '1193', 'article-title': 'Electron back‐scattering patterns—A new technique for obtaining crystallographic information in the scanning electron microscope', 'volume': '23', 'author': 'Venables JA', 'year': '1974', 'journal-title': 'Phil Mag'} / Phil Mag / Electron back‐scattering patterns—A new technique for obtaining crystallographic information in the scanning electron microscope by Venables JA (1974)
{'key': 'e_1_2_1_19_1', 'first-page': '479', 'volume-title': 'Electron Microscopy in Materials Science, CNRSM', 'author': 'Wells OC', 'year': '1992'} / Electron Microscopy in Materials Science, CNRSM by Wells OC (1992)

Dates

Type	When
Created	15 years, 1 month ago (June 24, 2010, 1:04 p.m.)
Deposited	1 year, 9 months ago (Oct. 29, 2023, 3:11 a.m.)
Indexed	1 year ago (Aug. 6, 2024, 5:56 a.m.)
Issued	25 years, 9 months ago (Nov. 1, 1999)
Published	25 years, 9 months ago (Nov. 1, 1999)
Published Online	18 years, 8 months ago (Dec. 6, 2006)
Published Print	25 years, 9 months ago (Nov. 1, 1999)

Funders 0

None

BibTeX

@article{Wells_1999, title={Comparison of different models for the generation of electron backscattering patterns in the scanning electron microscope}, volume={21}, ISSN={1932-8745}, url={http://dx.doi.org/10.1002/sca.4950210602}, DOI={10.1002/sca.4950210602}, number={6}, journal={Scanning}, publisher={Wiley}, author={Wells, Oliver C.}, year={1999}, month=nov, pages={368–371} }

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