DOI: 10.1002/sca.20239. The history and development of the helium ion microscope

The history and development of the helium ion microscope

10.1002/sca.20239

Crossref journal-article

Wiley

Scanning (311)

Abstract

SummaryThe helium ion microscope has recently emerged as a commercially available instrument. However, its roots go back more than 60 years to the development of the field ion microscope in Berlin, first reported in 1951. Over the intervening years, numerous researchers have pursued the development of a gas field ionization source with the goal of producing a suitable source for an ion microscope. This proved to be an elusive goal until early in this century when a number of discoveries led to a successful source, and shortly thereafter, an instrument fully able to exploit its advantages. Many individuals and many technical advances have come together to make this new class of microscope. The long history of this quest is reviewed along with the recent advances that led to the achievement of this milestone. A brief summary of the current status of the technology and its applications are given. SCANNING 33: 83–89, 2012. © 2011 Wiley Periodicals, Inc.

Bibliography

Economou, N. P., Notte, J. A., & Thompson, W. B. (2011). The history and development of the helium ion microscope. Scanning, 34(2), 83â89. Portico.

Authors 3

Nicholas P. Economou (first)
John A. Notte (additional)
William B. Thompson (additional)

References 36 Referenced 60

AiharaR.1987. Personal communication with R. Aihara of JEOL.
10.1116/1.2779049
10.1016/0039-6028(73)90066-6
10.1116/1.3237113
10.1111/j.1365-2818.1988.tb01396.x
CutlerP.2011. Personal communication with Paul Cutler of Pennysylvania State University Department of Physics.
10.1016/0169-4332(93)90301-Q
10.1073/pnas.72.5.1826
10.1147/rd.305.0460
10.1007/b101190
10.1116/1.570317
10.1116/1.571238
10.1016/0167-5729(94)90007-8
10.1380/ejssnt.2006.233
10.1016/0169-4332(95)00351-7
10.1007/BF01329651
10.1063/1.1722406
10.1063/1.1683116
10.21236/AD0696987 / Field ion microscopy—principles and applications by Müller EW (1969)
10.1063/1.1713112
{'key': 'e_1_2_8_22_1', 'volume-title': 'The scanning electron microscope', 'author': 'Oatley CW.', 'year': '1972'} / The scanning electron microscope by Oatley CW. (1972)
10.1116/1.568497
10.1007/978-1-4615-0765-9
10.1063/1.1686295
PickardD ScipioniL.2009. Applications note: Graphene nano‐ribbon patterning in the ORION Plus. Carl Zeiss application note available through the web page www.zeiss.com/nts.
10.1016/j.susc.2008.04.034
10.1116/1.570323
10.1063/1.2198536
10.1088/0950-7671/42/8/341
10.1017/S1551929500061897 / Microsc Today / Applications of the helium ion microscope by Scipioni L (2007)
10.1117/12.209185
10.1116/1.2101792
10.1017/S1431927610063270
10.1116/1.2357967
10.1016/0168-583X(92)95180-Y
10.1002/adma.201000436

Dates

Type	When
Created	14 years, 2 months ago (May 24, 2011, 9:32 a.m.)
Deposited	1 year, 11 months ago (Sept. 12, 2023, 10:16 p.m.)
Indexed	1 month ago (July 16, 2025, 8:27 a.m.)
Issued	14 years, 2 months ago (May 24, 2011)
Published	14 years, 2 months ago (May 24, 2011)
Published Online	14 years, 2 months ago (May 24, 2011)
Published Print	13 years, 5 months ago (March 1, 2012)

Funders 0

None

BibTeX

@article{Economou_2011, title={The history and development of the helium ion microscope}, volume={34}, ISSN={1932-8745}, url={http://dx.doi.org/10.1002/sca.20239}, DOI={10.1002/sca.20239}, number={2}, journal={Scanning}, publisher={Wiley}, author={Economou, Nicholas P. and Notte, John A. and Thompson, William B.}, year={2011}, month=may, pages={83–89} }

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